Method for preparing solar cell absorber layer sb2se3 thin film based on magnetron sputtering and post selenization

A technology of solar cells and magnetron sputtering, which is applied in the direction of sputtering coating, coating, circuits, etc., can solve the problems of many defects, poor stability of solar cells, poor crystallinity of films, etc., and achieve single phase, simple equipment, Effects of loose control conditions

Inactive Publication Date: 2019-05-07
FUJIAN NORMAL UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In 2009, Messina et al. in Mexico first prepared Sb by directly adopting the CBD method. 2 S x Se 3-x : Sb 2 o 3 material, and prepared a solar cell with a photoelectric efficiency of 0.66%, but since the selenium source used during annealing is a selenium film deposited in a chemical water bath, the volatile selenium film during annealing will cause problems such as poor film crystallinity and many defects. Limiting the improvement of its battery conversion efficiency, it has not been paid attention to (Messina S, Nair M T S, Nair P K. Solar cells with Sb 2 S 3 absorber films [J]. Thin Solid Films, 2009, 517(7): 2503-2507.)
However, this organic-inorganic hybrid solar cell still has problems such as poor stability.

Method used

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  • Method for preparing solar cell absorber layer sb2se3 thin film based on magnetron sputtering and post selenization
  • Method for preparing solar cell absorber layer sb2se3 thin film based on magnetron sputtering and post selenization
  • Method for preparing solar cell absorber layer sb2se3 thin film based on magnetron sputtering and post selenization

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0041] 1. First, clean the molybdenum-coated glass substrate: immerse the molybdenum-coated glass substrate in sequence in detergent (60wt% sodium alkylsulfonate, 40wt% fatty alcohol ether sodium sulfate mixture), deionized water, 99% ethanol, 99.5% acetone solution, then cleaned in a plasma cleaner, and dried with nitrogen;

[0042] 2. Place the cleaned molybdenum-coated glass substrate in the magnetron sputtering studio;

[0043] 3. Use the magnetron sputtering coating system to pump the background vacuum of the magnetron sputtering coating system to less than 5.0pa;

[0044] 4. Sputtering gas Ar bombards the target through the magnetron sputtering coating machine,

[0045] The sputtering gas uses argon with a purity of 99.9%;

[0046] The target material adopts Sb with a purity of 99.8% 2 Se 3 target;

[0047] The working air pressure in the magnetron sputtering studio is 0~0.2pa;

[0048] 5. The setting parameters are: power: 120W; gas flow: 60sccm; deposition time: ...

Embodiment 2

[0053] 1. First, clean the molybdenum-coated glass substrate: immerse the molybdenum-coated glass substrate in sequence in detergent (60wt% sodium alkylsulfonate, 40wt% fatty alcohol ether sodium sulfate mixture), deionized water, 99% ethanol, 99.5% acetone solution, then cleaned in a plasma cleaner, and dried with nitrogen;

[0054] 2. Place the cleaned molybdenum-coated glass substrate in the magnetron sputtering studio of the magnetron sputtering coating system;

[0055] 3. Use the magnetron sputtering coating system, the magnetron sputtering coating system is the existing technology (such as the magnetron sputtering coating equipment produced by the Institute of Microelectronics of the Chinese Academy of Sciences or the JGP series multi-target produced by Shenyang New Blue Sky Vacuum Technology Co., Ltd. Magnetron sputtering coating equipment), the background vacuum of the magnetron sputtering coating system is evacuated to less than 5.0pa;

[0056] 4. Sputtering gas Ar b...

Embodiment 3

[0065] 1. First, clean the soda-lime glass substrate: immerse the soda-lime glass substrate in sequence in detergent (60wt% sodium alkylsulfonate, 40wt% fatty alcohol ether sodium sulfate mixture), deionized water, 99% ethanol, 99.5% acetone solution, then cleaned in a plasma cleaner, and dried with nitrogen;

[0066] 2. Place the cleaned soda-lime glass substrate in the magnetron sputtering studio;

[0067] 3. Use the magnetron sputtering coating system to pump the background vacuum of the magnetron sputtering coating system to less than 5.0pa;

[0068] 4. Sputtering gas Ar bombards the target through the magnetron sputtering coating machine,

[0069] The sputtering gas is argon with a purity of 99.9%;

[0070] The target material adopts Sb with a purity of 99.8% 2 Se 3 target;

[0071] The working air pressure in the magnetron sputtering studio is 0~0.2pa;

[0072] 5. The setting parameters are: power: 30W; gas flow: 60sccm; deposition time: 1.5h;

[0073] 6. The sput...

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Abstract

The invention discloses a method for preparing a solar cell absorption layer Sb2Se3 film based on magnetron sputtering and post-selenization. The method is characterized in that a substrate is one of a molybdenum plating film, conductive glass, soda-lime glass, silica glass and metal foil; the purity of a magnetron sputtering Sb2Se3 target material is 96-99.9%; the Sb2Se3 target material is deposited on the cleaned substrate in argon atmosphere through magnetron sputtering, and a Sb2Se3 precursor film is formed and stored in vacuum environment; the Sb2Se3 precursor film is subjected to selenylation heat treatment in selenium atmosphere, and finally the Sb2Se3 film is obtained. The preparation method of carrying out heat treatment in selenium atmosphere after carrying out magnetron sputtering on the Sb2Se3 precursor film has the advantages that the synthesized film phase is pure and single, the manufacturing technology is simple, safe and nontoxic, large-area production can be achieved, and the thickness is easy to control.

Description

technical field [0001] The invention relates to the technical field of solar cell materials and devices, in particular to a solar cell absorbing layer Sb prepared by magnetron sputtering and post-selenization 2 Se 3 thin film method. Background technique [0002] Energy is an important material basis for the survival and development of human society, a strategic resource and basic industry for the national economy, and a source of power that drives the development of productive forces and the progress of civilization. With the progress of the times, coal and thermal power supply methods have gradually exposed their disadvantages. Traditional energy with limited reserves has become a one-off product. Problems such as greenhouse effect, acid rain, and smog reflect the irreversibility of the environment and the scarcity of energy. . Therefore, in order to solve the relationship between energy shortage and environmental coordination, people turn their attention to solar radia...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/35C23C14/06C23C14/58H01L31/032
CPCC23C14/0623C23C14/35C23C14/5806H01L31/032
Inventor 陈桂林王伟煌张碧云陈水源黄志高
Owner FUJIAN NORMAL UNIV
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