Preparation method of HEDP copper-plated non-porous thin layer
A technology of porosity and thin layer, which is applied in the field of preparation of non-porous thin layer of HEDP copper plating, can solve the problems of slow deposition speed, cracking of plating solution performance, low porosity, etc., and achieve good economic and social benefits, bath maintenance Convenience and stable bath performance
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Publication Date
- 2017-09-22
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Figure 1
Abstract
Description
technical field
[0001] The invention belongs to the technical field of cyanide-free electroplating copper plating technology, and in particular relates to a preparation method of HEDP copper-plating non-porous thin layer. Background technique
[0002] Cyanide copper plating has become the most widely used and mature pre-plating copper technology due to its good dispersion ability of plating solution, fine crystallization, and good bonding force between coating and substrate. However, it uses toxic and harmful cyanide and HCN produced by cyanide carbonation. It is also highly toxic, has strict requirements on the safety of the operating system, and costs a lot to deal with the three wastes. The development of an environmentally friendly cyanide-free copper plating process to replace the cyanide copper plating process is the focus of research in the field of electroplating industry.
[0003] Although there are many types of cyanide-free copper plating processes, such as sulfa...
Examples
Embodiment 1
[0024] 1) Substrate treatment: sand with 600#, 800#, 1000# sandpaper in sequence to remove floating rust on the surface; then carry out chemical degreasing, the composition of chemical degreasing liquid is: sodium hydroxide 70g / L, sodium carbonate 40g / L, phosphoric acid Trisodium 40g / L, sodium silicate 20g / L, temperature 80°C, time 20min; then wash with flowing warm water, flow cold water, deionized water, and then activate. The composition of the activation solution is: hydrochloric acid 25g / L, room temperature, time 90s ;Followed by flowing cold water washing, deionized water washing, and then neutralization, the neutralization liquid composition is: sodium carbonate 35g / L, room temperature, time 60s; then flowing cold water washing, deionized water washing;
[0025] 2) Electroplating solution preparation: prepare 1L HEDP copper plating solution, its composition is as follows:
[0026] Basic copper carbonate 15g / L;
[0027] Sodium Potassium Tartrate 14g / L;
[0028] Potassi...
Embodiment 2
[0034] 1) Substrate treatment: sand with 600#, 800#, 1000# sandpaper in sequence to remove floating rust on the surface; then carry out chemical degreasing, the composition of chemical degreasing liquid is: sodium hydroxide 70g / L, sodium carbonate 40g / L, phosphoric acid Trisodium 40g / L, sodium silicate 20g / L, temperature 80°C, time 20min; then wash with flowing warm water, flow cold water, deionized water, and then activate. The composition of the activation solution is: hydrochloric acid 25g / L, room temperature, time 90s ;Followed by flowing cold water washing, deionized water washing, and then neutralization, the neutralization liquid composition is: sodium carbonate 35g / L, room temperature, time 60s; then flowing cold water washing, deionized water washing;
[0035] 2) Electroplating solution preparation: prepare 1L HEDP copper plating solution, its composition is as follows:
[0036] Basic copper carbonate 15g / L;
[0037] Sodium Potassium Tartrate 14g / L;
[0038] Potassi...