Abrasive material-free polishing fluid for chemical mechanical polishing of rigid fragile material
A non-abrasive polishing liquid and chemical mechanical technology, applied in the field of polishing liquid, can solve the problems of difficult cleaning of the polishing surface, single function of the polishing liquid, and poor versatility, and achieve the effects of small surface damage, low environmental requirements, and reduced processing costs
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Embodiment 1
[0027] A non-abrasive polishing liquid for chemical mechanical polishing of hard and brittle materials, which is composed of hydrofluoric acid (corrosion agent, and can also be used in a mixed solution of phosphoric acid, phosphate and pyrophosphate or oxalic acid, concentrated sulfuric acid, nitric acid, hydrochloric acid and acetic acid during specific implementation. One or more mixtures of the above) 6kg, ammonium fluoride (corrosion inhibitor, can also be replaced by ammonium chloride and / or ammonium bromide) 3kg, alkylphenol polyoxyethylene ether (surfactant One or more of polyoxyethylene alkylphenol, fatty acid polyoxyethylene ester, polyoxyethylene fatty acid ester, polyoxyethylene amide, polyoxyethylene amine and high-carbon fatty alcohol polyoxyethylene ether can also be used during specific implementation Combination instead) 1.5kg, tetramethylammonium hydroxide (PH value adjuster, can also be used in potassium hydroxide, sodium hydroxide, ammonia water, hydroxylamin...
Embodiment 2
[0029] A non-abrasive polishing liquid for chemical mechanical polishing of hard and brittle materials, which is composed of tripotassium phosphate (corrosion agent can also be used in hydrofluoric acid, oxalic acid, concentrated sulfuric acid, nitric acid, hydrochloric acid and acetic acid One or more mixed solutions Replacement) 2kg, potassium pyrophosphate (corrosion agent) 10kg, ammonium chloride (corrosion inhibitor, can also be replaced by ammonium fluoride and / or ammonium bromide) 0.5kg, alkylphenol polyoxyethylene ether (surfactant One or more of polyoxyethylene alkylphenol, fatty acid polyoxyethylene ester, polyoxyethylene fatty acid ester, polyoxyethylene amide, polyoxyethylene amine and high-carbon fatty alcohol polyoxyethylene ether can also be used during specific implementation Combination to replace) 1.5kg, potassium hydroxide (pH value adjuster, also available sodium hydroxide, ammoniacal liquor, hydroxylamine, tetramethylammonium hydroxide, triethanolamine, sod...
Embodiment 3
[0031]A non-abrasive polishing liquid for chemical mechanical polishing of hard and brittle materials, which is composed of hydrochloric acid (corrosion agent, a mixture of hydrofluoric acid, phosphoric acid, phosphate and pyrophosphate or one of oxalic acid, nitric acid and acetic acid) or multiple mixed solutions instead) 6kg, concentrated nitric acid (corrosion agent) 4kg, polyoxyethylene alkylphenol (surfactant, fatty acid polyoxyethylene ester, polyoxyethylene fatty acid ester, polyoxyethylene amide, One or a combination of polyoxyethylene amine, alkylphenol polyoxyethylene ether and high-carbon fatty alcohol polyoxyethylene ether) 3.5kg, ammonium chloride (corrosion inhibitor, fluorine can also be used in specific implementation ammonium chloride and / or ammonium bromide instead) 1.5kg, tetramethylammonium hydroxide (pH value regulator, potassium hydroxide, sodium hydroxide, ammonia, hydroxylamine, triethanolamine, sodium ethylate and acetic acid can also be used during sp...
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