Preparation method of highly magnesium-doped strontium plumbum titanate high dielectric adjustable film material

A technology of lead strontium titanate and thin film materials is applied in the field of preparation of strontium lead titanate high dielectric tunable thin film materials, which can solve the problems of inability to form crystalline content, reduce the crystalline phase content of thin films, high PST thin films, etc. Good market prospect, improved dielectric constant, low cost effect
CN1951869AInactive Publication Date: 2007-04-25ZHEJIANG UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
ZHEJIANG UNIV
Publication Date
2007-04-25
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a preparing method of high-dielectric adjustable film material of strontium lead titanate doped magnesium, which comprises the following steps: adopting butyl phthalate, lead acetate, strontium carbonate and magnesium carbonate as raw material; making ethandiol dimethyl ether and acetate as solvent; allocating sol former; adopting allocated relative sol former as coating solution; using immersing sash method to prepare film layer; drying the coating; disposing under high-temperature; sintering to obtain PSMT ferric electric film.
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Description

technical field

[0001] The invention relates to a preparation method of a high-magnesium-doped strontium-lead titanate high-dielectric adjustable film material. Background technique

[0002] In recent years, ferroelectric thin films have been used to make ferroelectric storage memories, pyroelectric detector arrays, Piezoelectric motors, ferroelectric film capacitors, film sensor arrays, iron point film microwave devices, ferroelectric optics and integrated optics, etc. It can be widely used in many fields such as microelectronics, integrated optics, and micromechanics. With the advancement of thin film preparation technology and the development of application fields, especially the preparation technology of ferroelectric thin film can be compatible with semiconductor integrated circuit technology, making the development and research of ferroelectric, piezoelectric, Pyroelectric, electro-optic, nonlinear optics and many other functions in one multifunctional circuit, devic...

Claims

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