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High-purity high-density silicon carbide ceramic and manufacturing method thereof

A technology of silicon carbide ceramics and silicon carbide micropowder is applied in the field of engineering ceramic materials, which can solve the problem of high cost, achieve the effects of improving safety, reducing the content of metal impurities and ensuring uniformity

Inactive Publication Date: 2021-01-01
NANTONG SANZER PRECISION CERAMICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

It should be said that the current common silicon carbide ceramic materials cannot meet the above applications. Most of these fields are solved by using high-purity graphite surface chemical vapor deposition silicon carbide coating materials, and the cost is very high.

Method used

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  • High-purity high-density silicon carbide ceramic and manufacturing method thereof

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Effect test

Embodiment 1

[0073] A high-purity and high-density silicon carbide ceramic suction cup is manufactured through the inventive process, with an outer diameter of 290 mm and a thickness of 18 mm, with a complex flow channel structure, and is applied to high-temperature and high-purity working conditions.

[0074] Silicon carbide ceramics consist of the following components by mass:

[0075] 90 parts of silicon carbide; 8 parts of high-purity silicon;

[0076] The metal impurity content is less than 100ppm;

[0077] Boron element content is less than 1ppm;

[0078] A method for manufacturing a high-purity and high-density silicon carbide ceramic sucker, the steps of the method are:

[0079] a. Batching and mixing: add 85 parts by mass of silicon carbide and 15 parts of carbon black into the high-energy ball mill, stir and mix evenly to obtain a mixed powder;

[0080] b. Pulping: Add the mixed powder into a sand mill, add 50% of the total mass of the mixed powder with deionized water, 10 par...

Embodiment 2

[0093] A high-purity and high-density silicon carbide ceramic suction cup is manufactured through the inventive process, with an outer diameter of 290 mm and a thickness of 18 mm, with a complex flow channel structure, and is applied to high-temperature and high-purity working conditions.

[0094] Silicon carbide ceramics consist of the following components by mass:

[0095] 92 parts of silicon carbide; 8 parts of silicon;

[0096] A method for manufacturing a high-purity and high-density silicon carbide ceramic sucker, the steps of the method are:

[0097] a. Batching and mixing: add 85 parts by mass of silicon carbide and 15 parts of carbon black into the high-energy ball mill, stir and mix evenly to obtain a mixed powder;

[0098] b. Pulping: Add the mixed powder into a sand mill, add 50% of the total mass of the mixed powder with deionized water, 10 parts of binder and 0.5 part of dispersant, stir and mix evenly to obtain a mixed slurry ;

[0099] c, spray drying: dry t...

Embodiment 3

[0111] A high-purity and high-density silicon carbide ceramic cylinder is manufactured through the inventive process, with an outer diameter of 800mm, an inner diameter of 760mm, and a height of 650mm, with sealing grooves on the edge, and is used in high-temperature and high-purity working conditions.

[0112] A method for manufacturing a high-purity and high-density silicon carbide ceramic sucker, the steps of the method are:

[0113] a. Batching and mixing: add 85 parts by mass of silicon carbide and 15 parts of carbon black into the high-energy ball mill, stir and mix evenly to obtain a mixed powder;

[0114] b. Pulping: Add the mixed powder into a sand mill, add 50% of the total mass of the mixed powder with deionized water, 10 parts of binder and 0.5 part of dispersant, stir and mix evenly to obtain a mixed slurry ;

[0115] c, spray drying: dry the mixed slurry in a spray granulator, and sieve to obtain a composite powder;

[0116] d1. Isostatic pressing: put the comp...

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Abstract

The invention discloses a high-purity high-density silicon carbide ceramic and a preparation method thereof, silicon carbide ceramic powder with different particle sizes is used as a main raw material, graphite powder and nano carbon black are used as binders, resin is used as a binder, a spray granulation process is used for uniform mixing. The preparation method comprises the following steps: carrying out dry pressing molding, isostatic pressing molding or casting molding to obtain a ceramic green body, drying and curing the green body, carrying out primary high-temperature purification heattreatment and secondary reaction siliconizing heat treatment, and finally carrying out surface treatment to obtain the high-purity high-density silicon carbide ceramic. The silicon carbide ceramic prepared by the process is high in purity, the content of various metal impurities is lower than 200 ppm, the density of the material reaches 99% or above, and the silicon carbide ceramic can be widelyapplied to the application fields of photovoltaics, LEDs or semiconductors with high purity and strength requirements.

Description

technical field [0001] The invention relates to a ceramic and a manufacturing method thereof, belonging to the technical field of engineering ceramic materials, in particular to a high-purity and high-density silicon carbide ceramic and a manufacturing method thereof. Background technique [0002] Silicon carbide ceramics have excellent mechanical properties at room temperature, such as high strength and high hardness, and can be applied to various room temperature load-bearing parts that require high mechanical strength. At the same time, silicon carbide has excellent oxidation resistance and high-temperature mechanical properties (strength, creep resistance, etc.) are the best among known ceramic materials, so it is widely used in high-temperature bearing parts. [0003] According to different formula systems and sintering processes, silicon carbide ceramics can generally be divided into reaction sintering, pressureless sintering and recrystallization sintering systems. D...

Claims

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Application Information

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IPC IPC(8): C04B35/573C04B35/622
CPCC04B35/573C04B35/622C04B2235/424C04B2235/48C04B2235/5436C04B2235/656C04B2235/6567C04B2235/658C04B2235/77C04B2235/9607
Inventor 闫永杰
Owner NANTONG SANZER PRECISION CERAMICS CO LTD
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