Solar selective absorption coating and preparing method thereof

An absorbing coating and selective technology, applied in solar thermal power generation, coatings, solar thermal devices, etc., can solve the problems of time-consuming process, enhanced thermal diffusion, and decreased coating performance, so as to improve high temperature stability, Effect of preventing thermal diffusion and improving high temperature resistance

Inactive Publication Date: 2009-04-15
SHANDONG LINUO NEW MATERIAL +1
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, when the working temperature is high, the activity of aluminum ions in the coating increases, the thermal diffusion of metal ions and insulating medium is strengthened, the structure of the coating is disordered, and the performance of the coating decreases, which affects the heat collection efficiency and life of the vacuum tube.
[0005] Chinese invention patent CN 1360084A discloses a solar spectrum selective absorption coating, which is aluminum nitrogen + titanium nitrogen - aluminum titanium film and aluminum nitrogen oxide + Titanium oxynitride-aluminum titanium film, the absorptivity of the coating can reach above α≈0.93, the emissivity ε≈0.06~0.10 (80°C), the stability of the coating has been enhanced, but it still cannot prevent the metal layer in the coating from Diffusion between absorption layers, while the overall performance of the coating is low, and the deposition rate of the coating with oxygen is very low, the deposition of the film layer needs to consume enough process time, and the production cost is high
[0006] The solar selective absorbing coatings currently used in the solar thermal utilization industry are mostly interference film structures with two absorbing layers. The two layers of films interfere with each other due to the different ratios of metal components. With high absorption ratio and lower emission ratio, the high temperature resistance performance has also been greatly improved, but due to the low melting point of the commonly used Al-AlN or SS-AlN metal-ceramic composite film itself, the influence of thermal diffusion is still large

Method used

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  • Solar selective absorption coating and preparing method thereof
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Experimental program
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Effect test

Embodiment 1

[0029] Take the Al-AlN film system as an example: figure 1 It can be seen that the solar selective absorption coating of the present invention is divided into 6 layers from the bottom to the top of the glass substrate, which are the high infrared reflection metal bottom layer 1, the first heat resistance diffusion layer 2, the high metal volume ratio absorption layer 3, and the low metal Volume ratio absorption layer 4 , second heat-resistant diffusion layer 5 and anti-reflection layer 6 . Argon gas was introduced into the coating machine, the aluminum target was opened, and the aluminum film was made by non-reactive sputtering of argon gas as the high-infrared reflection metal bottom layer 1 with a thickness of 120 nm; the Ti target was used in the mixed gas of argon, nitrogen and methane. Medium reactive sputtering to form the first resistance thermal diffusion layer 2 composed of titanium carbon + titanium nitrogen - titanium carbon nitrogen (TiC + TiN - TiCN), the thicknes...

Embodiment 2

[0032] Take the SS-AlN film system as an example: the selective absorption coating is divided into 6 layers from the bottom to the top of the glass substrate. The first layer is a high-infrared reflection metal layer. Argon gas is passed into the coating machine, the copper target is opened, and the copper metal bottom layer is plated. The second layer is the first thermal diffusion resistance layer, which is formed by reactive sputtering using a Ti target in a mixed gas of argon, nitrogen and acetylene to form a titanium carbon + titanium nitrogen - titanium carbon nitrogen (TiC + TiN - TiCN) thermal diffusion resistance layer. , the thickness of this layer is 5nm, and the molar ratio of TiC, TiN and TiCN is 1:3:4. The third layer is a high metal volume ratio absorbing layer, which is formed by reactive sputtering using an aluminum target and a stainless steel target in a mixed gas of argon and nitrogen. The ratio of argon to nitrogen is 1:1, forming a high metal volume ratio...

Embodiment 3

[0035]Take the Al-AlN film system as an example: the selective absorption coating is divided into 6 layers from the bottom to the top of the glass substrate. The first layer is a high-infrared reflection metal layer. Argon gas is introduced into the coating machine, the aluminum target is opened, and the aluminum metal bottom layer is plated. The metal aluminum film with a thickness of 100nm is sputtered by argon gas non-reactive sputtering. The second layer is the first thermal diffusion resistance layer, which uses a Ti target to react and sputter in a mixed gas of argon, nitrogen and butane to form titanium carbon + titanium nitrogen - titanium carbon nitrogen (TiC + TiN - TiCN) for thermal diffusion resistance. layer with a thickness of 8 nm and a molar ratio of TiC, TiN and TiCN of 1:2:5. The third layer is a high metal volume ratio absorption layer, which is formed by reactive sputtering using an aluminum target in a mixed gas of argon and nitrogen. The ratio of argon to...

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Abstract

The invention relates to a solar selectivity absorbing coating which can prevent diffusion and have stable structure, belonging to the technical field of photothermal conversion utilization of solar energy; the absorbing coating, from top to bottom, sequentially comprises a metal substrate, an absorbing layer and a reflection reduction layer; the metal substrate is deposited by a first heat resistance diffusion layer which comprises TiC, TiN and TiCN; and the absorbing layer is deposited by a second heat resistance diffusion layer comprising TiN and Ti. The selectivity absorbing coating is generated by the spattering of a metal target in the gas. The solar selectivity absorbing coating has the beneficial effects that the thermal diffusion effect between coatings is effectively prevented, the structure is stable, the high-temperature resistance performance is good, the thermal efficiency is improved, the preparation method is simple and the production cost is low.

Description

technical field [0001] The invention relates to a solar selective absorption coating with anti-diffusion and stable structure prepared by magnetron sputtering coating technology, and belongs to the field of solar photothermal conversion and utilization. Background technique [0002] With the development of human science and technology and the improvement of productivity level, the problem of energy shortage is gradually exposed. The increasing depletion of traditional energy sources such as oil and natural gas restricts the continued development and progress of human beings. Under the new situation of global energy shortage, the development of solar energy is both economical and environmentally friendly, and is a new way to relieve energy shortage. [0003] Solar selective absorbing coatings are used to absorb incoming solar radiation and convert it into thermal energy. The current solar thermal utilization is mainly used in low temperature applications with a temperature ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F24J2/48C23C14/34C23C14/14C23C14/58
CPCF24J2/4652Y02E10/40F24J2/487F24S70/225F24S70/25F24S70/30
Inventor 高元坤齐京王健
Owner SHANDONG LINUO NEW MATERIAL
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