Nitrogen-doped nickel oxide and zinc oxide near ultraviolet detector
A near-ultraviolet light and nickel oxide technology, applied in the field of photodetectors, can solve the problems of large band gap, difficult detection, and low carrier concentration
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment
[0011] 1) Preparation of the detector
[0012] The structure of the nitrogen-doped nickel oxide / zinc oxide near-ultraviolet photodetector in the present embodiment is Ag electrode 1, NiO:N layer 2 (30nm), ZnO layer 3 (70nm) and FTO layer 4, wherein ZnO, NiO: N and Ag thin films were sequentially grown in a multi-target magnetron sputtering deposition system. The substrate is FTO conductive glass, the square resistance is 6~10Ω, and the size is 40×40mm 2 . The target materials are metal silver (Ag), metal nickel (Ni) and ZnO respectively, the sputtering gas is argon, oxygen and nitrogen, and the purity of the target material and gas is 99.999%. The background vacuum of the sputtering chamber is 5×10 -4 Pa, the distance between the target and the substrate is 6.0-8.0cm, the substrate temperature is room temperature, and the working pressure is 0.1-0.5Pa. The frequency of the radio frequency power supply is 13.56MHz, and the thickness of the sputtered film is monitored by a f...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com