Synchronous light-electricity sensing method for dark-field imaging-based solid nano channel
A nano-channel and dark-field imaging technology, applied in the field of electrochemical analysis technology and nano-spectroscopy, can solve the problems of influence of motion behavior, complicated labeling process, influence of single-molecule analysis results, etc., to achieve the effect of accelerating the detection rate and expanding the application field.
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Embodiment 1
[0050] The photoelectric synchronous sensing method of the solid-state nano channel based on dark field imaging comprises the following steps (see figure 1 ):
[0051](1) Preparation of semiconductor substrate film coated with metal nano-coating
[0052] ① Deposit a layer of 100nm-thick silicon nitride film 3 on the single crystal silicon wafer by chemical vapor deposition technology of micromachining technology, and then use photolithography to etch squares with a side length of 200 microns and a spacing of 5 mm on one side of the single crystal silicon wafer. The window 4 exposes the silicon nitride film 3; the silicon circle is cut to obtain a substrate 5 containing a single square window 4.
[0053] The micro-processing technology includes chemical vapor deposition, photolithography, chemical etching, electron beam exposure, reactive ion beam etching, magnetron sputtering, electron beam evaporation, atomic layer deposition, molecular beam epitaxy, laser sputtering deposit...
Embodiment 2
[0097] A photoelectric synchronous sensing method of a solid-state nanochannel based on dark-field imaging, comprising the following specific steps:
[0098] (1) Prepare a semiconductor substrate film coated with a metal nano-coating (same as Example 1).
[0099] (2) Preparation of a metal-coated nanochannel chip (same as in Example 1).
[0100] (3) Prepare a photoelectric detection microcell (same as Example 1).
[0101] (4) Dark-field imaging using metal-coated nanochannels
[0102] Perform dark-field imaging on the metal-coated nanochannel chip 9 and continuously monitor the changes in its spectrum within a certain period of time. The specific content is:
[0103] ① Place the photoelectric detection microcell on the microscope stage, perform dark-field illumination through the dark-field lens, use a 100 W halogen lamp as the white light source, and use the microscope imaging device to image on the first color CCD camera.
[0104] ② Convert the optical path so that all th...
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