Unlock instant, AI-driven research and patent intelligence for your innovation.

Preparation method of piezoelectric coating with adjustable surface morphology and piezoelectric coating

A technology of surface morphology and coating, applied in coating, metal material coating process, vacuum evaporation coating and other directions, can solve the problem that the working temperature can only reach 150-200 ℃, the working temperature is limited below 400 ℃, Increase sensitivity and other issues to achieve good piezoelectric sensing performance, easy preparation and regulation, and reduce demand.

Active Publication Date: 2022-07-15
WUHAN UNIV
View PDF3 Cites 1 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] At lower temperatures, lead zirconate titanate PZT piezoelectric ceramics are the most widely used piezoelectric materials, but their Curie temperature T C Only 350°C, the highest working temperature can only reach 150-200°C
While most other commonly used piezoelectric materials, such as lead titanate (PbTiO 3 ), bismuth titanate (Bi 4 Ti 3 o 12 ), etc., also due to the low Curie temperature, the working temperature is limited below 400°C
Another suitable material for high-temperature ultrasonic transducers is aluminum nitride, AlN. Aluminum nitride has no Curie point, similar to quartz, because it is piezoelectric in structure and does not require polarization, but aluminum nitride also There are certain disadvantages, such as the sensitivity is significantly lower than other piezoelectric materials, and the sensitivity must be increased by appropriate metal doping

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Preparation method of piezoelectric coating with adjustable surface morphology and piezoelectric coating
  • Preparation method of piezoelectric coating with adjustable surface morphology and piezoelectric coating
  • Preparation method of piezoelectric coating with adjustable surface morphology and piezoelectric coating

Examples

Experimental program
Comparison scheme
Effect test

preparation example Construction

[0054] figure 2 A schematic structural diagram of a radio frequency magnetron sputtering PVD equipment, the present invention provides a method for preparing a piezoelectric coating with adjustable surface morphology, comprising the following steps:

[0055] (1) Design and prepare sputtering target: Sputtering target 2 is made of LiNbO 3 , LiNb 3 O 8 Two-Phase Lithium Niobate Oxide and Li 2 O powder is uniformly mixed and pressed, LiNbO 3 : LiNb 3 O 8 : Li 2 O=1:1:1. The sputtering target 2 is a target that provides material for the piezoelectric coating, and has a diameter of about 15 cm and a thickness of 0.8 cm. The sputtering target is the basis for the control of the coating morphology. Li 2 O is a necessary condition for obtaining lithium ions. Lithium ions are light in weight and easy to move on the surface of the coating, which in turn drives the formation of surface corrugated structures; LiNb 3 O 8 It is used to improve and compensate the stoichiometric c...

example 1

[0074] The invention provides a method for preparing a piezoelectric coating with adjustable surface topography. The prepared special surface topography can be adjusted. 2 Ratio, Ar / O 2 Surfaces with different morphologies can be obtained by mixing the airflow rate, the distance between the substrate and the sputtering target, etc.

[0075] combine image 3 , to verify the effect of substrate placement on coating morphology and to confirm high temperature stability performance.

[0076] (1) Design and prepare a hybrid sputtering target: the sputtering target 2 is made of LiNbO 3 , LiNb 3 O 8 Two-Phase Lithium Niobate Oxide and Li 2 O powder is uniformly mixed and pressed, LiNbO 3 : LiNb 3 O 8 : Li 2 O=1:1:1, the target diameter is about 15cm and the thickness is 0.8cm;

[0077] (2) Preliminary cleaning of the substrate: prepare three single-crystal silicon wafers of 3 cm × 5 cm as the experimental substrate 1, ultrasonically clean in acetone for 15 minutes to remove ...

Embodiment 2

[0086] combine Figure 4 , on the basis of comparison with Example 1, further verification of Ar / O 2Effect of flow ratio on coating morphology.

[0087] (1) Design and prepare a hybrid sputtering target: as in Example 1;

[0088] (2) Preliminary cleaning of the substrate: prepare a single crystal silicon wafer of 3cm×5cm as the experimental substrate 1, ultrasonically clean it in acetone for 15 minutes to remove the surface adhesive and stubborn contaminants; then ultrasonically clean it with alcohol for 10 minutes , remove the acetone residue on the surface of the substrate; then ultrasonically clean with deionized water for 5 minutes to remove the alcohol residue; finally, dry it in a nitrogen atmosphere and quickly put it into a vacuum chamber.

[0089] (3) Preliminary experimental environment: the single crystal silicon wafer is placed at the edge area 6E of the sample holder, and the others are as in Example 1;

[0090] (4) Ion beam deep cleaning substrate: as in Examp...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
Curie pointaaaaaaaaaa
diameteraaaaaaaaaa
Login to View More

Abstract

The invention provides a preparation method of a piezoelectric coating with adjustable surface morphology and the piezoelectric coating. The preparation method comprises the following steps: preparing a sputtering target material; preliminarily cleaning the substrate; magnetron sputtering equipment and a substrate are prepared to be placed; introducing high-purity Ar gas, setting a negative bias voltage of the substrate, starting an arc power supply, ionizing Ar into Ar +, bombarding the substrate by an Ar + ion beam, cleaning the surface of the substrate to form an oxide, and activating the surface; and depositing a piezoelectric coating: after the substrate is deeply cleaned by an ion beam, turning off an arc power supply, rotating a turntable to enable the substrate to be parallel to the sputtering target material, introducing high-purity Ar gas and high-purity oxygen into the chamber, setting parameters of a radio frequency power supply, sputtering substances of the sputtering target material under the action of Ar / O2 mixed gas flow and a radio frequency source, and depositing the substances to the substrate to obtain the piezoelectric coating. Forming a piezoelectric coating uniformly wrapping the surface of the substrate; and after the set deposition time is reached, film deposition is stopped, the magnetron sputtering equipment is shut down, a sample is taken out after cooling, and preparation of the piezoelectric coating is completed. The morphology of the prepared piezoelectric coating can be controlled and adjusted, and the high temperature resistance is excellent.

Description

technical field [0001] The invention belongs to the technical field of piezoelectric coating preparation, and in particular relates to a preparation method of a piezoelectric coating with adjustable surface morphology and the piezoelectric coating. Background technique [0002] The accurate detection of the bolt preload is of great significance for the stable and safe operation of the equipment. The method of detecting bolt preload with contact ultrasonic transducer has always been the focus of research, which can achieve rapid in-situ detection without damaging the part. The acoustic-electrical signal conversion method applied in this technology has a great influence on the detection accuracy. At present, there are three main methods: ultrasonic probe + couplant. This method is the most widely used, but it has poor stability and may also cause corrosion of the inspected part; paste piezoelectric ceramic sheet, this method has fast detection, but the performance of adhesive...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35C23C14/08C23C14/54C23C14/02
CPCC23C14/0036C23C14/08C23C14/54C23C14/022
Inventor 曾晓梅瓦西里·帕里诺维奇杨兵张俊张翔宇陈燕鸣黄家辉
Owner WUHAN UNIV