Mixed film coating equipment for neodymium iron boron rare-earth permanent magnet components and manufacturing method thereof

Abstract

The invention discloses mixed film coating equipment for neodymium iron boron rare-earth permanent magnet components and a manufacturing method of the mixed film coating equipment. The film coating equipment comprises a vacuum chamber, cylinder rotating cathode magnetic control targets, plane cathode magnetic control targets, multi-arc ion targets, rotating stands and material baskets. In the working process, the rotating stands perform revolution in the vacuum chamber, and the two ends of each net-shaped material basket are installed on the corresponding rotating stand through rotary shafts and not only perform revolution along with the rotating stand, but also perform rotation. The cylinder rotating cathode magnetic control targets are installed in the rotating stands in the vacuum chamber, the plane magnetic control targets, the multi-arc ion targets, anode layer linear ion sources and a heating device are installed around the rotating stands in the vacuum chamber, and vacuum film coating is performed in a three-layer mode. The first layer is a magnetron sputtering coating layer, the thickness of the coating layer is 0.1 micrometer-5 micrometers, the second layer is a mixed coating layer of magnetron sputtering and multiple arcs, the thickness of the mixed coating layer is 1 micrometer-15 micrometers, the third layer is a magnetron sputtering coating layer, and the thickness of the coating layer is 0.1 micrometer-5 micrometers. Mixed film coating is adopted as the surface treatment process of the rare-earth permanent magnet components, so that the anti-corrosion capacity of the rare-earth permanent magnet components is improved, and meanwhile the magnetic performance of the rare-earth permanent magnet components is improved.

Description

technical field [0001] The invention belongs to the field of permanent magnet devices, and in particular relates to a mixed coating equipment and a manufacturing method for NdFeB rare earth permanent magnet devices. Background technique [0002] NdFeB rare earth permanent magnet materials, with their excellent magnetic properties, have been used more and more, and are widely used in medical nuclear magnetic resonance imaging, computer hard drives, audio, mobile phones, etc.; with the requirements of energy saving and low-carbon economy , NdFeB rare earth permanent magnet materials have begun to be used in auto parts, household appliances, energy saving and control motors, hybrid vehicles, wind power generation and other fields. [0003] The surface treatment process of rare earth permanent magnet devices in the prior art mainly includes electroplating Ni-Cu-Ni, electroplating Zn, electrophoresis, spraying and other technologies, and there is also a method of vacuum aluminum ...

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Problems solved by technology

[0005] The existing technology uses evaporation coating, the bonding force between the film layer and the substrate is poor, and there are deficiencies in improving the corrosion resistance of rare earth permanent magnet devices; there are also existing technologies that use magnetron sputtering coating, due to the low efficiency of magnetron sputtering, It is not suitable for low-cost mass production, and some have not solved the card installation technology, which is not easy to install, and the production is troublesome; some existing technologies use multi-arc ion coating, because there are large particles in the multi-arc ion coating, it cannot reach rare earth permanent magnet devices Corrosion resistance requirements; In order to solve the shortcomings of multi-arc ion plating, some people in the prior art thought of

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