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A special metal scribing knife using a micro-arc oxidation process and its manufacturing method

A technology of micro-arc oxidation and manufacturing method, which is applied in the direction of manufacturing tools, anodic oxidation, metal processing equipment, etc., can solve the problems that single-chip quality control cannot be realized, intelligent detection and control is not easy to realize, and the quality of wafer cutting is not the same, etc., to achieve Not easy to burn, good self-bonding force, good cutting quality effect

Active Publication Date: 2020-09-29
杨燕军 +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, wire cutting technology has obvious weaknesses compared with inner circle cutting technology. First, the average error of sheet thickness is relatively large (about twice that of inner circle cutting technology).
Second, it is not easy to realize intelligent detection and control in the cutting process
The third is that the success rate of the cutting process is high and the risk is high. Once the wire breaks and cannot be saved, a single crystal rod will be wasted directly
Fourth, single-chip quality control cannot be achieved. The cutting quality of a batch of wafers can only be detected after one cutting is completed, and the cutting quality between wafers is also different.
[0004] The slicing knives in the prior art are in a contradictory state due to their size, bonding force, strength and present. At present, there is no one with high surface hardness, good core toughness, crack resistance, high temperature resistance, good heat dissipation performance, and good cutting performance. Slicing knife for cutting semiconductors with long service life

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0025] A special metal scribing knife using a micro-arc oxidation process, the special metal scribing knife includes three parts: a tough ceramic skeleton, an aluminum alloy composite material, and a dense micro-arc oxidation film layer; the tough ceramic skeleton is specifically made of silicon nitride The toughened and porous ceramic skeleton of ceramic body composited with silicon carbide whiskers; the aluminum alloy composite material is specifically 7A75 aluminum alloy powder mixed with carbon powder and polyvinyl alcohol and then sintered; the aluminum alloy composite material is wrapped with a tough ceramic skeleton , the dense micro-arc oxidation layer is fixed and grown on the surface of the aluminum alloy composite material;

[0026] The manufacture method of this special metal scribing knife comprises the following steps:

[0027] 1) Manufacture of tough ceramic skeleton

[0028] ①Prepare 80g of silicon carbide whiskers, 500g of silicon nitride micropowder with a par...

Embodiment 2

[0043] The whole is consistent with Example 1, the difference is:

[0044] The manufacture method of this special metal scribing knife comprises the following steps:

[0045] 1) Manufacture of tough ceramic skeleton

[0046] ①Prepare 100g of silicon carbide whiskers, 600g of silicon nitride micropowder with a particle size of 3μm-5μm, 15g of potassium fluoride powder, 50g of molybdenum silicide, 80g of ethyl orthosilicate, 50g of absolute ethanol, 50g of purified water, Thermoplastic phenolic resin 25g;

[0047] ② Mix all the materials obtained in step ① and put them into a mold whose outline size is compatible with the outer dimensions of the special metal scribing knife and has a grid with a spacing of 30mm. -5 Under the environment of Pa, keep warm for 8h, obtain the prefabricated blank of grid shape;

[0048] ③ Place the grid-shaped prefabricated blank obtained in step ② in a protective atmosphere of 3 times the atmospheric pressure, and raise the temperature to 1700 °C...

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PUM

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Abstract

The invention discloses a special metal scribing knife using a micro-arc oxidation process and a manufacturing method thereof. The special metal scribing knife includes three parts: a tough ceramic skeleton, an aluminum alloy composite material, and a dense micro-arc oxidation film layer; wherein the toughness The ceramic skeleton is specifically a toughened porous ceramic skeleton composed of silicon nitride ceramic body composited with silicon carbide whiskers; the aluminum alloy composite material is specifically formed by secondary sintering of 7A75 aluminum alloy powder mixed with carbon powder and polyvinyl alcohol; The alloy composite material is wrapped with a tough ceramic skeleton, and the dense micro-arc oxidation layer is fixed and grown on the surface of the aluminum alloy composite material. The invention has high surface hardness, good core toughness, crack resistance, high temperature resistance, good heat dissipation performance, good cutting performance and long service life.

Description

technical field [0001] The invention relates to the field of special materials, in particular to a special metal scribing knife using a micro-arc oxidation process and a manufacturing method thereof. Background technique [0002] The inner circle cutting technology is often used in the silicon wafer slicing process, which developed and matured in the late 1970s. As the diameter of the silicon wafer increases, the size of the inner circle blade required in the inner circle cutting process increases, and the tension force of the blade also increases accordingly. At the same time, the thickening of the cutting edge of the blade increases the cutting loss, and the high-speed cutting increases the damage layer on the surface of the silicon wafer and the loss of the tool. These shortcomings restrict the improvement of the efficiency of the inner circle cutting technology in the direction of large film diameter and the reduction of production costs. Coupled with the difficulty in...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B22F5/00B22F7/06B22F1/00C25D11/06C04B35/81C04B35/584B28D5/00
CPCC04B35/806C25D11/026C25D11/06C04B35/584B22F5/00B22F7/06B28D5/00C04B2235/3826B22F2005/001B22F1/10C04B2235/5276C04B2235/445C04B2235/524C04B2235/483C04B2235/6562C04B2235/6567
Inventor 杨燕军熊朝阳
Owner 杨燕军
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