Graphene-ZnO composite material, preparation method thereof, and ultraviolet detector

A composite material and graphene technology, applied in the field of ultraviolet detectors, can solve the problems of low specific surface area, high electron-hole recombination rate, non-light corrosion resistance, etc., and achieve the goal of increasing surface area, high absorption rate and low reflectance Effect

Active Publication Date: 2019-05-03
THE CHINESE UNIV OF HONG KONG SHENZHEN
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  • Abstract
  • Description
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  • Application Information

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Problems solved by technology

[0004] However, the detectors of such ZnO nanomaterials have the disadvantages of high elect

Method used

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preparation example Construction

[0030] The invention provides a kind of preparation method of graphene-ZnO composite material, comprises the following steps:

[0031] (1) Adopt radio frequency plasma enhanced chemical vapor deposition to obtain vertical graphene flakes on the substrate, and the substrate adopts nickel foam.

[0032] Preferably, the specific process of using radio frequency plasma enhanced chemical vapor deposition method to vertically grow graphene flakes on the substrate includes: placing the foamed nickel substrate into the reaction chamber of radio frequency plasma enhanced chemical vapor deposition equipment. On the stage, argon gas is introduced first, and the gas pressure in the reaction chamber is kept at 1 Torr. Under a current of 60A, the temperature of the substrate is raised to 600-1100°C at a heating rate of 20-25°C / min, such as 600°C, 700°C, 800°C, 900°C, 1000°C or 1100°C; then, methane and hydrogen are passed into the reaction chamber. When the gas pressure in the reaction cham...

Embodiment 1

[0048] (1) Use oxygen plasma to clean the reaction chamber of the RF plasma-enhanced chemical vapor deposition equipment; during the cleaning process: make the sample stage temperature reach 700°C, set the oxygen plasma power to 800-1000W; the cleaning time is 80min.

[0049] (2) Dip the nickel foam substrate to be used into isopropanol solution and ultrasonically clean it, then rinse it with deionized water, and dry it with nitrogen gas.

[0050] (3) put the foamed nickel substrate after step (2) into the reaction chamber of radio frequency plasma enhanced chemical vapor deposition equipment and have resistance heating on the sample stage, first pass into argon, make its flow rate be 20sccm, Keep the gas pressure in the reaction chamber at 1 Torr, raise the temperature of the substrate to 600°C at a rate of 20°C / min under a current of 60A; then pass methane and hydrogen into the reaction chamber, wherein the flow rate of methane is 1 sccm, hydrogen The flow rate is 20sccm. Wh...

Embodiment 2

[0055] (1) Use oxygen plasma to clean the reaction chamber of the radio frequency plasma enhanced chemical vapor deposition equipment; during the cleaning process: make the temperature of the sample stage reach 750°C, set the oxygen plasma power to 900W; the cleaning time is 90min.

[0056] (2) Dip the nickel foam substrate to be used into an acetone solution and ultrasonically clean it, then rinse it with deionized water, and dry it with nitrogen.

[0057] (3) put the foamed nickel substrate after step (2) into the reaction chamber of radio frequency plasma enhanced chemical vapor deposition equipment and have resistance heating on the sample stage, first pass into argon, make its flow rate be 20sccm, Keep the gas pressure in the reaction chamber at 1 Torr, raise the temperature of the substrate to 800°C at a heating rate of 23°C / min under a current of 60A; then pass methane and hydrogen into the reaction chamber, wherein the flow rate of methane is 10 sccm, hydrogen The flow...

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PUM

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Abstract

The invention discloses a graphene-ZnO composite material, a preparation method thereof, and an ultraviolet detector. The preparation method of the graphene-ZnO composite material comprises the following steps: (1) obtaining vertical graphene pieces on a substrate by adopting a radio frequency plasma enhanced chemical vapor deposition method, wherein the substrate adopts foamed nickel; (2) transversely growing ZnO nanowires among the vertical graphene pieces by adopting an electrochemical deposition method. The graphene-ZnO composite material obtained in the invention has a high specific surface area. When the graphene-ZnO composite material is applied to an ultraviolet detector, the surface area (namely the actual photosensitive area) of a photosensitive layer in the ultraviolet detectorand the photoproduction electron utilization efficiency are effectively improved, and the ultraviolet detector based on the graphene-ZnO composite material has higher electrical properties and stability, and the heat conduction capability is improved.

Description

technical field [0001] The invention relates to the technical field of ultraviolet detectors, in particular to a graphene-ZnO composite material, a preparation method thereof and an ultraviolet detector. Background technique [0002] Ultraviolet detectors based on wide-bandgap semiconductor nanomaterials have been a hot topic in the field of photodetector research in recent years due to their advantages of lower power consumption, higher quantum efficiency, lighter weight, and ease of integrated preparation. At present, ZnO is used as an important wide-bandgap semiconductor material. ZnO has high chemical and thermal stability, large exciton binding energy (60meV), high melting point, and is very sensitive to ultraviolet light. Therefore, the development of ZnO nanometer The UV detector with the structure as the photosensitive layer has great application prospects. [0003] The working principle of the ultraviolet detector device based on ZnO nanomaterials is as follows: wh...

Claims

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Application Information

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IPC IPC(8): H01L31/0216H01L31/028H01L31/0296H01L31/101
Inventor 张昭宇项国洪钟可怡方铉袁牧锋
Owner THE CHINESE UNIV OF HONG KONG SHENZHEN
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