Ti/TiN/MaN composite coating on surface of cutter and preparation method of Ti/TiN/MaN composite coating

A composite coating and cutting tool technology, applied in the direction of coating, cutting tools for lathes, metal material coating process, etc., can solve the problems of poor comprehensive performance and stability, achieve good consistency and uniformity, and ensure stability , the effect of high purity

Inactive Publication Date: 2013-05-01
SICHUAN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a Ti/TiN/MaN composite coating on the tool surface with excellent performa...

Method used

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  • Ti/TiN/MaN composite coating on surface of cutter and preparation method of Ti/TiN/MaN composite coating
  • Ti/TiN/MaN composite coating on surface of cutter and preparation method of Ti/TiN/MaN composite coating
  • Ti/TiN/MaN composite coating on surface of cutter and preparation method of Ti/TiN/MaN composite coating

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0036] The high-speed steel hob is sandblasted and ultrasonically cleaned by conventional methods, and then put into the coating machine, and then the coating chamber is vacuumed to 5.0×10 -3 Pa, argon gas is introduced to make the total pressure in the coating machine 3.5×10 -1 Pa, and control the heating power 9KW to heat the tool to be plated for 120min; at a pressure of 2.0×10 -1 Under the protection of Pa argon gas, the DC bias voltage of the control tool is -200V, the pulse bias voltage is -800V, and the tool to be plated is cleaned with a plasma power of 6KW for 30min; at a pressure of 1.5×10 -1Under the protection of Pa argon gas, heat the Ti evaporation source with a plasma enhanced source with a power of 10KW, and plate at a DC bias of -200V and a pulse bias of -600V for 10min; feed 150 sccm of nitrogen, and continue to work together with the Ti evaporation source at a power of 10KW , plating at DC bias -200V for 10min; use intermediate frequency reactive magnetron ...

Embodiment 2

[0039] Put the high-speed steel drill bit into the coating machine after sandblasting and ultrasonic cleaning by conventional methods, and then vacuumize the coating chamber to 5.0×10 -3 Pa, argon gas is introduced to make the total pressure in the coating machine 2.5×10 -1 Pa, and control the heating power 7KW to heat the tool to be plated for 60min; at a pressure of 2.5×10 -1 Under the protection of Pa argon gas, the DC bias voltage of the control tool is -100V, the pulse bias voltage is -500V, and the tool to be plated is cleaned with a plasma power of 4KW for 15min; at a pressure of 1.2×10 -1 Under the protection of Pa argon gas, heat the Ti evaporation source with a plasma enhanced source with a power of 7.5KW, and plate at a DC bias of -100V and a pulse bias of -400V for 5min; feed 110sccm of nitrogen, and continue to work together with the Ti evaporation source 7.5KW, DC bias -130V for 5 minutes; use intermediate frequency reactive magnetron sputtering to sputter compo...

Embodiment 3

[0042] Carbide milling cutters are subjected to sand blasting and ultrasonic cleaning by conventional methods, and then put into the coating machine, and then the coating chamber is vacuumed to 5.0×10 -3 Pa, argon gas is introduced to make the total pressure in the coating machine 4.0×10 -1 Pa, and control the heating power 9KW to heat the tool to be plated for 150min; at a pressure of 1.8×10 -1 Under the protection of Pa argon gas, the DC bias voltage of the control tool is -200V, the pulse bias voltage is -600V, and the tool to be plated is cleaned with a plasma power of 6KW for 30min; at a pressure of 8×10 -2 Under the protection of Pa argon gas, heat the Ti evaporation source with a plasma enhanced source with a power of 9KW, and plate at a DC bias of -200V and a pulse bias of -400V for 8min; feed 100 sccm of nitrogen, and continue to work together with the Ti evaporation source at a power of 9KW , plating at DC bias -150V for 10min; use intermediate frequency reactive ma...

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Abstract

The invention discloses a Ti/TiN/MaN composite coating on the surface of a cutter. The Ti/TiN/MaN composite coating is divided into three layers, namely a Ti transition layer, a TiN layer and an (Al, Ti, Cr) N layer in sequence outwards from the surface of the cutter, wherein the thicknesses of the Ti transition layer, the TiN layer and the (Al, Ti, Cr) N layer are respectively 50-200nm, or 100-500nm or 2-5Mu m; the tissue structure of the Ti/TiN/MaN composite coating is a nanocrystalline structure; the (111) surface diffraction intensity I of the Ti/TiN/MaN composite coating in X-ray diffraction is lower than 400 and the surface of the Ti/TiN/MaN composite coating is 22-33GPa in hardness and 1-2-level in indentation grade. The invention also discloses a preparation method of the Ti/TiN/MaN composite coating. According to the invention, because a plasma reinforced intermediate-frequency reactive magnetron sputtering technology is used as the preparation method of the composite coating, not only is sputtering evaporation of various reactants facilitated, but also the obtained Ti/TiN/MaN composite coating is dense in tissue, high in purity, flat in surface, high in binding force with a cutter and good in wear resistance, the segregation of film components can be furthest restricted, the ionization rate and the deflection property are greatly improved, and therefore the life of the Ti/TiN/MaN composite coating in cutting machining of stainless steel is prolonged by 50-100 percent; and in addition, the Ti/TiN/MaN composite coating is simple in process, easy to master and control and is convenient for industrial production of a cutter coating.

Description

technical field [0001] The invention belongs to the technical field of hard coatings on tool and mold surfaces and their preparation, and in particular relates to a Ti / TiN / MaN composite coating on the surface of a cutting tool and a preparation method thereof. Background technique [0002] There are two main types of physical coating technologies commonly used in industrial production: magnetron sputtering ion plating and cathodic arc ion plating. Although the coating obtained by magnetron sputtering ion plating technology has the advantages of fine structure, high purity, smooth surface, and is conducive to the sputtering evaporation of various reactants, it has the disadvantages of low ionization rate and poor plating performance. The disadvantages limit its development. Although cathodic arc ion plating has the advantages of high ionization rate, fast deposition speed, good film-base binding force, and good coating wrapping property, etc., there are also phenomena such a...

Claims

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Application Information

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IPC IPC(8): B23B27/14C23C14/16C23C14/24C23C14/35
Inventor 赵海波杜浩梁雅庭梁红樱鲜广王辉
Owner SICHUAN UNIV
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