Liquid composition for forming piezoelectric film and method for forming piezoelectric film in which said liquid composition is used
A liquid composition, piezoelectric technology, applied in piezoelectric/electrostrictive/magnetostrictive devices, nickel compounds, bismuth compounds, etc., can solve the problem of inability to form dense films, corrosion of manufacturing equipment, and high harmfulness. The problem is that the film density will not be reduced, the thermal decomposition temperature will be reduced, and the film density will be high.
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[0061] Next, the embodiments of the present invention will be described in detail in conjunction with comparative examples.
[0062] [7 Stabilizers]
[0063] Seven types of stabilizers used in the liquid compositions of Examples 1 to 15 and Comparative Examples 1 to 5 of the present invention are shown in Tables 1 and 2 below. Five kinds of amine stabilizers (No.1 to No.5) are shown in Table 1, and two kinds of other stabilizers (No.6 to No.7) are shown in Table 2. Furthermore, Table 3 shows three kinds of diols (No.8 to No.10).
[0064] [Table 1]
[0065] Contents of amine stabilizer No.1 2-Dimethylaminoethanol No.2 1-amino-2-propanol No.3 ethanolamine No.4 Diethanolamine No.5 Triethanolamine
[0066] [Table 2]
[0067] Contents of other stabilizers No.6 Acetylacetone No.7 Acetic acid
[0068] [table 3]
[0069] diol No.8 Propylene Glycol No.9 Ethylene glycol ...
Embodiment 2～15
[0078] As shown in Table 4 and Table 5, select raw materials and stabilizers, determine the mixed mole % of each raw material, the concentration of metal oxides, and the molar ratio of the amine-based stabilizer to the raw material of Ti, in the same manner as in Example 1. , The liquid compositions of Examples 2-15 were obtained. In Examples 1 to 15, any amine-based stabilizer of No.1 to No.5 shown in Table 1 as a stabilizer, acetylacetone of No.6 shown in Table 2, and acetylacetone as a solvent Any one of the diols of No.8 to No.10 shown in Table 3 was used simultaneously. In addition, as the raw material of Bi, the raw material of Na, and other metal raw materials other than the raw material of Ti, in Example 6, barium 2-ethylhexanoate was used as the raw material of Ba so that the molar ratio relative to the raw material of Ti was 0.15. The way to add it with bismuth 2-ethylhexanoate. Furthermore, in Example 12, potassium acetate was added together with bismuth 2-ethylhe...
Embodiment 16
[0080] Ethanol, sodium ethoxide, and potassium ethoxide were added to the flask, and the mixture was stirred at room temperature for 30 minutes to obtain a reddish-brown suspension. Titanium tetraisopropoxide and zirconium butoxide were added to the suspension, and the mixture was refluxed for 30 minutes to prepare a first solution. Bismuth 2-ethylhexanoate, strontium acetate 0.5 hydrate, and propylene glycol were added to this first solution, and the mixture was refluxed for 30 minutes to prepare a second solution. Acetylacetone was added as a stabilizer to the second solution, and it was refluxed for 30 minutes to prepare a third solution. Next, the solvent was detached from the third solution, and ethanol and reaction by-products were removed. Propylene glycol was added to the obtained solution, and it diluted to 15 mass % in terms of oxide. Furthermore, 2-dimethylaminoethanol (No. 1 in Table 1) was added as a stabilizer to the diluted liquid so that the molar ratio of Ti...
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