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Novel mold core for optical lens processing and preparation method therefor

A technology of optical lens and mold core, which is applied in the direction of glass pressing, glass manufacturing equipment, manufacturing tools, etc. It can solve the requirements that do not meet the surface quality requirements of high-precision micro-lenses. The light transmittance and performance of plastics are not as good as optical glass, which cannot be realized Extensive processing of optical materials and other issues to achieve the effects of high hardness, good consistency, good compatibility and integration

Active Publication Date: 2015-08-19
苏州含光微纳科技有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] (1) The traditional tungsten steel (tungsten carbide) material is nano-grinded and polished to process a mold core that can be used for molding a single lens component. Although this traditional machining method can achieve high surface accuracy, But the processing cost is high;
[0006] (2) The laser micromachining method can be used to produce complex three-dimensional microstructures, but due to the slag generated by the material during laser heat treatment, the roughness of the processed surface is deteriorated, which does not meet the surface quality requirements of high-precision microlenses;
[0007] (3) With the help of photoresist thermal melting and reflow, supplemented by electroforming technology, mold cores made of metal materials such as nickel and copper are formed. This processing method has great restrictions on materials, and the processing process is relatively cumbersome;
[0008] (4) Wafer-level etching of silicon is used to form the core of the wafer-level microlens array. This method is more suitable for the current demand for wafer-level optical microlenses, but due to the limitations of the inherent characteristics of the silicon material itself , the material of the processed optical microlens array will be limited. At present, only plastic can be processed, and the light transmission and performance of plastic are not as good as optical glass.
In addition, wafer-level optical lenses (WLO, Wafer level optics) have become an important development trend, but wafer-level glass lenses can only be processed by direct glass etching at present, and the cost is very high, which hinders its popularization and application
[0011] At present, the existing mold core materials and corresponding processing methods can realize low cost, batch processing, high precision and good consistency of mold core materials, but cannot guarantee high strength and service life, and cannot realize extensive processing of optical materials; The mold core material with good comprehensive performance, which can realize the processability of a wide range of optical materials and ensure a long service life at the same time cannot achieve low-cost processing; and some materials are more suitable for optical (micro) lens (array) processing than existing materials Manufactured mold core materials cannot be processed and prepared as mold cores for the processing and manufacture of optical (micro) lenses (arrays) because they cannot be processed effectively by existing mechanical means

Method used

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  • Novel mold core for optical lens processing and preparation method therefor
  • Novel mold core for optical lens processing and preparation method therefor
  • Novel mold core for optical lens processing and preparation method therefor

Examples

Experimental program
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Effect test

Embodiment 1

[0035] Example 1: Ordinary photolithography plus variable speed etching of wafer-level tungsten core array

[0036] 1) Use 4-inch, 6-inch, 8-inch or 12-inch metal tungsten polished discs, and clean the surface;

[0037] 2) Photolithography forms a mask for defining the shape of the tungsten core, such as figure 1 As shown in figure (a), the mask can be a photoresist mask or other organic material mask, or a hard mask;

[0038] 3) Under the cover of the above mask, an etching gas (SF 6 and other fluorine-based gases) or a variety of mixed etching gases (SF 6 Fluorine-based gases such as O 2 , N 2 etc.), for variable speed etching of metal tungsten wafers, by controlling the etching type (isotropic, anisotropic), etching rate, etching selection ratio, etc., the wafer-level tungsten mold with the required curvature radius can be designed Core arrays, such as figure 1 As shown in (b) figure:

[0039] The mask is formed by a common photolithography process, and the etching g...

Embodiment 2

[0042] Example 2: The photoresist of the wafer-level tungsten mold core is melted and reflowed, photolithography is added and etched at a constant speed, and a spherical wafer-level tungsten mold core array is processed and prepared;

[0043] 1) Use 4-inch, 6-inch, 8-inch or 12-inch metal tungsten polished discs, and clean the surface;

[0044] 2) Photolithography forms a photoresist cylinder used to define the shape of the tungsten core, such as figure 2 As shown in (a) in the figure, by means of high-temperature melting reflow process, by controlling temperature and time, a spherical photoresist mask with a radius of curvature that meets the design requirements is formed, such as figure 2 As shown in (b) figure;

[0045] 3) Under the cover of the above photoresist mask, a single component (SF 6 Fluorine-based gases) or multi-component etching gases (SF 6 Fluorine-based gases such as O 2 , N 2 etc.), adjust the appropriate gas ratio and etching parameters (gas flow, po...

Embodiment 3

[0047] Embodiment 3: Special photolithography plus uniform-speed etching of wafer-level tungsten mold cores to process and prepare spherical wafer-level tungsten mold core arrays;

[0048] 1) Use 4-inch, 6-inch, 8-inch or 12-inch metal tungsten polished discs, and clean the surface;

[0049] 2) The etching mask is formed by special lithography process, including: gray scale lithography, electron beam lithography, laser lithography, mask moving lithography, moving mask filtering technology, etc., forming a mask with specific optical information film, such as image 3 As shown in (a) figure (this figure represents the mask formed by grayscale lithography);

[0050] 3) Under the cover of the above photoresist mask, a single component (SF 6 Fluorine-based gases) or multi-component etching gases (SF 6 Fluorine-based gases such as O 2 , N 2 etc.), adjust the appropriate gas ratio and etching parameters (gas flow, power, etc.) to achieve an appropriate etching rate, etch the waf...

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Abstract

The invention relates to a novel mold core for optical lens processing and a preparation method therefor. The mold core is made of metallic tungsten, and is a single component level tungsten mold core or a wafer level tungsten mold core. The wafer level tungsten mold core adopts a photoetching and etching method, combines with a subsequent wafer level bonding and cutting technology, and meets the requirement of a wafer level optical lens; and the single component level tungsten mold core is formed by cutting the wafer level tungsten mold core. After the tungsten mold core is machined into a required shape, a single optical lens component or wafer level microlens array is prepared by utilizing the tungsten mold core in combination with a method such as injection molding and mould pressing. According to the invention, metallic tungsten is adopted as a mold core material for optical lens processing, and optical lens of a spherical surface or any curved surface of various materials (including organic materials, plastic, various high-quality optical glass materials with high melting points, and the like) can be processed and manufactured.

Description

technical field [0001] The invention belongs to the technical field of optical lenses, and in particular relates to a novel mold core material for processing optical (micro) lenses (arrays) and a processing preparation method. Background technique [0002] At present, the processing methods of optical lenses are basically divided into: direct precision processing of a single lens component; using a special photolithography process or melting reflow process to prepare a photoresist mask containing precise optical information for etching glass Forming microlenses (arrays); using mold cores processed into the shape of required optical lenses to perform molding of optical lens materials to form microlenses (arrays). [0003] The mold core material needs to have the following characteristics: ①The surface is flawless and can be ground into a non-porous, smooth optical mirror; ②It has high oxidation resistance under high temperature conditions, and the structure does not change, a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C03B11/08
Inventor 陈兢胡佳宋璐陈献
Owner 苏州含光微纳科技有限公司
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