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High-adsorption electronic-grade ammonia water manufacturing system

A manufacturing system and electronic-grade technology, which is applied in the field of manufacturing electronic-grade ammonia water, can solve the problems of low metal ion content, ammonia water impurities and energy consumption of multiple equipment, and achieve the effects of simple preparation process, good directional adsorption, and excellent and stable performance

Pending Publication Date: 2020-08-07
浙江建业微电子材料有限公司 +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to overcome the problems of more impurities in ammonia water and high energy consumption of equipment in the prior art, provide a high-adsorption electronic-grade ammonia water manufacturing system, and prepare a manufacturing system with high impurity adsorption efficiency. The preparation process of the system is The washing and absorption of the product is carried out under normal pressure or slightly positive pressure, and the modified adsorption material with magnetic orientation adsorption capacity and super large specific surface energy is used to finally obtain electronic grade ammonia water with high concentration of ammonia water and low content of metal ions, and Electronic grade ammonia water with simple preparation process and excellent and stable performance

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0040] A high-adsorption electronic-grade ammonia production system method is characterized in that it includes an evaporator 1, a first gas-liquid separator 2, an adsorption unit 3, a second gas-liquid separator 4, a washing unit 5 and an absorption unit 6, the above-mentioned The devices are connected in sequence, the adsorption unit 3 is provided with a modified adsorption material, and the washing unit 5 is provided with a washing packing area 5.1, and the washing packing area 5.1 is located between the inlet and the outlet of the washing unit 5 , An absorption packing area 6.1 is provided between the inlet and the outlet inside the absorption unit 6 . A first circulation unit 7 is provided outside the washing unit 5, one end of the first circulation unit 7 is connected to the bottom of the washing unit 5, and the other end is connected between the washing packing area 5.1 and the outlet of the washing unit 5. A circulation loop 8 is arranged outside the absorption unit 6,...

Embodiment 2

[0049] The difference with Example 1 is that the modified adsorption material is permanent magnetic chitosan modified activated carbon, and its preparation method includes: (1) Activated activated carbon: adding activated carbon to 60 ℃ deionized water for 0.6h, and then adding activated carbon Put it into a nitric acid solution with a mass content of 11% for activation for 22 minutes, wash it with deionized water and set aside;

[0050] (2) Preparation of magnetic chitosan gel: Chitosan is placed in a container, acetic acid with a mass fraction of 4.5% is added, heated in a water bath at 32°C for 42min, and mechanically stirred at 860rpm at the same time, then 3,5 -Dimethyl-2-pyrrole formaldehyde, while the temperature rises to 66°C at 2.5°C / min, and the temperature is stirred at 1300rpm for 6.2h at a constant temperature, and then Fe is added to the solution 3 o 4 -Rare earth magnet nanoparticles, stirring at 820rpm for 0.9h at room temperature to obtain a uniform magnetic ...

Embodiment 3

[0054] The difference with Example 1 is that the modified adsorption material is a permanent magnetic chitosan modified activated carbon, and its preparation method comprises:

[0055] (1) Activation of activated carbon: Add activated carbon to 60°C deionized water for 0.7h, then put the activated carbon into a nitric acid solution with a mass content of 12% to activate for 25min, wash with deionized water and set aside;

[0056] (2) Preparation of magnetic chitosan gel: Chitosan is placed in a container, acetic acid with a mass fraction of 5% is added, heated in a water bath at 35°C for 45min, and mechanically stirred at 880rpm at the same time, then 3,5 -Dimethyl-2-pyrrole formaldehyde, at the same time the temperature rises to 68°C at 3°C / min, and the constant temperature is stirred at 1350rpm for 6.5h, and then Fe is added to the solution 3 o 4 -Rare earth magnet nanoparticles, stirring at 850rpm for 1.0h at room temperature to obtain a uniform magnetic chitosan gel solut...

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Abstract

The invention relates to the technical field of manufacturing of electronic-grade ammonia water. The problems that in the prior art, ammonia water contains many impurities, and equipment energy consumption is high are solved. The invention discloses a high-absorption-rate electronic-grade ammonia water manufacturing system that comprises an evaporator, a first gas-liquid separator, an adsorption unit, a second gas-liquid separator, a washing unit and an absorption unit, wherein the devices are sequentially connected, a modified adsorption material is arranged in the adsorption unit, a washingfiller area is arranged in the washing unit, the washing filler area is positioned between an inlet and an outlet of the washing unit, and an absorption filler area is arranged between the inlet and the outlet on the inner side of the absorption unit. The manufacturing system with high impurity adsorption efficiency is prepared, washing and absorption in the preparation process of the system are carried out under normal pressure or micro-positive pressure, a modified adsorption material with magnetic directional adsorption capacity and super-large specific surface energy is adopted, and finally electronic-grade ammonia water with high ammonia water mass concentration, low metal ion content and excellent and stable performance is obtained.

Description

technical field [0001] The invention relates to the technical field of manufacturing electronic grade ammonia water, in particular to a manufacturing system of electronic grade ammonia water. Background technique [0002] Ammonia is a commonly used substance in industry, but ammonia-containing wastewater is often produced after use. Generally, air stripping is used to blow out the ammonia in the wastewater into ammonia gas, and then sulfuric acid is used to absorb ammonia gas to produce ammonium sulfate aqueous solution. Usually, in order to improve the efficiency of sulfuric acid to absorb ammonia gas, excess sulfuric acid is used, so the ammonium sulfate aqueous solution produced is mostly acidic. [0003] Ammonium sulfate aqueous solution is mostly dried to become solid ammonium sulfate. Because sulfuric acid has a high boiling point and is not easy to gasify, the solid ammonium sulfate produced by drying is still slightly acidic, which is not suitable for use in the che...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01C1/02
CPCC01C1/022C01C1/024
Inventor 冯烈刘尚文陈云斌许京伟金波
Owner 浙江建业微电子材料有限公司
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