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Metal oxide alloy nanowire and preparation method thereof, and application of metal oxide alloy nanowire

A technology of alloy nano and oxide, applied in the direction of oxide/hydroxide preparation, nanotechnology, nano optics, etc., can solve the problem of high cost of copper indium gallium selenide nanowires, achieve oxygen vacancy concentration suppression, excellent electrical performance, The effect of simple growing conditions

Inactive Publication Date: 2019-11-08
SIWAVE INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the cost of preparing copper indium gallium selenide nanowires is too high

Method used

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  • Metal oxide alloy nanowire and preparation method thereof, and application of metal oxide alloy nanowire
  • Metal oxide alloy nanowire and preparation method thereof, and application of metal oxide alloy nanowire
  • Metal oxide alloy nanowire and preparation method thereof, and application of metal oxide alloy nanowire

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0162] A kind of preparation method of ultraviolet detector comprises the steps:

[0163] (1) The growth of metal oxide alloy nanowires comprises the following steps:

[0164] (a) According to the molar ratio of metal gallium (Ga, 99.99%) and metal indium (In, 99.99%) is 1:1, the ratio of the total mass of metal gallium and metal indium to graphite mass is 1:2, metal gallium , metal indium and graphite are blended and mixed to prepare mixed materials;

[0165] (b) Ultrasonic cleaning of the substrate for 30min and drying, the substrate is surface SiO 2 A p-type silicon wafer with a thickness of 50nm is deposited on the substrate by thermal evaporation Depositing a gold nanofilm at a rate of 100 to obtain a catalyst layer with a thickness of 1 nm;

[0166] (c) under a protective atmosphere with a gas flow rate of 100 sccm and a volume ratio of argon and oxygen of 9:1, the substrate containing the catalyst layer and the mixed material obtained in step (a) are placed in the c...

Embodiment 2

[0191] The difference from Example 1 is that the molar ratio of metal gallium and metal indium in step (a) is 1.2:1, its responsivity is 18% of that of Example 1, the response time is 0.117 seconds, and the recovery time is 0.119 seconds .

Embodiment 3

[0193] The difference from Example 1 is that the molar ratio of metal gallium and metal indium in step (a) is 1.5:1, its responsivity is 0.2% of that of Example 1, the response time is 0.067 seconds, and the recovery time is 0.158 seconds .

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Abstract

The invention relates to a metal oxide alloy nanowire and a preparation method thereof, and application of a metal oxide alloy nanowire. Metal elements in the metal oxide alloy nanowire are IIIA elements. According to the invention, the oxygen vacancy concentration in the nanowires is effectively suppressed through introducing of alloys so that the metal oxide alloy nanowire provided by the invention is much better than the existing metal nanowires in terms of the dark current and the relaxation time. The metal elements in the metal oxide alloy are IIIA, and the IIIA-group metal oxide has theadvantages of: simple growth conditions, easy synthesis, low raw material cost and excellent electrical properties compared to other groups of oxides.

Description

technical field [0001] The patent of the invention belongs to the technical field of semiconductor devices, and specifically relates to a metal oxide alloy nanowire, its preparation method and application. Background technique [0002] Because there is basically no ultraviolet radiation in the sun-blind zone in the natural environment on the ground, the communication or detection technology using the sun-blind zone ultraviolet as the medium is almost not affected by various electromagnetic interferences, and has high anti-interference, low eavesdropping rate and bit resolution. , strong flexibility and all-weather characteristics. In the field of semiconductor devices, ultraviolet detectors have been widely used in military and civilian applications, such as military communications, early warning and tracking of missiles, extreme weather warnings such as thunderstorms, astronomical detection, fire early warning, marine oil pollution monitoring, biomedicine, etc. . Accordin...

Claims

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Application Information

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IPC IPC(8): H01L31/032H01L31/101H01L31/18C01B13/14B82Y30/00B82Y20/00
CPCB82Y20/00B82Y30/00C01B13/14H01L31/032H01L31/101H01L31/18Y02P70/50
Inventor 周子尧
Owner SIWAVE INC
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