Method for on-line monitoring of preparation of copper indium gallium selenide absorption layer
A copper indium gallium selenide and absorption layer technology, which is applied in the field of online monitoring for preparing a copper indium gallium selenide absorption layer, can solve the problems of limited scope, unrealistic wide application, and difficulty in obtaining a CIGS film with uniform and high crystalline quality. Achieve the effect of improving performance, yield, and high crystal quality
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[0027] Example 1 Roll-to-roll deposition of a large area CIGS film on a flexible substrate, see figure 1 .
[0028] The flexible substrate includes metal foil, such as Ti foil, stainless steel, Cu foil, etc., with a substrate thickness of 50-100μm; or a plastic substrate, such as polyimide (PI), etc., with a substrate thickness It is 25-50μm.
[0029] use figure 1 The device shown is a rectangular parallelepiped as a whole, made of #316 stainless steel plate, through a seamless welding process; a water-cooled pipeline is seamlessly welded on the surface of the vacuum chamber, and the temperature of the cold water introduced is about 20°C. The device includes three chambers, a vacuum valve and a vacuum system. The vacuum system 4 is located at both ends of the device, and is used to maintain the vacuum of the chamber during film coating of the device. Install a vacuum valve 5 between the first and third chambers and the vacuum system. In the upper part of the vacuum chamber, ther...
Example Embodiment
[0035] Example 2 Continuous evaporative deposition of a large area CIGS thin film on a glass substrate, see figure 2 .
[0036] Using a co-evaporation process, a large-area CIGS absorption layer is continuously deposited on the glass substrate / Mo film, and the thickness of the glass substrate is 1-3 mm. use figure 2 The device shown deposits a large area CIGS thin film. The device includes three deposition chambers, a vacuum valve and a vacuum system. The main body structure, constituent materials, and cooling system of the device are the same as those described in the first embodiment. The distribution of the evaporation sources in the three chambers, the heating system, the temperature control system, the online monitoring device, and the location layout of the X-ray fluorescence spectrometer are the same as those in the first embodiment. The difference is that a soaking plate and a transmission device 29 are installed on the upper part of the first and second deposition ch...
Example Embodiment
[0039] Example 3 An online monitoring and deposition device for preparing a small area CIGS thin film in a laboratory, such as image 3 Shown.
[0040] use image 3 The device shown uses a three-step process of co-evaporation to deposit CIGS films on flexible or rigid substrates. The substrates include flexible substrates such as polyimide and various metal foils, and rigid substrates such as glass. . The thickness of the substrate is 0.05mm-3mm. image 3 The vacuum evaporation chamber 31 in the device is in the shape of a rectangular parallelepiped as a whole, made of #316 stainless steel plate through a seamless welding process; a water-cooled pipeline is seamlessly welded on the surface of the vacuum chamber, and the cold water temperature is about 20°C. A vacuum system 34 is arranged on the right side of the vacuum chamber, and an ionization gauge 35 is installed on the left side to test the pressure of the chamber. A substrate heating system 32 is installed on the upper par...
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