Preparation method of N-type crystalline silicon back emitter junction solar battery and corrosive liquid
A solar cell and emitter junction technology, applied in the field of solar cell materials, can solve the problems of difficulty in reaching, low cell efficiency, low light attenuation characteristics and strong tolerance of transition metals, and achieves simple operation, improved efficiency, and easy large-scale application. Effect
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Embodiment 1
[0026] (1) Put an N-type polycrystalline silicon wafer (resistivity 1Ω.cm) with a thickness of 200 μm into nitric acid (65% by mass fraction), hydrofluoric acid (40% by mass fraction) and H 2 O in the mixture of the three (volume ratio 1:1:7) for chemical corrosion thinning. Take it out after putting it in for 8 minutes, and the thickness of the silicon wafer is about 120 μm as measured by a spiral micrometer;
[0027] (2) Put the thinned silicon chip into a mixed solution of nitric acid (65% by mass fraction) and hydrofluoric acid (40% by mass fraction) (volume ratio is 1:3) for surface texture, and then use hydrofluoric acid Acid (mass fraction 40%) pickling 5min, dry after cleaning with deionized water;
[0028] (3) Put the dried silicon wafer into the phosphorus diffusion furnace, and diffuse a layer of phosphorus diffusion layer with a square resistance of 80-120Ω on the front side, which is used for the front surface field of the N-type battery;
[0029] (4) In the pla...
Embodiment 2
[0034] (1) Put an N-type metallurgical-grade boron-phosphorous compensation single crystal silicon wafer (resistivity 0.5Ω.cm) with a thickness of 180 μm into nitric acid (68% by mass fraction), hydrofluoric acid (40% by mass fraction) and CH 3 The chemical corrosion thinning is carried out in the mixed solution of COOH (volume ratio 1:1:5). Take it out after putting it in for 10 minutes, and the thickness of the silicon wafer is about 100 μm as measured by a spiral micrometer;
[0035] (2) putting the thinned silicon wafer into an aqueous NaOH solution with a mass concentration of 30% for surface texturing, then pickling with hydrofluoric acid (40% by mass) for 5 minutes, washing with deionized water, and drying;
[0036](3) Put the dried silicon wafer into the phosphorus diffusion furnace, and diffuse a layer of phosphorus diffusion layer with a square resistance of 80-120Ω on the front side, which is used for the front surface field of the N-type battery;
[0037] (4) In t...
Embodiment 3
[0042] (1) Put an N-type polycrystalline silicon wafer (resistivity 0.5Ω.cm) with a thickness of 180 μm into nitric acid (65% by mass fraction), hydrofluoric acid (40% by mass fraction) and H 2 O in the mixture of the three (volume ratio is 2:1:7) for chemical corrosion thinning. After putting it in for 7 minutes, take it out, and the thickness of the silicon wafer is about 120 μm as measured by a spiral micrometer;
[0043] (2) Put the thinned silicon chip into a mixed solution of nitric acid (65% by mass fraction) and hydrofluoric acid (40% by mass fraction) (volume ratio is 1:3) for surface texture, and then use hydrofluoric acid Acid (mass fraction 40%) pickling 5min, dry after cleaning with deionized water;
[0044] (3) Put the dried silicon wafer into the phosphorus diffusion furnace, and diffuse a layer of phosphorus diffusion layer with a square resistance of 80-120Ω on the front side, which is used for the front surface field of the N-type battery;
[0045] (4) In t...
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