Composite humidity sensitive material used for capacitive humidity sensor and sensor preparation method

A humidity sensor and humidity-sensitive material technology, applied in the direction of material capacitance, etc., can solve the problems of long time required, cumbersome preparation methods, low synthesis temperature, etc., and achieve the effects of stable structure and performance, easy long-term storage, and simple operation process

Inactive Publication Date: 2018-01-19
王琮
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Traditional ceramic-based moisture-sensitive materials have many problems to be solved, such as degradation of hysteresis characteristics in complex environments, detection drift under high temperature and high humidity, and detection sensitivity due to pore structure, pore size irregularity, and distribution defects Problems such as poor detection accuracy of drop and low humidity
[0003] At present, the sol-gel method is commonly used to manufacture composite moisture-sensitive materials. The composite moisture-sensitive materials prepared by the sol-gel method can obtain the required homogeneous multi-component system by mixing different materials. The synthesis temperature is low, and the sol or The rheological properties of the gel are conducive to the preparation of the desired humidity sensor moisture-sensing film by the spin-coating technique commonly used in semiconductor micro-nano processing, but during the processing process, it is found that there are some problems to be solved in this technology: first, the preparation method is cumbersome , it is

Method used

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  • Composite humidity sensitive material used for capacitive humidity sensor and sensor preparation method
  • Composite humidity sensitive material used for capacitive humidity sensor and sensor preparation method
  • Composite humidity sensitive material used for capacitive humidity sensor and sensor preparation method

Examples

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Example Embodiment

[0038] Example 1

[0039] A method for manufacturing an adjustable capacitive humidity sensor is as follows:

[0040] Step 1. Use a glass substrate and clean it once with isopropylamine solution, and then wash it twice with deionized water to ensure that the surface is clean and free of impurities;

[0041] Step 2, growing a layer of titanium, platinum, gold or chromium with a thickness of about 300-500 nanometers as the lower metal layer of the humidity sensor by means of electron beam evaporation;

[0042] Step 3. Mix titanium oxide and barium strontium titanate in a mass ratio of 1:1 to form a functional ceramic material by ball milling process, and ensure uniform mixing, so as to obtain higher high-humidity characteristics;

[0043] Step 4. The polyamide (Polyamide) and the above-mentioned functional ceramic material are further fully and uniformly mixed by ball milling method according to the mass ratio of 0.3wt%, so as to obtain the best hysteresis characteristics, which ...

Example Embodiment

[0051] Example 2

[0052] A method for manufacturing an adjustable capacitive humidity sensor is as follows:

[0053] Step 1. Use a quartz substrate, and use isopropylamine solution to clean it once, and then use deionized water to wash it twice to ensure that the surface is clean and free of impurities;

[0054] Step 2: growing a layer of titanium, platinum, gold or chromium with a thickness of about 300-500 nanometers as the lower metal layer of the humidity sensor by means of electron beam evaporation;

[0055] Step 3: Mix titanium oxide and barium strontium titanate at a mass ratio of 1:1 by ball milling to ensure uniform mixing and stable performance of the initial functional ceramic material, thereby obtaining higher high-humidity characteristics;

[0056] Step 4: The high molecular polymer polyamide (Polyamide) and the above-mentioned functional ceramic material are further fully and uniformly mixed with the functional ceramic material by ball milling method according ...

Example Embodiment

[0063] Example 3

[0064] A method for manufacturing an adjustable capacitive humidity sensor is as follows:

[0065] Step 1: Use a silicon substrate, wash it once with isopropylamine solution, and then wash it twice with deionized water solution to ensure that the surface is clean and free of impurities;

[0066] Step 2: growing a layer of titanium, platinum, gold or chromium with a thickness of about 300-500 nanometers as the lower metal layer of the humidity sensor by means of electron beam evaporation;

[0067] Step 3: Mix titanium oxide and barium strontium titanate at a mass ratio of 1:1 by ball milling to ensure uniform mixing and stable performance of the initial functional ceramic material, thereby obtaining higher high-humidity characteristics;

[0068] Step 4: The high molecular polymer polytetrafluoroethylene (PTFE) and the above-mentioned functional ceramic material are further fully and uniformly mixed with the functional ceramic material by a ball milling metho...

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Abstract

The present invention provides a composite humidity sensitive material used for a capacitive humidity sensor and a sensor preparation method, the formula of the composite humidity sensitive material is as follows: mixing titanium oxide or barium titanate with barium strontium titanate in the mass ratio of 1:1-1:3 to obtain an initial functional ceramic material, mixing polyamide or polytetrafluoroethylene with the initial functional ceramic material in the mass ratio of 0.3wt%-0.5wt% to obtain a mixture; and mixing an inert metal with the mixture in the mass ratio of 15wt%-25wt%. A composite humidity sensitive film is prepared by an aerosol deposition technology from the composite humidity sensitive material, and the capacitive humidity sensor is prepared from the film by a semiconductor processing technology. The sensor has high precision, high stability, heat resistance, pollution prevention and high reliability.

Description

technical field [0001] The invention relates to a composite moisture-sensitive material used for a capacitive humidity sensor and a sensor preparation method. Background technique [0002] The advantages of capacitive humidity sensors are fast response, small size, good linearity, and stability, but most of the products that achieve the above performance are foreign brands, and the prices are very expensive. Some low-priced capacitive humidity sensors sold in the domestic market often fail to reach the above level, and their linearity, consistency and repeatability are not ideal. Below 30% RH, the humidity sensing section above 80% RH is seriously deformed. And regardless of the high-grade or low-grade capacitive humidity sensor, the long-term stability is not ideal. After long-term use, there will be a certain delay in the process of moisture absorption and dehumidification, which will reduce the accuracy of humidity measurement. Moreover, most capacitive humidity sensors ...

Claims

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Application Information

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IPC IPC(8): G01N27/22
Inventor 王琮
Owner 王琮
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