Preparation method of wafer-grade spherical micro-lens array

Abstract

The invention discloses a mould for a spherical micro-lens array, and a preparation method thereof. The method is characterized in that the method comprises steps that: a lens mould micro-groove array and self-aligning silicon mould micro-grooves are respectively etched on a silicon wafer; micro-channels are etched among the lens mould micro-groove array, and are used for connecting the lens mould micro-grooves; a certain amount of heat-released aerosol power is placed; a borosilicate glass wafer is bonded with the silicon wafer under a vacuum condition; the bonded wafers are heated; under the effect of vacuum negative pressure, softened glass is automatically filled into the self-aligning silicon grooves, such that self-aligning glass convex blocks are obtained; the materials are cooled and annealed; silicon is removed, such that a glass mould is obtained; corresponding self-aligning grooves and mould grooves used for controlling lens spaces are etched; anti-adhesion treatments are carried out on the surfaces of the glass mould and the silicon mould; a UV curable adhesive is filled in a spherical glass micro-cavity of the glass mould, such that the lens-molding silicon wafer is self-aligned with the glass mould; the UV curable adhesive in the mould is cured, and the wafer-grade spherical micro-lens array can be obtained after demolding. The method provided by the invention is advantaged in simple technology, low cost, and good reliability.

Description

technical field [0001] The invention relates to a MOEMS (micro-opto-electromechanical system) packaging technology, in particular to a preparation method of a novel microlens array. Background technique [0002] In recent years, portable consumer electronic product terminals such as mobile phones are equipped with tiny video camera modules. The video camera module generally includes a solid-state image acquisition element such as an image sensor (CCD or CMOS image sensor), and a lens (group) that forms an image on the light-receiving surface of the solid-state image acquisition element. [0003] With the continuous miniaturization / thinning of portable electronic products, the video camera module therein should also be further miniaturized / thinning, and meet the requirements of cost-effective factors. Microlenses and their arrays have significant applications in micro-optical systems. They can be used in optical information processing, optical computing, optical interconnect...

AI Technical Summary

Problems solved by technology

In these manufacturing methods, metal materials are usually used as the mold of the lens array, and because the optical microlens has high requirements for dimensional control, the manufacturing cost of the metal mold is usually very high.

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