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Lead zirconate titanate/barium titanate ferroelectric superlattice material, and preparation method thereof

A technology of lead zirconate titanate and superlattice, applied in metal material coating process, ion implantation plating, coating, etc., can solve the problems of non-compliance, high leakage current and loss, low ferroelectric polarization intensity, etc. Achieve the effect of symmetrical ferroelectric loop, low leakage current and high dielectric constant

Inactive Publication Date: 2017-06-16
INST OF METAL RESEARCH - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although ferroelectric superlattice materials can improve some aspects of electrical properties compared with pure ferroelectric thin films, there are still some problems, such as the ferroelectric superlattice material has small ferroelectric polarization, leakage current and loss Higher, these do not meet people's requirements for high-performance integrated ferroelectric devices

Method used

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  • Lead zirconate titanate/barium titanate ferroelectric superlattice material, and preparation method thereof
  • Lead zirconate titanate/barium titanate ferroelectric superlattice material, and preparation method thereof
  • Lead zirconate titanate/barium titanate ferroelectric superlattice material, and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0031] (1) 0.7% Nb-SrTiO 3 (001) The substrate is microwave-sonicated in acetone and alcohol for 20 minutes, then the substrate is heated to 750° C. in vacuum, and annealed for 60 minutes;

[0032] (2) Using pulsed laser deposition method, under the conditions of deposition temperature 750°C and oxygen pressure 40Pa, in 0.7% Nb-SrTiO 3 (001) Deposit lanthanum calcium manganese oxide 4nm on the substrate; Under the condition that the deposition temperature is changed to 650° C. and the oxygen pressure drops to 5Pa, 5 nm of lead zirconate titanate film is deposited on the lanthanum calcium manganese oxide;

[0033] (3) Under the conditions of maintaining the deposition temperature at 650°C and the oxygen pressure at 5 Pa, the laser bombarded the barium titanate target to make the deposition thickness 5nm. After 30 seconds, switched to the laser bombardment of the lead zirconate titanate target to make the deposition thickness 5nm. The periodic thickness of the superlattice mate...

Embodiment 2

[0038] (1) 0.7% Nb-SrTiO 3 (001) The substrate is microwave-sonicated in acetone and alcohol for 20 minutes, then the substrate is heated to 750° C. in vacuum, and annealed for 60 minutes;

[0039] (2) Using pulsed laser deposition method, under the conditions of deposition temperature 750°C and oxygen pressure 40Pa, in 0.7% Nb-SrTiO 3 (001) Deposit lanthanum calcium manganese oxide 4nm on the substrate; Under the condition that the deposition temperature is changed to 650° C. and the oxygen pressure drops to 5Pa, 5 nm of lead zirconate titanate film is deposited on the lanthanum calcium manganese oxide;

[0040] (3) Under the conditions of maintaining a deposition temperature of 650°C and an oxygen pressure of 5Pa, the laser bombarded the barium titanate target to make the deposition thickness 2.5nm. After 30 seconds, switched to the laser bombardment of the lead zirconate titanate target to make the deposition thickness 2.5nm. , the periodic thickness of the superlattice ma...

Embodiment 3

[0043] (1) 0.7% Nb-SrTiO 3 (001) The substrate is microwave-sonicated in acetone and alcohol for 20 minutes, then the substrate is heated to 750° C. in vacuum, and annealed for 60 minutes;

[0044] (2) Using pulsed laser deposition method, under the conditions of deposition temperature 750°C and oxygen pressure 40Pa, in 0.7% Nb-SrTiO 3 (001) Deposit lanthanum calcium manganese oxide 4nm on the substrate; Under the condition that the deposition temperature is changed to 650° C. and the oxygen pressure drops to 5Pa, 5 nm of lead zirconate titanate film is deposited on the lanthanum calcium manganese oxide;

[0045] (3) Under the conditions of maintaining the deposition temperature of 650°C and the oxygen pressure of 5Pa, the laser bombarded the barium titanate target to make the deposition thickness 36nm. After 30 seconds, switched to the laser bombardment of the lead zirconate titanate target to make the deposition thickness 36nm. The periodic thickness of the superlattice mat...

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Abstract

The invention provides a lead zirconate titanate / barium titanate ferroelectric superlattice material, and a preparation method thereof. The lead zirconate titanate / barium titanate ferroelectric superlattice material is composed of lead zirconate titanate and barium titanate which are obtained via periodic growth, wherein the periodic thickness of the lead zirconate titanate and barium titanate ranges from 5 to 72nm. Compared with single-layer lead zirconate titanate and barium titanate ferroelectric film, the lead zirconate titanate / barium titanate ferroelectric superlattice material possesses following advantages: leakage current is reduced by 2 to 3 orders of magnitude, dielectric loss is reduced by one order of magnitude, and dielectric constant is increased by nearly 100%; and ferroelectric superlattice possesses more symmetrical ferroelectric hysteresis loop. According to the preparation method, deposition of lead zirconate titanate and barium titanate obtained via periodic alternative growth on a 0.7% Nb-SrTiO3(001) base plate provided with a buffer layer is carried out via pulsed laser deposition, and the periodic thickness superlattice is adjusted accurately via controlling laser irradiation time. The application prospect of the lead zirconate titanate / barium titanate ferroelectric superlattice material as a high-performance ferroelectric substance in the fields of integrated ferroelectric microelectronic devices such as sensors and memorizers is promising.

Description

technical field [0001] The invention belongs to the fields of data storage materials, functional materials and intelligent materials, and in particular relates to a lead zirconate titanate / barium titanate ferroelectric superlattice material and a preparation method thereof. Background technique [0002] In the past two decades, with the development of thin film preparation technology and the continuous improvement of the miniaturization and multifunctional requirements of electronic products and their components, the preparation technology of ferroelectric thin films has also developed rapidly. The combination of ferroelectric thin film and semiconductor technology makes it have broad application prospects in the field of ferroelectric integrated microelectronics such as ferroelectric memory devices, crystal field effect transistors, and surface acoustic wave devices. [0003] However, as the thickness of the ferroelectric film decreases, the electrical properties of the fil...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/08C23C14/28
CPCC23C14/088C23C14/28
Inventor 王占杰何斌
Owner INST OF METAL RESEARCH - CHINESE ACAD OF SCI
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