Preparation method of trace element composite doping modified tin antimony oxide (ATO) ceramic target

A composite doping and ceramic target technology is applied in the field of preparation of trace element composite doping modified tin antimony oxide ceramic targets, which can solve the problems of expensive equipment, low yield, long sintering time and the like, and achieves good electrical conductivity. , high conductivity, high density effect

Inactive Publication Date: 2014-04-23
WUHAN UNIV OF TECH
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  • Description
  • Claims
  • Application Information

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Problems solved by technology

The hot pressing sintering method has low sintering temperature, precise temperature control and uniform structure, but the main disadvantages of this method are long sintering time, expensive equipment and low yield
The spark plasma sintering method has the advantages of fast heating rate, short sintering time, low sintering temperature, uniform and controllable grain size, high density, etc., but its sintering mechanism is still controversial, and the equipment is expensive

Method used

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  • Preparation method of trace element composite doping modified tin antimony oxide (ATO) ceramic target
  • Preparation method of trace element composite doping modified tin antimony oxide (ATO) ceramic target
  • Preparation method of trace element composite doping modified tin antimony oxide (ATO) ceramic target

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Comparison scheme
Effect test

Embodiment 1

[0027] Such as figure 1 Shown, the preparation method of modified tin antimony oxide ceramic target, it comprises the following steps:

[0028] 1) Ingredients: 0.1μm, 99% purity and Sb in electronic balance 2 o 3 ATO powder with a powder mass ratio of 1.0% to the total mass, CuO powder with a purity of 1 μm and a purity of 98%, and MnO powder with a purity of 0.1 μm and a purity of 98%. 2 The powder is weighed according to the mass ratio of 100:0.95:0.05 (the mass of ATO powder is 500g) and set aside.

[0029] 2) Granulation: according to ATO powder, CuO powder and MnO 2 Powder: organic solvent: mass ratio of mixing ball = 1:2:1, ATO powder, CuO powder, MnO 2 The powder, the organic solvent and the mixing ball are put into a ball milling tank and mixed in a planetary ball mill; the organic solvent is absolute ethanol, the mixing ball is a nylon-coated ceramic ball, and the ball milling tank is Nylon tank; the speed of the planetary ball mill is 200 rpm, and the ball milli...

Embodiment 2

[0034] Such as figure 1 Shown, the preparation method of modified tin antimony oxide ceramic target, it comprises the following steps:

[0035] 1) Ingredients: 1μm, 99% purity and Sb in electronic balance 2 o 3 The powder mass accounts for 0.1% ATO powder, 0.1 μm CuO powder with a purity of 98%, and 1 μm MnO powder with a purity of 98%. 2 The powder is weighed according to the mass ratio of 100:0.05:0.95 (the mass of ATO powder is 500g) and set aside.

[0036] 2) Granulation: according to ATO powder, CuO powder and MnO 2 Powder: organic solvent: mass ratio of mixing ball = 1:2:1, ATO powder, CuO powder, MnO 2 The powder, the organic solvent and the mixing ball are put into a ball milling tank and mixed in a planetary ball mill; the organic solvent is absolute ethanol, the mixing ball is a nylon-coated ceramic ball, and the ball milling tank is Nylon tank; planetary ball mill at 200 rpm, ball milling time 4 hours. Pour the uniformly mixed slurry after ball milling into a ...

Embodiment 3

[0041] Such as figure 1 Shown, the preparation method of modified tin antimony oxide ceramic target, it comprises the following steps:

[0042] 1) Ingredients: 0.1μm, 99% purity and Sb in electronic balance 2 o 3 The powder mass accounts for 0.5% ATO powder, 0.1 μm CuO powder with a purity of 98%, and 0.1 μm MnO powder with a purity of 98%. 2 The powder is weighed according to the mass ratio of 100:0.25:0.25 (the mass of ATO powder is 500g) and set aside.

[0043] 2) Granulation: according to ATO powder, CuO powder and MnO 2 Powder: organic solvent: mass ratio of mixing ball = 1:2:1, ATO powder, CuO powder, MnO 2 The powder, the organic solvent and the mixing ball are put into a ball milling tank and mixed in a planetary ball mill; the organic solvent is absolute ethanol, the mixing ball is a nylon-coated ceramic ball, and the ball milling tank is Nylon tank; the speed of the planetary ball mill is 200 rpm, and the ball milling time is 8 hours. Pour the uniformly mixed s...

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Abstract

The invention provides a preparation method of a trace element composite doping modified tin antimony oxide (ATO) ceramic target. The preparation method is characterized by firstly weighing ATO powder with antimony oxide mass percentage of 0.1-1.0% and then respectively weighing manganese oxide and copper oxide powder to serve as composite doping modifying agents according to 0.5-1.0% of the total mass of the ATO powder; ball-milling the powder together with an organic solvent and mixing balls in a mass ratio of (1:1:1)-(1:2:1), putting the obtained slurry into a baking oven to be baked at low temperature until organic solvent evaporation is completed, then grinding the product and sieving the product with an open sieve to obtain mixed powder; after the mixed powder is subjected to intercooling and isostatic pressing in a die, sintering the green body in the air atmosphere by adopting the mode of pressureless sintering, thus obtaining the ceramic target, wherein the heating rate is 0.5-5 DEG C / min, the sintering temperature is 1200-1450 DEG C and the insulating time is 1-10 hours. The obtained modified ATO ceramic target has the advantages of relatively small composite doping amount, high compactness, relatively high normal temperature electrical conductivity and the like.

Description

technical field [0001] The present invention relates to a method for preparing antimony tin oxide (ATO) ceramic target compound doped with trace elements, which can prepare high-density, high-conductivity antimony tin oxide ceramics, which can be used as a target for preparing transparent conductive films by physical vapor deposition. material. Background technique [0002] With the vigorous development of my country's economy and technology, the photovoltaic industry and optoelectronic information industry occupy a pivotal position in contemporary society as the medium of information transmission. With their rapid development, the development of transparent conductive films with high conductivity and high visible light transmittance The demand is also increasing day by day. Due to the high transmittance in the visible light region, low resistivity (as low as 10-4Ω·cm), and unique properties such as high reflectivity in the infrared region and strong attenuation to microwave...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/457C04B35/622
Inventor 沈强杨萍陈斐罗国强江灵荣朱莉·沙农张联盟
Owner WUHAN UNIV OF TECH
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