Miniature spectrum testing system and testing method

Abstract

The invention discloses a miniature spectrum testing system. The system comprises a light beam collimation module and a photoelectric detection module; light to be tested is collimated by the light beam collimation module, and then the collimated light to be tested is projected to the photoelectric detection module; the photoelectric detection module comprises a rotatable semiconductor substrate layer and a metal or metal-like material film covering the semiconductor substrate layer; and the light facing surface of the photoelectric detection module is prepared into a grating. The invention further discloses a spectrum testing method. The method comprises the following steps that: a light beam of a to-be-tested spectrum is collimated; the photoelectric detection module is rotated, and electric signals corresponding to each rotating angle are recorded and analyzed, and the light intensity information of each wavelength light in the to-be-tested spectrum is realized according to the light intensity information corresponding to the wavelengths in the spectrum. The method has the advantages of high-spectral resolution, large-working wavelength range and high-integration level spectral testing capability.

Description

technical field [0001] The invention relates to the field of spectrum analysis, in particular to an integrated miniature spectrum testing system and testing method. Background technique [0002] A spectrometer is a device that analyzes the relative strength of different wavelengths of incident light in a wide spectral range. It is one of the most common optical detection devices in scientific research. , agriculture and forestry have important applications. According to the working mode, it is divided into Fourier transform infrared spectrometer, Raman spectrometer, fiber optic spectrometer and spectrophotometer. These systems either use gratings or prisms to spatially disperse the incident light, so that light of different wavelengths is projected onto different detectors, thereby achieving spectral information acquisition; or use mechanical transmission motors to control the movement of mirrors to generate optical path differences between The time-domain function interfe...

AI Technical Summary

Problems solved by technology

In 2008, at the International Conference on Optical Instruments, American scholars reported a micro-spectral analysis technology based on an on-chip liquid crystal waveguide structure. By adjusting the refractive index of the liquid crystal through a bias voltage, the transmission phase of the waveguide can be changed, and the on-chip Fourier spectrum analysis capability can be obtained, but limited by The distance spectral resolution of the on-chip waveguide routing is insufficient; in 2015, an American scholar reported a spectrometer based on a colloidal quantum dot array on page 67 of volume 524 of the journal Nature. By continuously adjusting the absorption wavelength of the quantum dots, a series of spectra with low correlation can be obtained , and achieve spectral analysis through algorithms, but it is necessary to synthesize a large number of colloidal quantum dots, and the preparation of large arrays is very difficult; in 2017, Dutch scholars reported a GaAs substrate-based The microelectromechanical on-chip spectrometer can achieve continuous scanning of a single wavelength by changing the distance between two resonant photonic crystal cavities, thereby obtaining spectral information, but the working wavelength range is only 30nm, which requires the preparation of a very complex double-layer air bridge structure, and the photoelectric The response rate is very low; in 2017, American scholars reported an integrated spectroscopic system based on Fabry-Perot etalon filter array and image sensor on page 40793 of volume 7 of the journal "Scientific Reports", but it requires a difficult gray-scale exposure process, and the optical efficiency is limited by the reflection loss of the metal mirror on the etalon; in 2018, a Swiss scholar reported a spectral analysis method based on computational image technology on page 1105 of volume 360 ​​of the journal Science, which will narrow the Line-width metamaterial resonant structure array chip assembled with CMOS image sensor through imaging optical path

[0004] It can be seen that although the existing technologies represented by the above examples all show miniature spectral testing systems, the spectral resolution is limited, the working wavelength range is narrow, and the system is complicated.

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