Micro-nano robot based on MIS solar cell structure and preparation method and application thereof

Abstract

The invention discloses a micro-nano robot based on an MIS solar cell structure and a preparation method and application of the micro-nano robot, and belongs to the technical field of micro-nano robots. The micro-nano robot is of a core-shell silicon nanowire structure, and the preparation method comprises the steps that a dot matrix of photoresist is prepared on a silicon wafer through a photoetching technology, then a silicon nanowire array is prepared through a wet etching technology, an insulating layer is obtained on the surface of the obtained silicon nanowire array through a thermal oxidation method, then a magnetic metal layer is evaporated on the insulating layer, and the micro-nano robot is obtained. Partially oxidizing the magnetic metal layer by using a thermal oxidation method to obtain a metal oxide as a catalyst layer; according to the micro-nano robot provided by the invention, on the premise of ensuring the visible light driving efficiency, the direction of the micro-nano robot can be effectively controlled by effectively utilizing an external magnetic field, and a very good application prospect is provided for targeted drug delivery, micro-area object transportation, optical nerve regulation and the like.

Description

technical field [0001] The invention belongs to the technical field of micro-nano robots, and in particular relates to a micro-nano robot based on a MIS solar cell structure and a preparation method and application thereof. Background technique [0002] Micro-nano robots can convert external energy, such as chemical energy, magnetic field, sound field, electric field, light energy, etc., into mechanical energy on the nanometer or micrometer scale to achieve precise motion control. Due to its unique advantages, including manipulability, autonomous movement ability, and easy surface functionalization, it has shown good potential for various biomedical applications. It has received great attention in on-demand drug delivery, dynamic biosensing, and precise imaging. [0003] As an electromagnetic wave with energy, light can effectively control micro-nano robots by adjusting the light intensity, light propagation direction, wavelength, polarization state and reversible on / off st...

AI Technical Summary

Problems solved by technology

However, the current silicon nanowire light-driven micro-nano robots also face some problems. Light-driven micro-nano robots based on silicon nanowires, such as TiO 2 - Light-driven micro-nano robots with Si nano-tree structure, etc., the synthesis process is relatively complicated, and high-energy ultraviolet light excitation is required, which limits the application in biomedicine; and silicon nanowire light-driven micro-robots based on PN junction solar cell structure Nano-robots require high temperature and hydrogen environment for growth and thermal doping, and have strict requirements on equipment and conditions, and the synthesis process is relatively complicated and costly, which is not conducive to mass production; secondly, it is difficult to control the motion direction of light-driven micro-nano robots, and Reliance on complex external devices is not conducive to the development of medical applications

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