Method for extracting silicon, silicon carbide and polyethylene glycol from silicon wafer slicing slurry

A polyethylene glycol, silicon carbide technology, applied in chemical instruments and methods, silicon compounds, inorganic chemistry, etc., can solve problems such as environmental pollution, achieve considerable economic benefits, improve use efficiency, and avoid pollution.

Inactive Publication Date: 2010-04-07
WUXI HERONG TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

If the mortar after silicon chip cutting is directly discarded, it will cause huge and irreversible pollution to the environment

Method used

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  • Method for extracting silicon, silicon carbide and polyethylene glycol from silicon wafer slicing slurry
  • Method for extracting silicon, silicon carbide and polyethylene glycol from silicon wafer slicing slurry
  • Method for extracting silicon, silicon carbide and polyethylene glycol from silicon wafer slicing slurry

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0047] Weigh 1000g of silicon chip cutting mortar, stir evenly with a stirrer, and control the temperature at 25-60°C. Injected into a cyclone separator and separated at a pressure of 2 bar to obtain a 650g solid stream and a 350g liquid stream. After adding water, the solid flow enters the sedimentation separator, pressurizes to 3 bar, and works for 6 hours to obtain silicon cake and silicon carbide. Add water equivalent to 3 times the weight of the silicon cake into the silicon cake, filter through a microporous filter with a pore size of 1-3 μm, and maintain a pressure of 0.1-2 bar during filtration to obtain a finished silicon material. Add 600g of water to the silicon carbide, and carry out solid-liquid separation through a plate-and-frame filter press, add 1000g of water at 30°C to the obtained filter cake, stir for 1 hour, and pour it into a ceramic vacuum filter, and filter the filter cake Bake in an oven at 100°C for 5 hours to make the moisture content of silicon ca...

Embodiment 2

[0049] Weigh 2000g of silicon chip cutting mortar, stir evenly with a stirrer, and control the temperature at 25-60°C. Put into the cyclone separator, separate under the pressure of 1.8bar, obtain 1300g solid flow, 700g liquid flow. After adding water, the solid flow enters the sedimentation separator, pressurizes to 2.5 bar, and works for 7 hours to obtain silicon cake and silicon carbide. Add 1200g of water to the silicon cake, filter through a microporous filter with a pore size of 1-3μm, and maintain a pressure of 0.1-2bar during filtration to obtain the finished silicon material. Add 1500g of water to the silicon carbide, and pass through a plate and frame filter press for solidification Liquid separation, add 2000g of water at 30°C to the obtained filter cake, stir for 1.5 hours, put it into a ceramic vacuum filter, and put the filtered filter cake into a 110°C oven to bake for 3 hours, so that the moisture content of silicon carbide is lower than 0.1%. , cooled, and si...

Embodiment 3

[0051] Weigh 3000g of silicon chip cutting mortar, stir evenly with a stirrer, and control the temperature at 25-60°C. Put into a cyclone separator and separate under 3bar pressure to obtain 1950g solid flow and 1050g liquid flow. After adding water, the solid stream enters the sedimentation separator, pressurizes to 2 bar, and works for 3 hours to obtain silicon cake and silicon carbide. Add 1000g of water to the silicon cake, filter through a microporous filter with a pore size of 1-3μm, and maintain a pressure of 0.1-2bar during filtration to obtain the finished silicon material. Add 1500g of water to the silicon carbide, and pass through a plate and frame filter press for solidification Liquid separation, the obtained filter cake is added with 3000g of water at 35°C, stirred for 0.5 hours, put into a ceramic vacuum filter, and the filtered filter cake is baked in a 95°C oven for 6.5 hours, cooled, and sieved through a 90um vibrating sieve. After granulation, the finished ...

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Abstract

The invention discloses a method for extracting silicon, silicon carbide and polyethylene glycol from silicon wafer slicing slurry. After the slurry is stirred at normal temperature, a solid stream and a liquid stream are obtained through physical separation. The solid stream enters a settlement separation device, and a silicon liquid stream and a silicon carbide liquid stream are obtained after reaction. The silicon liquid stream is mechanically separated so as to obtain solid silicon and liquid. The silicon carbide liquid stream is mechanically separated, rinsed at one time, dried and packaged. The recovered solid silicon is a basic raw material of a silicon wafer, and the recovered silicon carbide is an auxiliary material for silicon wafer slicing. The liquid stream part is added with a decolorizing agent and a filter aid, and then is subjected to mechanical separation; and the separated liquid is added with an ion absorbent and a filter aid, and then is subjected to mechanical separation, membrane filtration and dehydration so as to obtain the polyethylene glycol. The method can avoid pollution and is completely environment-friendly.

Description

Technical field: [0001] The invention relates to a method for extracting silicon, silicon carbide and polyethylene glycol from silicon chip cutting mortar. Background technique: [0002] Silicon wafer is the basic material of semiconductor, solar energy, liquid crystal display and other industries. It is divided into monocrystalline silicon wafer and polycrystalline silicon wafer. The raw material is single crystal silicon or polycrystalline silicon. , using a wire cutting machine to process silicon wafers of various specifications. [0003] Silicon carbide (SiC) is also called moissanite. Among the non-oxide high-tech refractory materials such as C, N, B, etc., silicon carbide is the most widely used and most economical one. It can be called emery or refractory sand. Silicon carbide is smelted at high temperature in a resistance furnace with raw materials such as quartz sand, petroleum coke (or coal coke), wood chips (salt is required to produce green silicon carbide). ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B33/037C01B31/36C08G65/34
Inventor 王勇
Owner WUXI HERONG TECH
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