The invention relates to a
magneto-rheological effect viscoelastic clamping electroceramic substrate flexible
grinding and
polishing device and a flexible
grinding and
polishing method. The device comprises a
grinding head main shaft, a base plate, a magnetic sleeve, a high-magnetic-induction-intensity magnetic body, a grinding disc trimming sleeve, a grinding disc and a grinding disc main shaft, wherein the magnetic sleeve has the same shape and the same size as the ultra-thin hard crispy material substrate, the base plate provided with the high-magnetic-induction-intensity magnetic body is embedded and fixed onto the magnetic sleeve by fixing screws for forming the flexible grinding and
polishing head, the grinding disc is fixedly arranged on the grinding disc main shaft, the grinding disc trimming sleeve is arranged on the grinding disc, and
magneto-rheological work liquid is added onto the upper surface of the grinding disc through a circulation
pipe. The electroceramic substrate flexible grinding and polishing device based on the
magneto-rheological effect can be used for carrying out grinding and polishing on the small-thickness great-warping-deformation ultra-thin hard crispy material substrate which can easily fracture in the grinding
processing process and is difficult to install and clamp, the design is reasonable, and convenience and practicability are realized. The magneto-rheological effect viscoelastic clamping electroceramic substrate flexible grinding and polishing method has the
advantage that the operation is simple.