Ferrite substrate polishing method adopting acidic polishing solution and metal-based polishing disk

A polishing liquid and ferrite technology, which is used in metal processing equipment, grinding/polishing equipment, manufacturing tools, etc., can solve the problems of low processing efficiency, low product accuracy, affecting the dielectric constant of the workpiece, and decreasing inductance L value, etc. The effect of strong chemical bonding of materials, improving processing efficiency and processing uniformity, and fine structure

Active Publication Date: 2019-11-05
东莞市创科材料科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] In order to further optimize the performance of ferrite substrates, it is necessary to polish ferrite substrates with high hardness, strong brittleness, many pores, and low thermal conductivity. However, the existing ferrite substrates are polished with soft polyurethane polishing pads. It has the problems of low processing efficiency, low product precision, and poor surface finish, which in turn affects the dielectric constant of the workpiece, resulting in a decrease in the inductance L value. In addition, the substrate is prone to warping due to the influence of processing stress during processing.

Method used

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  • Ferrite substrate polishing method adopting acidic polishing solution and metal-based polishing disk
  • Ferrite substrate polishing method adopting acidic polishing solution and metal-based polishing disk
  • Ferrite substrate polishing method adopting acidic polishing solution and metal-based polishing disk

Examples

Experimental program
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Effect test

Embodiment 1

[0038] (1) Preparation of amorphous metal-based polishing disc

[0039] Step 1: Prepare mixed slurry. First put the mixed powder of abrasive, filler and amorphous alloy powder into a V-type barrel mixer and mix for 6 hours, mix evenly, pass through a 200-mesh sieve, put it into a ball mill, add water and additives and mix for 15 to 36 hours. Hour, obtain mixed slurry, concrete composition and quality are as shown in the table below:

[0040]

[0041] Among them, the crystal grains of alumina and zirconia are both 1 μm. If the grains are too small, the abrasive grain size will decrease, and the polishing efficiency will decrease. There will be scratches left by the previous grinding process on the surface of the ferrite substrate, resulting in The roughness of the ferrite surface is relatively large; if the crystal grains are too large, the abrasive grain size increases, and the mechanical effect of the abrasive grains on the surface of the ferrite substrate is enhanced. Ex...

Embodiment 2

[0054] The operation is basically the same as in Example 1, the difference is that in step 1, 20% iron-based nano-amorphous alloy powder is added to the iron-nickel-based amorphous alloy powder, and the particles of the amorphous nano-alloy powder are spherical and agglomerated. The diameter is 20-50nm, and the nano-scale powder improves the performance of the sintered body, improves the strength, toughness and wear resistance, and the pores are controllable. Compared with Example 1, the flexural strength of the amorphous metal-based polishing disc has reached 200kg / cm 2 , the tensile strength reached 150kg / cm 2 , the flexural strength and tensile strength are greatly improved, because when there are nanocrystals uniformly distributed on the amorphous alloy matrix, the performance of the amorphous alloy can be further optimized, and the low plasticity of the amorphous alloy can be improved while maintaining high strength. Problems, ease the stress concentration, delay the ex...

Embodiment 3

[0056] The operation is basically the same as in Example 1, the difference is that in step 1, the grains of alumina and zirconia abrasives are changed to 0.5 μm, polished for 20 minutes, and there are scratches left by the previous grinding process on the ferrite surface, rough The degree is worse than that of Example 1, and this is because the abrasive particle size decreases and the polishing efficiency decreases.

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Abstract

The invention discloses a ferrite substrate polishing method adopting an acidic polishing solution and a metal-based polishing disk. The method is characterized by comprising the following steps thatan amorphous alloy substrate polishing disk is prepared by a sol-gel method; an oil-in-oil acidic silica sol polishing solution is prepared; and a ferrite substrate bonds a ceramic substrate for polishing. According to the method, an acidic polishing solution is used as a corrosive agent, so that the surface of the ferrite substrate is oxidized to form a metamorphic layer, and then the surface ofthe ferrite substrate is polished by using the silica sol and the amorphous alloy substrate polishing disk, so that the metamorphic layer on the surface is removed, and the polishing effect is achieved. An amorphous alloy matrix has the characteristics of being fine in structure, high in toughness, corrosion-resistance and strong in abrasive grain holding force. The low-surface-tension oily solvent and acidic silica sol are mixed to prepare the oil-in-oil acidic silica sol polishing solution, so that the consistency of the thickness of a polishing solution liquid film is ensured, and the tracecorrosion of a surface material is realized. The polishing method has the characteristics of good product surface type precision and no edge collapse.

Description

technical field [0001] The invention belongs to the field of precision machining grinding and polishing, and relates to a method for polishing a ferrite substrate by using an acidic polishing liquid and a metal-based polishing disk. Background technique [0002] Ferrite is a magnetic oxide with iron oxide as the main component. As a non-metallic magnetic material, it has high resistivity, low eddy current loss, and large initial magnetic permeability. The development of RF ferrite broadband devices The development is based on broadband ferrite materials, that is, radio frequency ferrite materials. The performance and core size of ferrite materials determine the broadband characteristics of broadband devices. It is used in broadband signal processing devices, which can not only reduce the number of components in the whole machine , improve or improve its performance, and is conducive to the serialization, standardization and integration of the whole machine, it is widely used...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24B1/00B24B57/02
CPCB24B1/00B24B57/02
Inventor 冯凯萍欧进乾周兆忠赵天晨许庆华
Owner 东莞市创科材料科技有限公司
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