Photo resist film removing agent

A photoresist and stripper technology, applied in the processing of photosensitive materials, etc., can solve the problems of attacking tin, tin migration, residual copper, etc.

Inactive Publication Date: 2007-11-14
HUNAN SCI & TECH RES & DEV CENT
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

But it also has the following disadvantages: one is that it will attack the tin and copper plating, make it discolored, and stain the gold surface; The qualified rate of the finished product is low; the third is that the film slag produced when sodium hydroxide is used to remove the film is too large, it is difficult to filter, it is not suitable for machine retreat, and the film removal efficiency is low; the fourth is that the photoresist polymer in the dry film is due to the use of hydrogen oxidation Sodium dissolves into the waste film removal solution, which makes the waste liquid difficult to handle and has environmental protection problems; fifth, it is necessary to add additives such as Butyl Cellusolove (BCS) or triethanolamine to improve its effect on the dry film. Solubility performance, improve film removal effect, and butyl cellosolves are highly toxic substances

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0045]Embodiment 1: a kind of stripping agent of photoresist film, its weight percent composition is:

[0046] Diethanolamine 10%

[0047] Ethylamine 15%

[0048] Potassium hydroxide 2%

[0049] Ethylene Oxide Propylene Oxide Copolymer 2%

[0050] n-octylamine 3%

[0051] Benzotriazole 0.5%

[0052] Deionized water 67.5%

[0053] Mix the above components uniformly to obtain the remover composition.

[0054] The stripping agent (liquid) of the above-mentioned photoresist film obtained is used to remove the photoresist film from the copper substrate, which is carried out after forming a photoresist pattern on the substrate.

Embodiment 2

[0055] Embodiment 2: a kind of stripping agent of photoresist film, its weight percent composition is:

[0056] Triethanolamine 10%

[0057] Ethylenediamine 12%

[0058] Ammonia 5%

[0059] Ethylene Oxide Propylene Oxide Copolymer 2.5%

[0060] Nonylamine 3%

[0061] Benzotriazole derivatives 0.3%

[0062] Deionized water 67%

Embodiment 3

[0063] Embodiment 3: a kind of stripping agent of photoresist film, its weight percent composition is:

[0064] Monoethanolamine 15%

[0065] Diethylamine 12%

[0066] Ethylene Oxide Propylene Oxide Copolymer 2%

[0067] N-decylamine 3%

[0068] Benzotriazole 0.5%

[0069] Deionized water 67.5%

[0070] Ammonia 5%

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Abstract

A photoresist stripping of the membrane, which is composed of the percentage of weight: Composite organic base 10% - 30%; polyether active agent 1% to 5%; broken film of 1% to 5% copper Corrosion Inhibitor 0.1% -1%; deionized water 60 percent to 70 percent above base is a complex organic chemical-XR-NH2 organic amines in at least two, X is H, OH or NH2, R-n - base; polyether active agent for ethylene oxide and ethylene oxide to block copolymer or inorganic in at least one copolymer; broken film for the long carbon chain aliphatic amines, copper corrosion inhibitor for benzo triazole and its derivatives in at least one. The present invention retreat film properties, and its high rate of retreat membrane, the membrane of the retreat, the use of low-cost, Wuxi migration, copper corrosion, do not contaminate pure tin, gold, silver surface membrane retire at the metal layers with superior protection and particularly suitable for flexible lines and fine lines, and other high-end PCB manufacturing, production safety and environmental protection are used.

Description

technical field [0001] The invention relates to a photoresist stripping solution, which is a composition used for stripping the photoresist film from a substrate during the pattern transfer process of printed circuit manufacturing. Background technique [0002] Since the printed board industry introduced dry film photoresist (Dry Film Photoresist), dry film has become one of the important "imaging" technologies in the transfer of circuit graphics, whether it is a positive image or a negative image. It has good process performance, excellent imaging and chemical resistance. In the pattern electroplating process, it plays an important role in manufacturing fine wires, improving productivity, simplifying procedures, and improving product quality. less than the effect. The current water-soluble dry film can meet the needs of flexible circuit and fine circuit production, and can provide good resolution, corrosion resistance and anti-plating ability. [0003] The photoresist aft...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/42
Inventor 饶桂春汤明坤罗新辉谭丽霞
Owner HUNAN SCI & TECH RES & DEV CENT
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