[0003] 1. The technology of vacuum carburizing heat treatment has been studied in the 1960s, using the most common carburizing materials such as
methane CH 4 or
propane C 3 h 8 It is directly introduced into the
vacuum furnace in the heating state, and the surface carburizing is carried out directly. Its original intention is to overcome the phenomenon of uneven carburizing of blind holes or deep holes during general gas carburizing. The ideal cannot be achieved, so this technology is only in the laboratory stage and cannot enter
mass production
[0004] 2. In the 1970s, more experiments were carried out using other parameters, such as increasing the gas flow rate, which could indeed improve the carburizing depth, but serious carbon deposits occurred in the furnace, and
mass production was still not possible.
[0005] 3. In the 1980s, the
PLASMA device was used to accelerate
methane CH 4 or
propane C 3 h 8 The carburizing effect of the gas can greatly reduce the amount of gas introduced and improve the
carbon deposition phenomenon, but there are still troubles in maintenance, and the equipment is too expensive
[0015] At the beginning of carburizing, all C 2 h 2 gas, so the Pirani vacuum gauge can measure the true vacuum degree, and as the carburizing progresses, H 2 At this time, the accuracy of the Pirani vacuum gauge decreases, so the C of the control at this time 2 h 2 The injected amount is not the correct amount
[0016] 2) The large displacement
vacuum pump system causes uneven pressure in the furnace
[0019] 6. FIG1 European patent EP0818555A1, using C 2 h 2 As a carburizing material, when carburizing, C 2 h 2 Introduce and control the pressure in the range of 1~7.5
Torr. During the
diffusion stage, the furnace will maintain a
low vacuum. This method cannot accurately grasp the changes in the gas reaction during the carburizing process, and continuously introduces C 2 h 2 , consume more C 2 h 2 , and cause
pollution in the furnace and vacuum system
[0020] 7. In US6187111, on a device similar to FIG1, when carburizing, C 2 h 4 It is introduced and controlled within a certain
pressure range. During the
diffusion stage, the furnace will maintain a
low vacuum. This method cannot accurately grasp the changes in the gas reaction during the carburizing process, and continuously introduces C 2 h 4 , consume more C 2 h 4 , and cause
pollution in the furnace and vacuum system
[0026] The second stage uses 13A urban gas, the pressure is set at 3.76
Torr~60
Torr, and the
diffusion is still carried out in a
vacuum state. The
disadvantage of this method is that the control is poor, the change of the gas reaction during the carburizing process cannot be accurately grasped, and a large amount of carburizing is consumed. Material
However, during the actual carburizing heat treatment, the carburizing material is easy to accumulate on the probe, forming a layer of
soot, which seriously affects the accuracy of detection. Gas carburizing furnace gas and additional air will burn off the accumulated
soot, but in vacuum carburizing, these conditions do not exist, that is, there is not enough furnace gas to burn off the
soot, so this structure The design is not suitable for
mass production in vacuum carburizing heat treatment
[0028] 13.FIG7, JP2002-2167658 adopts C during vacuum carburizing heat treatment 2 h 2 or C 2 h 2 with H 2 As the carburizing material, set a carburizing upper limit and
lower limit, turn on the
vacuum pump at the upper limit of the furnace pressure, and turn off the vacuum pump at the
lower limit, so as to save the consumption of carburizing materials. The pressure setting cannot be carried out in real reaction furnace carburizing reaction, so it is easy to produce uneven carburizing
[0029] 14. JP2001-262313 performs vacuum carburizing heat treatment on a device similar to FIG1, using C 2 h 4 and H 2 The
mixed gas is used as the carburizing material, the
mixing ratio of
hydrogen is 15%~50%, and the pressure in the furnace is set at 40~65Torr. The
disadvantage of this method is that the control is poor, and the change of the gas reaction during the carburizing process cannot be accurately grasped. And consume a lot of carburizing material
[0030] 15. JP2001-240954 FIG8, the vacuum carburizing heat treatment on the device adopts C 2 h 4 and H 2 The
mixed gas is used as carburizing material, using C 2 h 4
Detector detects C 2 h 4 In order to control the valve of the
vacuum pumping system, this technology adopts C 2 h 4 The detection equipment is expensive and has poor reliability. In addition, the valve is used to control the
vacuum pumping system, and its accuracy is not good.
[0031] 16. Vacuum carburizing heat treatment is carried out on the JP2001-81543 FIG9 device, and the injection amount of hydrocarbons is detected by
laser, and then the required amount is controlled. The reliability of
laser detection in this technology decreases when there is
carbon deposit in the furnace. However, the generation of
coal ash is hard to avoid in the mass production process of vacuum carburizing heat treatment, so the design of this structure is not suitable for mass production of vacuum carburizing heat treatment
[0032] 17. US6187111 performs vacuum carburizing heat treatment on a device similar to FIG1. Using
ethylene as the carburizing
raw material, the carburizing furnace pressure is 1-10KPA. In the diffusion stage, the vacuum in the furnace is kept low. This method cannot accurately grasp the carburizing process. The change of gas reaction, and the continuous introduction of C 2 h 4 , consume more C 2 h 4 , and cause
pollution in the furnace and the vacuum system. The
disadvantage of this method is that the control is poor, the change of the gas reaction in the carburizing process cannot be accurately grasped, and a large amount of carburizing materials is consumed
[0033] 18.US PAT NO.5.702.540 uses
ethylene as the
raw material for carburizing, and reduces the furnace pressure to below 1KPA, but the price of
ethylene is very expensive, and it is not easy to store and
handle in large quantities. Since the pressure is set at 1KPA, a
large capacity is used The disadvantage of this method is that the control is poor, the change of the gas reaction in the carburizing process cannot be accurately grasped, and a large amount of carburizing materials is consumed
[0034] 19. US PAT NO.5.205.873 uses ethylene and
hydrogen as carburizing raw materials, and controls the furnace pressure at 1~10KPA, but
hydrogen is explosive, and safety must be considered. The disadvantage of this method is that the control is poor and it cannot be accurately grasped. Changes in the gas reaction during carburizing and consume a large amount of carburizing material
[0035] 20.US PAT 6.187.111 adopts a smaller capacity original, intending to reduce the
gas consumption, but it will affect the initial vacuum suction time, the disadvantage of this method is that the control is poor, and the change of the gas reaction in the carburizing process cannot be accurately grasped