The invention discloses mixed
film coating equipment for
neodymium iron
boron rare-earth permanent
magnet components and a manufacturing method of the mixed
film coating equipment. The
film coating equipment comprises a
vacuum chamber, cylinder rotating
cathode magnetic control targets, plane
cathode magnetic control targets, multi-arc
ion targets, rotating stands and material baskets. In the working process, the rotating stands perform revolution in the
vacuum chamber, and the two ends of each net-shaped material basket are installed on the corresponding rotating stand through rotary shafts and not only perform revolution along with the rotating stand, but also perform rotation. The cylinder rotating
cathode magnetic control targets are installed in the rotating stands in the
vacuum chamber, the plane magnetic control targets, the multi-arc
ion targets,
anode layer linear
ion sources and a heating device are installed around the rotating stands in the vacuum chamber, and vacuum film
coating is performed in a three-layer mode. The first layer is a magnetron
sputtering coating layer, the thickness of the
coating layer is 0.1
micrometer-5 micrometers, the second layer is a mixed coating layer of magnetron
sputtering and multiple arcs, the thickness of the mixed coating layer is 1
micrometer-15 micrometers, the third layer is a magnetron
sputtering coating layer, and the thickness of the coating layer is 0.1
micrometer-5 micrometers. Mixed film coating is adopted as the surface treatment process of the rare-earth permanent
magnet components, so that the anti-
corrosion capacity of the rare-earth permanent
magnet components is improved, and meanwhile the magnetic performance of the rare-earth permanent magnet components is improved.