High-quality ultrathin two-dimensional transition-group metal carbide crystal and preparation method thereof

A technology of transition metals and carbides, which is applied in the field of high-quality ultra-thin two-dimensional transition metal carbide crystals and its preparation, can solve the problems of small size, impure materials, and poor quality, and achieve convenient operation and high material composition. Uniform, high hardness effect

Active Publication Date: 2017-01-11
INST OF METAL RESEARCH - CHINESE ACAD OF SCI
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  • Abstract
  • Description
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  • Application Information

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Problems solved by technology

[0007] The purpose of the present invention is to provide a high-quality ultra-thin two-dimensional transition metal carbide crystal and its preparation method, to solve the problems of material impurity, poor quality, a

Method used

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  • High-quality ultrathin two-dimensional transition-group metal carbide crystal and preparation method thereof
  • High-quality ultrathin two-dimensional transition-group metal carbide crystal and preparation method thereof
  • High-quality ultrathin two-dimensional transition-group metal carbide crystal and preparation method thereof

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preparation example Construction

[0045] In a specific embodiment, the method for preparing high-quality ultra-thin two-dimensional transition metal carbide crystals of the present invention adopts a bimetallic laminate composed of copper foil (upper layer) / transition metal foil (bottom layer) as a growth substrate. Under high temperature, the carbon source is catalytically cracked by chemical vapor deposition technology to grow ultra-thin two-dimensional transition metal carbide crystals, and then the copper substrate is etched away to obtain ultra-thin two-dimensional transition metal carbide crystals. The specific steps are as follows:

[0046] (1) CVD growth of two-dimensional transition metal carbides: a bimetallic laminate composed of copper foil (upper layer) / transition metal foil (bottom layer) is used as the growth substrate. During the high-temperature chemical vapor deposition process, the transition metal The foil provides transition group metal atoms. After the copper foil is melted, it acts as a d...

Embodiment 1

[0056] First, if figure 1 As shown, the present invention uses a horizontal reaction furnace to grow ultra-thin transition metal carbides. The two ends of the horizontal reaction furnace are respectively provided with a gas inlet 1 and a gas outlet 3. The copper foil / molybdenum sheet is placed in the high temperature zone of the horizontal reaction furnace. Copper foil / molybdenum sheet (copper foil 20 millimeters * 20 millimeters * 5 microns, purity is 99.5wt%, molybdenum sheet 20 millimeters * 20 millimeters * 100 microns, purity is 99.95wt%) is placed in horizontal reaction furnace (furnace tube 22 mm in diameter, 20 mm in length of the reaction zone) in the central area; heated to 1110°C in a hydrogen atmosphere (the hydrogen flow rate during the heating process is 200 ml / min, and the heating rate is 20°C / min), after the furnace temperature rises to 1110°C A mixed gas of methane and hydrogen was introduced (the gas flow rates were 0.35 ml / min for methane and 200 ml / min for ...

Embodiment 2

[0060] First, if figure 1 As shown, the present invention uses a horizontal reaction furnace to grow ultra-thin transition metal carbides. The two ends of the horizontal reaction furnace are respectively provided with a gas inlet 1 and a gas outlet 3. The copper foil / molybdenum sheet is placed in the high temperature zone of the horizontal reaction furnace. Copper foil / molybdenum sheet (copper foil 20 millimeters * 20 millimeters * 10 microns, purity is 99.5wt%, molybdenum sheet 20 millimeters * 20 millimeters * 100 microns, purity is 99.95wt%) is placed in horizontal reaction furnace (furnace tube 22 mm in diameter, 20 mm in length of the reaction zone) in the central area; heated to 1086°C in a hydrogen atmosphere (the hydrogen flow rate during the heating process is 200 ml / min, and the heating rate is 20°C / min), after the furnace temperature rises to 1086°C A mixed gas of methane and hydrogen (gas flow rates of 0.35 ml / min for methane and 200 ml / min for hydrogen) was introd...

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Abstract

The invention relates to the field of preparation of two-dimensional transition-group metal carbide new materials and preparation thereof by chemical vapor deposition (CVD), particularly a high-quality ultrathin two-dimensional transition-group metal carbide crystal and a preparation method thereof. The preparation method is suitable for preparing large-area high-quality ultrathin two-dimensional transition-group metal carbides. The preparation method comprises the following steps: by using a copper foil (top layer)/transition group metal foil (bottom layer) bimetal lamination as a growth matrix, carrying out catalytic cracking on a carbon source at high temperature by a CVD technique to grow the ultrathin two-dimensional transition metal carbide crystal, and etching to remove the copper matrix, thereby obtaining the ultrathin two-dimensional transition group metal carbide crystal. The high-quality ultrathin two-dimensional transition-group metal carbide crystal has the characteristics of simple preparation technique, controllable product thickness and size and the like, and is suitable for large-area preparation, thereby laying a foundation for the research and application of the high-quality ultrathin two-dimensional transition-group metal carbide crystal in the fields of catalysis, energy storage, wear-resistant coatings, transparent conducting films, heat management and two-dimensional superconduction.

Description

[0001] Technical field: [0002] The invention relates to the field of two-dimensional transition metal carbide new material and its chemical vapor deposition (CVD) preparation, specifically a high-quality ultra-thin two-dimensional transition metal carbide crystal and a preparation method thereof, suitable for large area, high Preparation of high-quality two-dimensional transition metal carbides. [0003] Background technique: [0004] Just like graphene, other two-dimensional crystals with large size and high quality are not only very important for exploring new physical phenomena and properties under the two-dimensional limit, but also have many novel applications in the fields of electronics and optoelectronics. Transition metal carbides are a large family that combines the properties of ceramics and metals, on the one hand they have high strength and hardness, as well as high melting points, excellent stability and corrosion resistance at high temperatures, and good therma...

Claims

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Application Information

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IPC IPC(8): C30B29/36C30B29/64C30B25/00
Inventor 任文才徐川陈龙成会明
Owner INST OF METAL RESEARCH - CHINESE ACAD OF SCI
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