A kind of nano-α-alumina/chromia composite coating and preparation method thereof

A composite coating and aluminum oxide technology, applied in coating, metal material coating process, vacuum evaporation plating, etc., can solve the problems of poor film/substrate bonding force, large internal stress of coating, difficult engineering application, etc. Achieve low cutting heat, low friction coefficient, and suppress target poisoning

Active Publication Date: 2019-04-09
SOUTH CHINA UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Depositing α-Al by Traditional Chemical Vapor Deposition (CVD) 2 o 3 , the deposition temperature is as high as 1000 ℃, only cemented carbide can be used as the substrate, and the coating has large internal stress, coarse grains, high brittleness, poor film / substrate bonding force, etc., and there are also problems such as exhaust emissions and environmental pollution.
The deposition of alumina coating by PVD method has the advantages of low temperature and environmental friendliness, but the deposited coating contains a large amount of amorphous and γ-Al 2 o 3 Such metastable phases are difficult for practical engineering applications. At present, it is difficult to react and deposit single-phase α-Al on the surface of substrates such as high-speed steel and cemented carbide by PVD method. 2 o 3 coating

Method used

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  • A kind of nano-α-alumina/chromia composite coating and preparation method thereof
  • A kind of nano-α-alumina/chromia composite coating and preparation method thereof
  • A kind of nano-α-alumina/chromia composite coating and preparation method thereof

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0032] (1) Select AlCr40 alloy as the high-power pulse magnetron sputtering target, and install it in the corresponding target station of high-power pulse magnetron sputtering;

[0033] (2) Choose W6Mo5Cr4V2 high-speed steel as the substrate, cut it into Φ10×5mm size, after conventional quenching + 560°C (3 times) tempering, grind and polish the coating surface, and put it in anhydrous alcohol solution for ultrasonic cleaning for 15min Remove the oil, put it on the sample stage after drying, and adjust the distance between the sample and the target to 100mm;

[0034] (3) After pre-pumping the background vacuum to 10-20Pa, turn on the vacuum heating and baking system, set the baking temperature at 150°C, and then pump to the background vacuum of 6×10 -4 Pa, fill the vacuum chamber with Ar gas and adjust the throttle valve until the vacuum degree returns to 20Pa, open the throttle valve after stabilizing for 10 minutes, and then pump to 6×10 -4 Pa background vacuum;

[0035] (...

Embodiment 2

[0041] (1) Select AlCr40 alloy as the high-power pulse magnetron sputtering target, and install it in the corresponding target station of high-power pulse magnetron sputtering;

[0042] (2) Choose W6Mo5Cr4V2 high-speed steel as the substrate, cut it into Φ10×5mm size, after conventional quenching + 560°C (3 times) tempering, grind and polish the coating surface, and put it in anhydrous alcohol solution for ultrasonic cleaning for 15min Remove the oil, put it on the sample stage after drying, and adjust the distance between the sample and the target to 100mm;

[0043] (3) After pre-pumping the background vacuum to 10-20Pa, turn on the vacuum heating and baking system, set the baking temperature at 150°C, and then pump to the background vacuum of 6×10 -4 Pa, fill the vacuum chamber with Ar gas and adjust the throttle valve until the vacuum degree returns to 20Pa, open the throttle valve after stabilizing for 10 minutes, and then pump to 6×10 -4 Pa background vacuum;

[0044] (...

Embodiment 3

[0050] (1) Select AlCr5 alloy as the high-power pulse magnetron sputtering target, and install it in the corresponding target station of high-power pulse magnetron sputtering;

[0051] (2) Choose W6Mo5Cr4V2 high-speed steel as the substrate, cut it into Φ10×5mm size, after conventional quenching + 560°C (3 times) tempering, grind and polish the coating surface, and put it in anhydrous alcohol solution for ultrasonic cleaning for 15min Remove the oil, put it on the sample stage after drying, and adjust the distance between the sample and the target to 100mm;

[0052] (3) After pre-pumping the background vacuum to 10-20Pa, turn on the vacuum heating and baking system, set the baking temperature at 150°C, and then pump to the background vacuum of 6×10 -4 Pa, fill the vacuum chamber with Ar gas and adjust the throttle valve until the vacuum degree returns to 20Pa, open the throttle valve after stabilizing for 10 minutes, and then pump to 6×10 -4 Pa background vacuum;

[0053] (4...

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Abstract

The invention belongs to the technical field of metal coatings and discloses a nano alpha-aluminum oxide / chromium oxide composite coating and a preparation method thereof. The preparation method comprises the steps that AlCr alloy serves as a deposition target material, and the deposition target material and a workpiece base body are installed on a high power pulsed magnetron sputtering target station and a deposition chamber sample platform correspondingly; after residual water vapor in a vacuum chamber is removed, the vacuum chamber is pumped to a base vacuum; the workpiece base body is heated to the required temperature, then mixed gas of Ar and O2 is injected, and pre-oxidation treatment is conducted; and the partial pressure of the O2 in the mixed gas of the Ar and the O2 is adjusted to be 6%-15%, the temperature of the workpiece base body is adjusted to be 480-700 DEG C, a high power pulsed magnetron sputtering film coating system is started, reaction and deposition are started, and the nano alpha-aluminum oxide / chromium oxide composite coating is obtained. The nano alpha-aluminum oxide / chromium oxide composite coating obtained through the preparation method is a nanocrystalline structure coating, good in toughness and firmly combined with the base body and has a stable alpha phase structure.

Description

technical field [0001] The invention belongs to the technical field of metal coatings, in particular to a nano-α-alumina / chromium oxide composite coating and a preparation method thereof. Background technique [0002] Modern processing tends to be high-speed, precise and automatic, which puts forward higher performance requirements for processing turning tools, drill bits and various milling cutters. The high-speed friction temperature between the high-speed machining tool and the workpiece can be as high as 700-1000°C. Traditional tools are coated with carbide (such as high-speed steel, hard alloy, etc.) and nitride (titanium nitride, titanium carbonitride) Improve the hardness of the tool, but the diffusion activity of carbon and nitrogen is very high at high temperature. The high temperature generated during high-speed machining makes carbon and nitrogen elements quickly diffuse to the workpiece and form high-hardness carbides and nitrides, forming severe abrasive particl...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/08C23C14/34
CPCC23C14/0036C23C14/081C23C14/083
Inventor 邱万奇王书林钟喜春刘仲武焦东玲
Owner SOUTH CHINA UNIV OF TECH
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