Laminated body, composition, and laminated-body formation kit
A technology of laminates and compositions, applied in the direction of coatings, photosensitive materials for optomechanical equipment, instruments, etc., can solve the problem of slowing down the dissolution rate of the developer, and achieve the effect of excellent pattern shape
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[0628] Hereinafter, an Example is given and this invention is demonstrated further concretely. Materials, usage amounts, proportions, processing contents, processing procedures, and the like shown in the following examples can be appropriately changed without departing from the gist of the present invention. In addition, unless otherwise specified, "%" and "part" are based on mass.
[0629] The weight average molecular weight (Mw) of water-soluble resins, such as polyvinyl alcohol, is calculated by the polyether oxide conversion value measured by GPC. HLC-8220 (manufactured by TOSOH CORPORATION) was used as the device, and SuperMultiporePW-N (manufactured by TOSOH CORPORATION) was used as the column.
[0630] The weight average molecular weight (Mw) of water-insoluble resins, such as a (meth)acrylic resin, is calculated by the polystyrene conversion value measured by GPC. HLC-8220 (manufactured by TOSOH CORPORATION) was used as an apparatus, and TSKgelSuper AWM-H (manufactur...
Synthetic example 1
[0633]
[0634] 70g of 1-n-butoxynaphthalene and 200g of phosphorus pentoxide-methanesulfonic acid mixture were put into an eggplant-shaped flask, and after stirring at room temperature for 15 minutes, 40g of tetramethylene methylene was added dropwise at 0°C. Sulfone, after stirring for 20 minutes, was slowly warmed to room temperature and stirred for a further 1 hour. Then, it was cooled to 0° C. again, 2 L of water was added, the pH was adjusted to 7.0 with 25% aqueous ammonia, and the mixture was stirred at room temperature for 1 hour. Then, a solution obtained by dissolving 110 g of difluoro(sodium sulfonate) methyladamantane-1-carbonate in 100 L of water-methanol mixture was added, stirred at room temperature for 1 hour, extracted with dichloromethane, and further Washed with water. Then, dichloromethane was distilled off under reduced pressure for purification, and 81 g of specific photoacid generator B-1 were obtained.
Synthetic example 4
[0635]
[0636] B-2 to B-6 were synthesized by the same synthesis method as that of B-1 above.
[0637] (synthesis of specific resin)
[0638] The specific resin was synthesized by the synthesis method described below.
[0639]
[0640] PGMEA (propylene glycol monomethyl ether acetate, 32.62 g) was put into the three-necked flask equipped with the nitrogen introduction pipe and the cooling pipe, and it heated up to 86 degreeC. BzMA (benzyl methacrylate, 13.23 g), THFMA (tetrahydrofuran-2-yl methacrylate, 26.72 g), t-BuMA (tert-butyl methacrylate, 3.85 g) were added dropwise thereto over 2 hours. ) and V-601 (0.4663 g, manufactured by FUJIFILM Wako Pure Chemical Corporation) dissolved in PGMEA (32.62 g). Then, the reaction liquid was stirred for 2 hours to complete the reaction. Specific resin A-1 was obtained by collecting the white powder produced by reprecipitating the reaction liquid in heptane by filtration. The weight average molecular weight (Mw) was 45,000.
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