Ni-Mn-Ti-based multi-element alloy target material, preparation method thereof and film

An alloy target and thin film technology, which is applied in the coating process of metal materials, electrical components, magnetic properties of inorganic materials, etc., can solve the deviation of the photon absorption ability of charge mobility from the theoretical prediction value, being susceptible to surface dielectric state modulation, two-dimensional Problems such as application limitations of transition metal dichalcogenide materials, to achieve the effect of simplifying the heat treatment process, good mechanical properties, and small grain size

Pending Publication Date: 2021-08-10
HANGZHOU DIANZI UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0007] Another purpose of the present invention is to solve the problem that the properties of existing two-dimensional transition metal dichalcogenide materials are easily modulated by the surface dielectric state, and there is a large deviation between the charge mobility and the ability to absorb photons from the theoretically predicted value, so that The application of two-dimensional transition metal dichalcogenide materials is limited to provide a thickness of less than 10nm, and retains the crystal structure of the parent phase, no second phase or alloying, and the photoelectric performance of the two-dimensional molybdenum sulfide material after doping is remarkable. Enhanced tin-doped two-dimensional molybdenum sulfide

Method used

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  • Ni-Mn-Ti-based multi-element alloy target material, preparation method thereof and film
  • Ni-Mn-Ti-based multi-element alloy target material, preparation method thereof and film
  • Ni-Mn-Ti-based multi-element alloy target material, preparation method thereof and film

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Embodiment 1

[0039] A method for preparing a Ni-Mn-Ti-based multi-component alloy target, wherein the chemical formulas of the materials are respectively Ni 35 co 15 mn 35 Ti 15 (sample 1), Ni 35.5 co 14.5 mn 35 Ti 15 (sample 2), Ni 36 co 14 mn 35 Ti 15 (sample 3), described material preparation method comprises the following steps:

[0040] (1) Ingredients: Weigh high-purity raw materials Ni, Mn, Co, and Ti according to the ratio in the chemical formula, and carefully polish off the oxide layer on the surface of the required transition metal elements before ingredients.

[0041] Taking Mn element as an example, it needs to be cleaned and smelted to ensure the purity of the raw material. The specific steps are as follows: 1) Put a certain amount of Mn element in the beaker, and then pour it into the beaker diluted with water at a volume ratio of about 1:1. Dilute hydrochloric acid solution to make it chemically react, and stir it quickly with a glass rod during the reaction; 2) ...

Embodiment 2

[0052] The difference between embodiment 2 and embodiment 1 is that step (5) is different, and all the other processes are identical.

[0053] High-temperature hot pressing: the prepared mixed powder is used as raw material, and the Ni-Co-Mn-Ti target is prepared by vacuum hot pressing powder metallurgy. The prepared alloy mixed powder is placed in a mold for sintering, and then the mold is put into a sintering furnace for vacuuming and hot pressing; during the hot pressing process, the background vacuum in the furnace is ≤3*10 -7 Pa, under the pressure of 35MPa, the temperature is raised to 1200 ° C in stages, and each stage is kept for 30 minutes. It is divided into 6 stages. 1 is equivalent and will not be repeated here.

Embodiment 3

[0054] The difference between embodiment 3 and embodiment 1 is that step (3) is different from step (5), and all the other processes are identical.

[0055] Melt quick quenching: Put the alloy ingot melted in the electric arc furnace into a water-cooled copper crucible, melt it by induction melting, then tilt the copper crucible, and blow the molten alloy out of the bottom of the quartz tube through the Ar gas. Mouth, it is rapidly cooled on a rotating copper wheel with a speed of 30m / s, solidified, and made into a thin strip.

[0056] High-temperature hot pressing: the prepared mixed powder is used as raw material, and the Ni-Co-Mn-Ti target is prepared by vacuum hot pressing powder metallurgy. The prepared alloy mixed powder is installed in the mold for sintering, and then the mold is put into the sintering furnace for vacuuming and hot pressing; during the hot pressing process, the background vacuum in the furnace is ≤3*10-7Pa, under the pressure of 28MPa Raise the tempera...

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Abstract

The invention relates to a Ni-Mn-Ti-based multi-element alloy target material, a preparation method thereof and a film. Firstly, an alloy ingot is prepared through electric arc melting, the purity and compactness of the alloy are improved, and multiple elements are fully alloyed; subsequently, a thin strip is thrown out at a certain wheel speed through rapid quenching for a melt, the porosity in the material is reduced, a subsequent heat treatment process is simplified, grains are refined, and element distribution tends to be more uniform; then, the thin strip is ground into alloy powder, the problem of non-uniform components caused by a too low melting point or a too high melting point of a single element is effectively solved, and the phase change temperature span is widened under the condition that the original magnetism is ensured; and finally, the quaternary alloy target material is prepared through hot pressing. According to the invention, the advantages of electric arc melting and high-temperature hot pressing preparation are integrated, and the rapid quenching for the melt is combined, so that the target material which is uniform in component, low in porosity, high in purity, small in grain size and wide in phase change temperature zone span can be prepared; and NiMnTi-based alloy is adopted as the target material, and the prepared film has good mechanical performance, so that subsequent stress regulation and control are facilitated, and the multifunctional film is obtained.

Description

technical field [0001] The invention relates to the field of magnetic materials and alloy targets, in particular to a Ni-Mn-Ti-based multi-element alloy target with first-order phase transition and its preparation method, and a thin film made from the Ni-Mn-Ti-based multi-element alloy target . Background technique [0002] Heusler alloys exhibit many functionalities, such as magnetoresistance, magnetocaloric effect, elastothermal effect, and energy conversion, and are widely used in magnetic actuators, sensors, magnetic refrigeration, barocaloric effect, giant magnetoresistance change, etc. For example the recently reported Ni50Mn50-xTix and Mn50Ni50-xTix. In 2015, Liu Enke et al. reported for the first time a new NiMn-based Heusler alloy system (Ni-Mn-Ti) composed of all d-transition elements, indicating that d-d orbital hybridization can also obtain a high-order structure, and through elements such as Co or Fe The doping of Ni-Mn-Ti(Co, Fe) system becomes a new type of ...

Claims

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Application Information

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IPC IPC(8): C23C14/34C22C30/00C22C1/02B22D11/06B22F9/04B22F1/00B22F3/14B22F5/00C23C14/14H01F1/01H01F10/14H01F10/16H01F41/00
CPCB22F1/0003C23C14/3407C23C14/3414C22C30/00C22C19/03C22C19/005C22C1/023B22D11/0611B22F9/04B22F3/14B22F5/00C23C14/14H01F1/01H01F10/14H01F10/16H01F41/00
Inventor 赵晓宇闫亚新温嘉红李领伟
Owner HANGZHOU DIANZI UNIV
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