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Prep.of strontium titanate barium ceramic target

A technology of barium strontium titanate and ceramic target, applied in the field of materials, can solve the problems of complicated preparation process, easy precipitation of acetate particles, poor film-forming stability, etc., and achieve the effect of high uniformity and high activity

Inactive Publication Date: 2006-04-12
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Strontium and barium alkoxides are sensitive to water vapor and carbon dioxide, and the preparation process is quite cumbersome
The water-based sol-gel method using acetic acid as a solvent and acetate as a raw material has been reported to prepare clothing. However, due to the use of acetic acid as a solvent, acetate particles are easily precipitated during film formation by the spin coating method, and the film formation is stable. poor sex

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0017] The raw materials used are titanium tetrachloride, strontium chloride, barium chloride and oxalic acid. Firstly, TiCl 1 , SrCl 2 2H 2 O and BaCl 2 2H 2 O was prepared into aqueous solutions with mass concentrations of 200g / L, 180g / L and 190g / L respectively, and then added to oxalic acid aqueous solution at 60°C in a proportion of 10% to carry out the synthesis reaction, and the pH value was controlled to be 5 to obtain white oxalic acid oxygen Barium strontium titanate precipitate, the precipitate is washed, filtered, dried and thermally decomposed to obtain Ba 1-x Sr x TiO 3 For the powder, the molar ratio of SrO:BaO is 0.5:0.5 respectively.

Embodiment 2

[0019] The raw materials used are titanium tetrachloride, strontium chloride, barium chloride and oxalic acid. Firstly, TiCl 1 , SrCl 2 2H 2 O and BaCl 2 2H 2 O was prepared into aqueous solutions with mass concentrations of 210g / L, 180g / L and 195g / L respectively, and then added to oxalic acid aqueous solution at 60°C in a proportion of 20% to carry out the synthesis reaction, and the pH value was controlled to be 6 to obtain white oxalic acid oxygen Barium strontium titanate precipitate, the precipitate is washed, filtered, dried and thermally decomposed to obtain Ba 1-x Sr x TiO 3 For the powder, the molar ratio of SrO:BaO is 0.3:0.7 respectively. The obtained strontium barium titanate composite powder is pretreated and then dosed according to the stoichiometric ratio, pulverized by a ball mill, and placed in a silicon carbide rod furnace for pre-calcination. After the pre-fired powder is pulverized by a ball mill, it is pressed into a round cake-shaped block with a d...

Embodiment 3

[0021] The raw materials used are titanium tetrachloride, strontium chloride, barium chloride and oxalic acid. Firstly, TiCl 4 , SrCl 2 2H 2 O and BaCl 2 2H 2 O was prepared into aqueous solutions with mass concentrations of 210g / L, 190g / L and 180g / L respectively, and then added to oxalic acid aqueous solution at 80°C in a proportion of 30% to carry out the synthesis reaction, and the pH value was controlled to be 6 to obtain white oxalic acid oxygen Barium strontium titanate precipitate, the precipitate is washed, filtered, dried and thermally decomposed to obtain Ba 1-x Sr x TiO 3 For the powder, the molar ratio of SrO:BaO is 0.4:0.6 respectively. In the X-ray diffraction spectrum of barium strontium titanate powder, the BST ferroelectric ceramic target presents (Ba 1-x S r x)TiO 3 The tetragonal phase of the structure, this is because the sintering temperature is not very high, although SrO has a certain degree of mobility, but it is less volatile, and SrO has not ...

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Abstract

The present invention belongs to the field of material preparation technology. The preparation of strontium barium carbonate ceramic target includes the steps of: making the water solution of titanium tetrachloride, water solution of strontium chloride, water solution of barium chloride and water solution of oxalic acid react in controlled pH value to obtain strontium barium titanium oxalate precipitate; washing, filtering, stoving and thermally decomposing the precipitate to obtain composite strontium barium carbonate powder; pretreating, ball milling and presintering the powder; re-milling, pressing in hydraulic press and isostatic forming; and final sintering in Siliconit furnace to obtain strontium barium carbonate ceramic target. The prepared powder has high purity, fine size, high homogeneity and high activity and can meet the requirement for RF magnetically controlled sputtering and the target of the present invention has excellent application foreground.

Description

technical field [0001] The invention relates to a method for preparing a barium strontium titanate ceramic target, in particular to a method for synthesizing barium strontium titanate and a barium strontium titanate ceramic target for magnetron sputtering, belonging to the field of materials. Background technique [0002] Barium strontium titanate (BST) has a higher 3 Higher dielectric constant is one of the important raw materials for the development of high-performance sensitive components, ceramic capacitors and multifunctional semiconductor ceramics. It has broad application prospects in high-tech fields such as microelectronics, integrated optics and optoelectronics, and has attracted great attention from scientists from all over the world. The application of BST ferroelectric thin films and bulk materials in uncooled infrared focal plane arrays has been extensively and deeply studied. There are many methods for preparing BST ferroelectric thin films, such as sputteri...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C04B35/465C04B35/622C23C14/34
Inventor 张汝冰杨春生冯洁
Owner SHANGHAI JIAO TONG UNIV
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