Preparation method of magneto-optic glass-based periodic nanopore magnetic plasma sensor

Abstract

The invention discloses a preparation method of a magneto-optic glass-based periodic nanopore magnetic plasma sensor. According to the method, a non-reciprocal effect-based magnetic plasma sensor is constructed on the basis of a periodic nanopore magnetic plasma structure of high-performance magneto-optic glass. The sensor can quickly and sensitively respond to tiny changes of the refractive index or the dielectric constant of a substance to be detected, is an advanced sensing technology with high sensing efficiency, high sensitivity and low cost, and can be widely applied to the fields of biological and medical sensing, environmental monitoring and the like in the plasma sensing technology.

Description

technical field [0001] The invention belongs to the field of biosensor preparation, in particular to a preparation method of a magneto-optical glass-based periodic nanohole magnetic plasma sensor. Background technique [0002] Up to now, the manufacturing technology of magneto-optical devices composed of tiny optical components and optical fiber components has basically developed and matured, and has been successfully applied in optical sensing and optical communication networks, but these sensors are not only bulky and costly to manufacture, but also discrete devices cannot Applied to high-precision integrated optical information processing chips; driven by the integration of device functions, the manufacture of nanostructured magneto-optical devices (represented by plasmonic nanostructured magneto-optical sensors) has become a major research direction for researchers, and the advantages of nano-integration of magneto-optical devices Not only can the size of the device be g...

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Problems solved by technology

[0002] Up to now, the manufacturing technology of magneto-optical devices composed of tiny optical components and optical fiber components has basically developed and matured, and has been successfully applied in optical sensing and optical communication networks, but these sensors are not only bulky and costly to manufacture, but also discrete devices cannot Applied to high-precision integrated optical information processing chips; driven by the integration of device functions, the manufacture of nanostructured magneto-optical devices (represented by plasmonic nanostructured magneto-optical sensors) has become a major research direction for researchers, and the advantages of nano-integration of magneto-optical devices Not only greatly reduce the device size and cost, but also improve the sensitivity of optical sensing

[0003] The magnetoplasmonic nanostructure is the basic structural unit of the integrated magneto-optic sensor, and it is also the most effective platform for realizing the magneto-optic sensor. Function, stimulate a variety of SPR modes, enhance the magneto-optical effect, and can effectively and precisely control light through an external magnetic field, and induce the non-reciprocal effect of the material, which is used for optical sensing, biosensing, photocatalysis, terahertz, etc. Advanced fields provide high-sensitivity magneto-optical sensing. Although the integration of magneto-plasmonic nanostructures has been realized on composite films, the design and fabrication of magneto-plasmonic nanostructures are still not ideal, which is the bottleneck for the realization of integrated magneto-optic sensors (transparent in the visible light region). The optical rate is not ideal, the resonance peak is wide and the magneto-optical effect is limited), which is mainly reflected in the following aspects:

[0004] 1) Using a continuous (aperiodic) magnetic plasmonic structure, the optical absorption of this structure (especially the magnetic film) is too large to consume the conduction plasmon resonance energy, and the lost energy is quickly converted into a larger resonance line width, resulting in a broadening of the spectrum And the spectral resolution is reduced, and the non-periodic structure only supports the transmission of a single resonance wave (conducted SPR), which makes the sensing sensitivity limited;

[0005] 2) Most of the design of the magnetic plasmonic structure is based on transparent BK glass, but BK glass has a small refractive index (1.42), which is easy to cause strong resonance peaks at the gold / glass interface, thereby interfering with the spectrum of conductive plasma and localized plasma Analysis, some studies have used a high refractive index silicon nitride layer sandwiched between the glass and the gold layer to solve this problem. By introducing high refractive index silicon nitride to suppress the oscillation amplitude and light energy consumption of light at the metal & glass interface, the nanostructure The refractive index of the glass is better matched, and the spectrum can be effectively separated. However, depositing a silicon nitride film with a high melting point on the glass will not only increase the cost and increase the complexity of the structure, but also increase the loss of light energy and even signal interference. As the thickness of the silicon film increases, the optical wavelength window will be red-shifted, and the light transmittance will drop dramatically, which is not conducive to the sensing application in the visible light band;

[0006] 3) The magneto-optical materials used (including ferromagnetic materials and ferrite magnetic materials) have obvious limitations: ferromagnetic materials such as BIG have high magneto-optical activity, but the huge optical absorption coefficient limits the use of optical devices. Although ferrite magnetic materials have the advantages of high magneto-optical activity and low light absorption coefficient, as a single crystal, the cost is high, and its lattice constant and thermal expansion coefficient are extremely difficult to match with glass, and the non-reciprocal effect is limited. , and its growth process requires a high temperature of 700 ° C, which greatly restricts its wide application;

[0007] Therefore, although the magnetic plasmonic structure has the attractive prospect of exciting the plasmon and magneto-optical effects through an external magnetic field, due to the problems in the design and fabrication of the magnetic plasmonic nanostructure, the existing integrated magneto-optical sensors cannot meet the requirements of optical communication and optical communication. The growing need for sensing systems

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