Diamond-based electrode material of seawater salinity sensor

A sensor electrode, diamond technology, applied in metal material coating process, material inspection products, test water and other directions, can solve the problems affecting the measurement accuracy, reliability and life of seawater salinity sensor, electrode surface physical and chemical degradation, accuracy , reliability and life reduction, etc., to achieve the effect of strong anti-biological adhesion, strong anti-pollution characteristics, and easy reprocessing.

Active Publication Date: 2017-09-08
青岛浦泽海洋科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, when the electrode-type seawater salinity sensor is used in seawater, the environment is extremely harsh. Factors such as seawater pollution, seawater corrosion, humidity, high pressure, and biological adhesion often damage the electrode material, affecting the measurement accuracy and reliability of the seawater salinity sensor. sex and longevity
The preparation process of the electrode material is the technical bottleneck of the electrode seawater salinity sensor. At present, the electrode seawater salinity sensor mostly u...

Method used

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  • Diamond-based electrode material of seawater salinity sensor
  • Diamond-based electrode material of seawater salinity sensor

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Experimental program
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Embodiment 1

[0035] Boron-doped diamond thin film electrode materials are prepared by microwave plasma enhanced chemical vapor deposition, such as figure 2 Shown:

[0036](1) Single crystal silicon is used as the substrate 1 for depositing a boron-doped diamond film, the roughness of the silicon is 15 nm, and the thickness of the silicon wafer substrate is 400 μm. In order to achieve a high nucleation density, the monocrystalline silicon wafer was pretreated for 30 minutes in a suspension containing 0.05wt% nano-diamond particles (5nm size);

[0037] (2) The deposition process is carried out at a constant pressure of 6000Pa, the reaction temperature is 800°C, the microwave power emitted by the microwave source is 1800W, the reaction gas is a mixed gas composed of methane and hydrogen, and trimethylborane with less toxicity is added as The doped boron source realizes the growth of boron-doped nano-diamond film. The three gases are passed into the vacuum chamber 16 of the reaction chamber...

Embodiment 2

[0041] Boron-doped diamond / amorphous carbon composite thin film electrode materials are prepared by hot wire chemical vapor deposition, such as image 3 Shown:

[0042] (1) Using monocrystalline silicon as the substrate 1 for depositing the diamond composite film, the roughness of the silicon is less than 5nm, and the thickness of the silicon wafer substrate is 400 μm;

[0043] (2) Put the monocrystalline silicon substrate into the hot wire chemical vapor deposition equipment, use methane as the carbon source, trimethylborane as the boron source, and the mass concentration of boron in the mixed gas is 2000ppm, methane, hydrogen, trimethylborane The mixed gas of borane is passed into the reaction chamber, and under the action of the hot wire 18, the reaction temperature is 600 ° C, and the reaction time is 8 hours, and the boron-doped diamond / amorphous carbon with a thickness of 1 μm is prepared on the single crystal silicon substrate 1. Composite film17.

[0044] (3) A titan...

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Abstract

The invention discloses a diamond-based electrode material of a seawater salinity sensor. A diamond thin film material and a diamond composite thin film material are used as the electrode material of the seawater salinity sensor. The diamond thin film material comprises a boron-doped polycrystalline diamond thin film material body and a boron-doped nano diamond thin film material body. The diamond composite thin film material comprises a diamond and graphite composite thin film material body, a diamond and carbide composite thin film material body, boron-doped diamond and amorphous carbon composite thin film material body and a diamond thin film material body with the surface being decorated or modified through metal, or organic matters or inorganic molecules. The electrode material has the advantages of wide electrochemical window, low background current, high corrosion resistance, strong biological adhesion prevention capacity, high mechanical strength, high stability of chemical performance, more functional ways, good reprocessability, high biocompatibility and the like. The measurement precision and reliability of the seawater salinity sensor are further improved, and the service life of the seawater salinity sensor is prolonged.

Description

technical field [0001] The invention relates to the technical field of seawater quality monitoring equipment, in particular to a diamond-based electrode material for seawater salinity sensors. Background technique [0002] Salinity is an important parameter that plays a key role in ocean dynamics and the interaction between the ocean and the atmosphere. Changes in salinity have a strong internal relationship with changes in the ocean environment and climate. Its accurate detection is of great significance to the research of oceanography, monitoring and forecasting of marine environment and climate, military affairs, coastal oil production, and marine fisheries. [0003] Electrode seawater salinity sensor has been widely used in ocean salinity detection due to its advantages of high measurement accuracy and fast response. However, when the electrode-type seawater salinity sensor is used in seawater, the environment is extremely harsh. Factors such as seawater pollution, seaw...

Claims

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Application Information

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IPC IPC(8): C23C16/27C23C16/30C23C16/511C23C14/35C23C14/30C23C14/18C23C14/16G01N33/18
CPCC23C14/16C23C14/165C23C14/18C23C14/185C23C14/30C23C14/35C23C16/271C23C16/274C23C16/278C23C16/30C23C16/511G01N33/18
Inventor 姜辛盖志刚李恒郭风祥李正军邰凯平黄楠刘鲁生史丹
Owner 青岛浦泽海洋科技有限公司
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