A miniature spectrum testing system and testing method

Abstract

The invention discloses a miniature spectrum testing system, which includes a beam collimation module and a photoelectric detection module, wherein the light to be measured is collimated by the beam collimation module and then projected to the photoelectric detection module; the photoelectric detection module includes a rotatable semiconductor The base layer and the metal or metal-like material thin film covered on the semiconductor base layer, and the photodetection module is prepared as a grating facing the light side. The invention also discloses a spectrum testing method, which includes the steps of: collimating the light beam of the spectrum to be measured; rotating the photoelectric detection module, recording and analyzing the electrical signal output corresponding to each rotation angle, corresponding to the light intensity information of the wavelength in the spectrum, Realize the light intensity information test of each wavelength light in the spectrum to be tested. The invention has high spectral resolution, large working wavelength range and high integrated spectral testing capability.

Description

technical field [0001] The invention relates to the field of spectral analysis, in particular to an integrated miniature spectral testing system and a testing method. Background technique [0002] A spectrometer is a device that analyzes the relative strength of different wavelengths of incident light in a wide spectral range. It is one of the most common optical detection equipment in scientific research, and is also used in optical communication, remote sensing mapping, pharmaceutical development, medical diagnosis, and environmental monitoring. , agriculture and forestry have important applications. According to the working mode, it is divided into Fourier transform infrared spectrometer, Raman spectrometer, fiber optic spectrometer and spectrophotometer. These systems either use gratings or prisms to spatially disperse the incident light, so that different wavelengths of light are projected to different detectors, so as to achieve spectral information acquisition; The ...

AI Technical Summary

Problems solved by technology

In 2008, at the International Conference on Optical Instruments, American scholars reported a micro-spectral analysis technology based on an on-chip liquid crystal waveguide structure. By adjusting the refractive index of the liquid crystal through a bias voltage, the transmission phase of the waveguide can be changed, and the on-chip Fourier spectrum analysis capability can be obtained, but limited by The distance spectral resolution of the on-chip waveguide routing is insufficient; in 2015, an American scholar reported a spectrometer based on a colloidal quantum dot array on page 67 of volume 524 of the journal Nature. By continuously adjusting the absorption wavelength of the quantum dots, a series of spectra with low correlation can be obtained , and achieve spectral analysis through algorithms, but it is necessary to synthesize a large number of colloidal quantum dots, and the preparation of large arrays is very difficult; in 2017, Dutch scholars reported a GaAs substrate-based The microelectromechanical on-chip spectrometer can achieve continuous scanning of a single wavelength by changing the distance between two resonant photonic crystal cavities, thereby obtaining spectral information, but the working wavelength range is only 30nm, which requires the preparation of a very complex double-layer air bridge structure, and the photoelectric The response rate is very low; in 2017, American scholars reported an integrated spectroscopic system based on Fabry-Perot etalon filter array and image sensor on page 40793 of volume 7 of the journal "Scientific Reports", but it requires a difficult gray-scale exposure process, and the optical efficiency is limited by the reflection loss of the metal mirror on the etalon; in 2018, a Swiss scholar reported a spectral analysis method based on computational image technology on page 1105 of volume 360 ​​of the journal Science, which will narrow the Line-width metamaterial resonant structure array chip assembled with CMOS image sensor through imaging optical path

[0004] It can be seen that although the existing technologies represented by the above examples all show miniature spectral testing systems, the spectral resolution is limited, the working wavelength range is narrow, and the system is complicated.

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