Vanadium oxide thin film for microbolometer and preparation method thereof
A microbolometer, vanadium oxide thin film technology, applied in electrical radiation detectors, resistor manufacturing, superimposed layer plating, etc. The preparation process is difficult and other problems, to achieve the effect of being suitable for large-scale industrial production, improving poor chemical stability, and excellent chemical stability
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[0028] The present invention will be further described below in conjunction with the drawings:
[0029] The guiding ideology of the present invention is to use the excellent electrical and optical properties of carbon nanotubes and vanadium oxide in the vanadium oxide-carbon nanotube composite film structure to prepare a composite film with relatively good comprehensive performance (such as figure 1 (Shown), used as the thermistor material and light absorbing material of the uncooled microbolometer to improve the performance of infrared detectors or terahertz detectors. The embodiment of the present invention for preparing the vanadium oxide-carbon nanotube composite film is as follows: ① A silicon wafer with a silicon dioxide film grown on the surface is selected as the substrate 1 for film growth, first ultrasonic cleaning with acetone, and then ultrasonic cleaning with methanol Bottom 1, and then dry it with nitrogen; ② Put the clean substrate 1 into a vacuumized reactor, firs...
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