Microfluidic atom cavity, on-chip atomic clock chip and preparation method

Abstract

The invention discloses a microfluidic atom cavity, an on-chip atomic clock chip and a preparation method. The method includes steps: a silicon substrate with a microfluidic channel and a borosilicate glass assembly wafer with a glass microcavity structure corresponding to the microfluidic channel are bonded to form a closed system, the closed system comprises a glass atom cavity, a reactant partition microfluidic channel and a reactant microcavity, reactant particles of materials necessarily required by atomic clock generation are arranged in the reactant microcavity, the glass atom cavity is communicated with the reactant microcavity through the reactant partition microfluidic channel, the aperture of the reactant microcavity on a bonding surface is smaller than that of the glass atom cavity, the minimum width of the reactant partition microfluidic channel is no larger than the minimum particle diameter of the reactant particles, and the glass micro cavity is provided with a light incidence plane. The smaller microcavity containing the reactant powder is connected with the larger microcavity required by forming of the spherical glass microcavity, forming of a spherical rubidium steam cavity and sealing of gas can be completed at one step, fine sealing performance is achieved, no impurities can be led in, performance of an atomic clock can be improved, the spherical rubidium steam cavity can be integrated into a microchip-level atomic clock system, planar packaging of the atomic clock can be realized, and size of the atomic clock is reduced effectively.

Description

technical field [0001] The invention relates to a MEMS (micro-electro-mechanical system) manufacturing technology, in particular to a method for preparing a small-volume, low-cost, good-tightness, high-stability wafer-level spherical rubidium vapor chamber capable of mass production. Background technique [0002] At present, atomic clocks are the most accurate artificial clocks, and the accuracy of atomic clocks can reach one billionth of a second or even higher. A special type of quantum transition in atomic clocks is the hyperfine transition, which involves the interaction of the nuclear magnetic field of the atom and the magnetic field of the electrons outside the nucleus. In principle, the principle of atomic clocks is basically clear, and there are two main directions for current development: one is to improve the performance of atomic clocks in terms of accuracy; the other is to miniaturize them while ensuring their performance. Currently, the world's most accurate at...

AI Technical Summary

Problems solved by technology

[0004] Some chip-level atomic clocks are currently designed. In the structure of silicon-glass-silicon, substances such as rubidium chloride and barium azide are directly reacted to form rubidium, and the reaction residue barium chloride stays in the atomic cavity, which will affect the optical window. Pollution will seriously affect the interaction between rubidium, cesium and other substances and light, so the performance of the obtained atomic cavity is not high

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