Process for preparing low-temperature phase barium metaborate monocrystalline film through magnetron sputtering

A technology based on barium metaborate and single crystal thin film, which is applied in the direction of single crystal growth, single crystal growth, crystal growth, etc., and can solve the problems of long growth period of 1 to 3 months, low mechanical strength, mismatch of group velocity, etc. Achieve good economic benefits and save materials

Inactive Publication Date: 2005-06-29
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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  • Abstract
  • Description
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Problems solved by technology

[0004] The growth of β-BBO single crystal in the prior technology belongs to the flux method (also known as the molten salt method), and its disadvantages are: (1) The growth rate is slow and the growth cycle is long, and the growth cycle of a single crystal is as long as 1 to 3 months; ( 2) Processing is difficult, because with the development of laser technology towards integration and miniaturization, especially in the field of femtosecond laser technology, in order to overcome the group velocity between the fundamental frequency light and the double frequency light caused by the thickness of the crystal Due to the mismatch problem, thinner β-BBO crystals are often required as frequency doubling devices (see Acta Optics Sinica, Vol. 15, 1995, p. 641), while β-BBO crystals are soft and have low mechanical strength. Especially in the process of processing into thinner parts, there are problems such as easy cracking and deformation (see Optical Technology, 1998, No. 4, page 39), such as processing the β-BBO crystal grown by the prior technology into It is very difficult to make micron-scale or even thinner wafers, and it will also cause a great waste of materials. At the same time, the growth efficiency is low, which is far from meeting the needs of the rapidly developing laser technology.

Method used

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  • Process for preparing low-temperature phase barium metaborate monocrystalline film through magnetron sputtering

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0017] Preparation of β-BBO film on α-BBO single crystal substrate: use β-BBO ceramics as the target material, the target diameter is 85mm, the thickness is 3mm, and the polished and cleaned α-BBO single crystal substrate is sent into RF magnetron sputtering device, the substrate is a double-sided polished α-BBO single wafer, and the substrate temperature is room temperature. The indoor vacuum degree of the radio frequency magnetron sputtering device is 3×10 -4 Pa, the power used is 500W, and the RF sputtering time is 2 hours;

[0018] Then put the β-BBO / α-BBO sample obtained in the above step into an annealing furnace, raise the temperature to 600°C, keep the temperature constant for 3 hours, the heating rate is 10°C / h, and the cooling rate is 10°C / h.

[0019] The X-ray diffraction and twin crystal rocking curve analysis of the prepared β-BBO / α-BBO samples showed that the β-BBO film grown on the (001)α-BBO substrate had a highly preferred orientation in the c-axis direction...

Embodiment 2

[0021] Preparation of β-BBO thin film on α-BBO single crystal substrate: use β-BBO single crystal as target material, target diameter is 85mm, thickness 3mm, polished and cleaned α-BBO single crystal substrate Send it into a radio frequency magnetron sputtering device, the substrate is a double-sided polished α-BBO single wafer, and the substrate temperature is room temperature. The indoor vacuum degree of the radio frequency magnetron sputtering device is 3×10 -4 Pa, the power used is 500W, and the time is 2 hours.

[0022] Then put the β-BBO / α-BBO sample obtained in the above step into an annealing furnace, raise the temperature to 700°C, keep the temperature constant for 3 hours, the heating rate is 30°C / h, and the cooling rate is 30°C / h.

[0023] The X-ray diffraction and twin crystal rocking curve analysis of the prepared β-BBO / α-BBO samples showed that the β-BBO film grown on the (001)α-BBO substrate had a highly preferred orientation in the c-axis direction, Twin cry...

Embodiment 3

[0025] Preparation of β-BBO thin film on α-BBO single crystal substrate: use β-BBO single crystal as target material, target diameter is 85mm, thickness 3mm, polished and cleaned α-BBO single crystal substrate Send it into a radio frequency magnetron sputtering device, the substrate is a double-sided polished α-BBO single wafer, and the substrate temperature is room temperature. The indoor vacuum degree of the radio frequency magnetron sputtering device is 2×10 -4 Pa, the power used is 500W, and the time is 2 hours.

[0026] Then put the β-BBO / α-BBO sample obtained in the above step into an annealing furnace, raise the temperature to 500°C, keep the temperature constant for 10h, the heating rate is 100°C / h, and the cooling rate is 100°C / h.

[0027] The prepared β-BBO / α-BBO samples were tested, and the results showed that β-BBO films were formed on (001)α-BBO substrates.

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Abstract

A kind of magnetron sputtering method to prepare low-temperature phase barium metaborate single crystal thin film, which is characterized in that the β-BBO ceramic target or β-BBO single crystal target is selected, and the magnetron sputtering method is used on the α-BBO single crystal substrate A layer of β-BBO/α-BBO composite single crystal thin film is formed on it. The method of the invention overcomes the problem of difficult processing of growing body single crystals in the prior art, and greatly saves materials. The invention is suitable for mass production, can meet the market demand of rapid development of laser technology, and has good economic benefits.

Description

technical field [0001] The invention relates to a low-temperature phase barium metaborate (β-BaB 2 o 4 , referred to as β-BBO) single crystal thin film preparation method, specifically, in the high temperature phase barium metaborate (α-BaB 2 o 4 , referred to as α-BBO) single crystal substrate to grow a layer of low-temperature barium metaborate single crystal thin film material. β-BBO / α-BBO composite functional film is an excellent nonlinear optical material with a very wide application prospect. Background technique [0002] Barium metaborate BaB 2 o 4 There are two phases, a high temperature phase (α phase) and a low temperature phase (β phase), and the phase transition temperature is 925°C. α-BBO has a center of symmetry and is a UV birefringent crystal with excellent performance. It can be grown by ordinary pulling method and crucible drop method. See Journal of Crystal Growth, Volume 191, 1998, page 517, and patent ZL97106378. 8. "Growth method of high-temperat...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B23/00C30B25/06C30B29/22
Inventor 周国清刘军芳徐军何晓明夏长泰
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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