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Lanthanum calcium manganese oxygen-lanthanum strontium manganese oxygen-lead strontium titanate composite film and preparation method thereof

A technology of lanthanum calcium manganese oxide thin film, strontium lead titanate, applied in metal material coating process, coating, liquid chemical plating and other directions, can solve the problems of obtaining magneto-capacitance effect, etc. Easy to control and beneficial to large-scale production

Active Publication Date: 2017-07-14
SHANGHAI INST OF CERAMIC CHEM & TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This will help to solve the problem that the magnetocapacitive effect cannot be obtained in a wide temperature range around room temperature in the world, and has positive significance for the multifunctional and practical development of devices.

Method used

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  • Lanthanum calcium manganese oxygen-lanthanum strontium manganese oxygen-lead strontium titanate composite film and preparation method thereof
  • Lanthanum calcium manganese oxygen-lanthanum strontium manganese oxygen-lead strontium titanate composite film and preparation method thereof
  • Lanthanum calcium manganese oxygen-lanthanum strontium manganese oxygen-lead strontium titanate composite film and preparation method thereof

Examples

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preparation example Construction

[0030] The following examples illustrate the preparation method of the composite film, which may specifically include the following steps.

[0031] Substrate cleaning and pretreatment. First place the substrate in acetone, ethanol and water for ultrasonic cleaning to remove dust or other impurities on the surface of the substrate, and then preferably anneal in a rapid annealing furnace to enhance the surface activity of the substrate.

[0032] Preparation of precursor solution.

[0033] Add lanthanum acetate, calcium acetate and manganese acetate into the mixed liquid solvent composed of acetic acid and water in molar ratio, and heat to reflux to completely dissolve the solvent. Then, add an appropriate amount of stabilizer acetylacetone to the mixed solution, and heat to reflux. Finally, the mixed solution is filtered to obtain a stable lanthanum calcium manganese oxide precursor solution. The molar ratio of the three solutes of lanthanum acetate, strontium acetate and man...

Embodiment

[0041] (1) Cleaning of silicon substrate

[0042] First, blow off the pollutants on the surface of the silicon substrate with nitrogen, and then place the silicon wafer in acetone, ethanol and deionized water for 10 minutes to ultrasonically clean it. After the substrate is cleaned, dry it at 450°C and let it cool naturally for later use;

[0043] (2) Preparation of precursor solution

[0044] Dissolve lanthanum acetate, calcium acetate and manganese acetate with a molar ratio of La:Ca:Mn of 0.7:0.3:1 in a mixed solvent of acetic acid and deionized water, heat to 60-80°C to completely dissolve the solute, and then add Mixture acetylacetone, and continue to heat to make the solute react completely, the volume ratio of acetic acid and acetylacetone is 5:1:1, the concentration of manganese element in the solution is 0.15M / L, and the obtained solution is placed at room temperature for 72-96h, with 0.2 Filter the solution with a micron microporous filter to obtain a stable LCMO fi...

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Abstract

The invention relates to a lanthanum calcium manganese oxygen-lanthanum strontium manganese oxygen-lead strontium titanate composite film and a preparation method thereof. The composite film comprises a lanthanum calcium manganese oxygen film layer, a lanthanum strontium manganese oxygen film layer and a lead strontium titanate film layer which are sequentially stacked on a substrate. The composite film provided by the invention is low in surface roughness, free of micro crack and stable in performance, has the advantages of being good in ferromagnetic property, ferroelectric property and indoor-temperature magnetocapacitance effect and the like, can be compatible with the semiconductor integrated circuit technology, and is high in applicability. The method provided by the invention is cheap in raw material, non-toxic, free of tocix gas emission in the preparation process, and low in environment pollution. The preparation technique is simple, no special equipment is needed, and scale production is facilitated.

Description

technical field [0001] The invention relates to a lanthanum-calcium-manganese-oxygen-lanthanum-strontium-manganese-oxygen-strontium-lead titanate composite thin film and a preparation method thereof, belonging to the technical field of magnetoelectric composite materials. Background technique [0002] Magnetoelectric composite materials are composed of ferromagnetic materials and ferroelectric materials, which can produce a class of important functional materials with magnetoelectric effects. Utilizing the sensitivity of its capacitance or permittivity to external magnetic fields (magnetocapacitance effect), it can provide an additional degree of freedom for traditional device design for the development of magnetic field sensors, dielectric drivers, spin-to-charge converters, and tunable filters. Devices, etc., have potential important application prospects in microwave communication, information, computer, aerospace and other fields. [0003] Chaudhuri et al. (Journal of A...

Claims

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Application Information

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IPC IPC(8): C23C18/12
CPCC23C18/1216C23C18/1225C23C18/1245C23C18/1254C23C18/1295
Inventor 董显林薛粉陈莹王根水
Owner SHANGHAI INST OF CERAMIC CHEM & TECH CHINESE ACAD OF SCI
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