Ni-Mn-Ti-based multi-element alloy target material, preparation method thereof and film

An alloy target and thin film technology, which is applied in the coating process of metal materials, electrical components, magnetic properties of inorganic materials, etc., can solve the deviation of the photon absorption ability of charge mobility from the theoretical prediction value, being susceptible to surface dielectric state modulation, two-dimensional Problems such as application limitations of transition metal dichalcogenide materials, to achieve the effect of simplifying the heat treatment process, good mechanical properties, and small grain size
CN113235055APending Publication Date: 2021-08-10HANGZHOU DIANZI UNIV
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
HANGZHOU DIANZI UNIV
Publication Date
2021-08-10

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Abstract

The invention relates to a Ni-Mn-Ti-based multi-element alloy target material, a preparation method thereof and a film. Firstly, an alloy ingot is prepared through electric arc melting, the purity and compactness of the alloy are improved, and multiple elements are fully alloyed; subsequently, a thin strip is thrown out at a certain wheel speed through rapid quenching for a melt, the porosity in the material is reduced, a subsequent heat treatment process is simplified, grains are refined, and element distribution tends to be more uniform; then, the thin strip is ground into alloy powder, the problem of non-uniform components caused by a too low melting point or a too high melting point of a single element is effectively solved, and the phase change temperature span is widened under the condition that the original magnetism is ensured; and finally, the quaternary alloy target material is prepared through hot pressing. According to the invention, the advantages of electric arc melting and high-temperature hot pressing preparation are integrated, and the rapid quenching for the melt is combined, so that the target material which is uniform in component, low in porosity, high in purity, small in grain size and wide in phase change temperature zone span can be prepared; and NiMnTi-based alloy is adopted as the target material, and the prepared film has good mechanical performance, so that subsequent stress regulation and control are facilitated, and the multifunctional film is obtained.
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Description

technical field

[0001] The invention relates to the field of magnetic materials and alloy targets, in particular to a Ni-Mn-Ti-based multi-element alloy target with first-order phase transition and its preparation method, and a thin film made from the Ni-Mn-Ti-based multi-element alloy target . Background technique

[0002] Heusler alloys exhibit many functionalities, such as magnetoresistance, magnetocaloric effect, elastothermal effect, and energy conversion, and are widely used in magnetic actuators, sensors, magnetic refrigeration, barocaloric effect, giant magnetoresistance change, etc. For example the recently reported Ni50Mn50-xTix and Mn50Ni50-xTix. In 2015, Liu Enke et al. reported for the first time a new NiMn-based Heusler alloy system (Ni-Mn-Ti) composed of all d-transition elements, indicating that d-d orbital hybridization can also obtain a high-order structure, and through elements such as Co or Fe The doping of Ni-Mn-Ti(Co, Fe) system becomes a new type of ...

Claims

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