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Palladium/magnesium-titanium dioxide gas-induced dimming film and its preparation

A technology of titanium dioxide and dimming film, which is applied in the field of palladium/magnesium-titanium dioxide gas-induced dimming film and preparation, can solve the problems of unfavorable commercial application, poor durability and high preparation cost, and achieves low cost, good durability and recovery. short time effect

Active Publication Date: 2019-10-22
SHANGHAI JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Among the magnesium-rare earth metal thin films, palladium / magnesium-yttrium has the best performance and high durability, but to improve the transmittance of the transparent state, it is necessary to thin the palladium and add a transition layer to prevent the diffusion of the magnesium matrix to the palladium layer and destroy the interlayer structure. , which makes the preparation cost too high, which is not conducive to large-area commercial application
Magnesium-alkaline earth metal thin film has good light transmission performance in hydrogen absorption state, but poor durability
There is no report on the application of magnesium-titanium dioxide co-sputtered composite films for dimming glass or other light-transmitting materials

Method used

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  • Palladium/magnesium-titanium dioxide gas-induced dimming film and its preparation
  • Palladium/magnesium-titanium dioxide gas-induced dimming film and its preparation
  • Palladium/magnesium-titanium dioxide gas-induced dimming film and its preparation

Examples

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Effect test

Embodiment 1

[0037] This embodiment provides a method for preparing a palladium / magnesium-titanium dioxide gas-induced dimming film, comprising the following steps:

[0038] (1) A titanium dioxide target is made of titanium dioxide powder with a purity (mass fraction) of 99.99%, and a copper back plate is added. The same titanium dioxide target is used in the following examples 2 to 6;

[0039] (2) Soak the quartz glass sheet with the prepared cleaning solution for 10 minutes, rinse the quartz glass sheet with deionized water for 1 minute; put the cleaned quartz glass substrate into the magnetron sputtering reaction chamber, and turn on the vacuum system for vacuuming , until the background vacuum is 3×10 -6 Torr;

[0040] (3) Heating the substrate so that the temperature of the substrate is 20-25°C, injecting the working gas, and maintaining 5×10 -3 After the pressure of Torr is stable, turn on the power of the magnesium and titanium dioxide targets, pre-sputter for 5 minutes to clean t...

Embodiment 2

[0045] This embodiment provides a method for preparing a palladium / magnesium-titanium dioxide gas-induced dimming film, comprising the following steps:

[0046] (1) Soak the quartz glass sheet with the prepared cleaning solution for 10 minutes, rinse the quartz glass sheet with deionized water for 1 minute; put the cleaned quartz glass substrate into the magnetron sputtering reaction chamber, and turn on the vacuum system for vacuuming , until the background vacuum is 3×10 -6 Torr;

[0047] (2) Heating the substrate so that the temperature of the substrate is 20-25°C, injecting working gas, and maintaining 5×10 -3 After the pressure of Torr is stabilized, turn on the power of the magnesium and titanium dioxide targets, pre-sputter for 5 minutes to clean the targets, set the sputtering power of the magnesium and titanium dioxide targets to 180W and 400W respectively, and the sputtering time to 50s, start Deposit magnesium-titanium dioxide film with a film thickness of 56nm; ...

Embodiment 3

[0050] This embodiment provides a method for preparing a palladium / magnesium-titanium dioxide gas-induced dimming film, comprising the following steps:

[0051] (1) Soak the quartz glass sheet with the prepared cleaning solution for 10 minutes, rinse the quartz glass sheet with deionized water for 1 minute; put the cleaned quartz glass substrate into the magnetron sputtering reaction chamber, and turn on the vacuum system for vacuuming , until the background vacuum is 3×10 -6 Torr;

[0052] (2) Heating the substrate so that the temperature of the substrate is 20-25°C, injecting working gas, and maintaining 5×10 -3 After the pressure of Torr is stabilized, turn on the power of magnesium and titanium dioxide targets, pre-sputter for 5 minutes to clean the targets, set the sputtering power of magnesium and titanium dioxide targets to 80W and 300W respectively, and the sputtering time to 180s, start Depositing a magnesium-titanium dioxide thin film with a film thickness of 100nm...

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Abstract

The invention discloses a palladium / magnesium-titanium dioxide gas-induced light-adjusting film and preparation thereof. The film comprises a magnesium-titanium dioxide composite film layer and a palladium catalyst layer which are successively arranged on a substrate. The preparation method comprises the following steps: growing the magnesium-titanium dioxide composite film layer on the substrate by a direct current magnetron sputtering method; and then growing the palladium catalyst layer on the film layer by a radiofrequency magnetron sputtering method. By a catalytic effect of a palladium film, hydrogen is decomposed into hydrogen atoms which are combined to a magnesium matrix to generate hydride, titanium dioxide is added to reduce the degree of crystallinity of magnesium, diffusion of the magnesium matrix to the palladium film is reduced, heating and pressurizing are not required, and reversible transformation of the film between a reflection state and a transparent state can be realized at room temperature. The light-adjusting film is low in cost, simple in process, short in response and recovery time and good in durability, and has important application prospect in the field of intelligent glass.

Description

technical field [0001] The invention belongs to the technical field of dimming films, and in particular relates to a gas-induced dimming film of palladium / magnesium-titanium dioxide and its preparation. Background technique [0002] Smart glass has been widely studied because of its rich and changeable optical properties. The surface of this glass is covered with a layer of light-adjusting film, which can react with hydrogen to form hydride, change its own energy band structure, and switch between transparent and reflective states. . The earliest discovered pure rare earth films were yttrium and lanthanum. With the discovery of magnesium's excellent hydrogen storage properties, magnesium-based composite films were gradually applied to smart glass. There are many systems of mainstream magnesium-based thin films, such as magnesium-rare earth metal, magnesium-alkaline earth metal and so on. Among the magnesium-rare earth metal thin films, palladium / magnesium-yttrium has the b...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/35C23C14/18C03C17/36
Inventor 陈娟刘越彭立明韩靖宇邓南香丁文江
Owner SHANGHAI JIAOTONG UNIV
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