Titanium nitride chromium coating and double glow plasma seepage preparing method thereof

Abstract

The invention relates to a metal surface cladding material, in particular to a titanium nitride chromium coating and a double glow plasma seepage preparing method of the titanium nitride chromium coating. The titanium nitride chromium coating is composed of titanium nitride and chromium nitride, and the mass ratio of the titanium element to the chromium element in the titanium nitride chromium coating is 100:10-50. The titanium nitride chromium coating is used for metal surface metallurgy. According to the prepared titanium nitride chromium coating, the surface modification layer formed by processing of a double glow plasma seepage metal technology is compact and even; and the titanium nitride chromium coating is an alloy layer with alloying elements distributed in a graded manner, the problem in common membrane base combination does not exist, and the problem that cracking and peeling of a modified layer prepared through an existing surface modified technique (physical vapor deposition method, chemical vapor deposition method, ion implantation and the like) under the bearing condition occur, and consequently, the stainless steel surface is easily corroded is solved. According to the metal surface cladding material, an adopted device is simple, the controllability is high, operation is easy, and the application scope is wide.

Description

technical field [0001] The invention relates to a metal surface coating, in particular to a titanium chromium nitride coating and a preparation method thereof by double-layer glow plasma infiltration. Background technique [0002] Shuanghui plasma metallization technology is developed on the basis of ion nitriding. This technology has the advantages of high quality, high efficiency, low consumption, environmental protection and safety. , Mo, Zr, Al, Ti, Pt, etc.), dual element co-infiltration (W-Mo, Ni-Cr), multi-element co-infiltration (Ni-Cr-Mo-Nb, Cr-Ni-W-Mo) and infiltration The research on compound carburizing or nitriding of metal after carburizing has made great progress, and has been successfully applied to various metal surface treatment fields. At present, most material surface processing technologies are difficult to meet the requirements of material surface modification design. Carburizing, nitriding, etc., which are widely used in the industry, have mature tec...

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Problems solved by technology

[0003] Titanium chromium nitride alloy coating has many excellent properties such as high hardness, good wear resistance, low friction coefficient, good electrical conductivity and corrosion resistance, and is widely used in industrial manufacturing, machining, decorative materials, etc., so , the preparation of titanium chromium nitride alloy hard film has attracted the attention of researchers. At present, the main methods for forming titanium chromium nitride alloy film are: physical vapor deposition (sputtering deposition, electron beam evaporation deposition and other PVD methods), chemical vapor deposition Deposition (CVD), plasma-assisted chemical vapor deposition (PACVD) and other technologies, however, there are some shortcomings in the titanium-chromium nitride alloy thin film prepared by these methods. First, they only form a coating (deposited layer) on the surface of the workpiece, and the film base The binding force is poor, and most of these methods have environmental pollution problems, etc., so developing new methods for preparing titanium-chromium nitride alloy films and obtaining multilayer / multi-layer titanium-chromium nitride alloy films has become a hot research topic at present.