Preparation method of anode film linear ion source assisted cBN (cubic boron nitride) coated cutting tool

A linear ion source, cubic boron nitride technology, applied in coating, ion implantation plating, superimposed layer plating and other directions, can solve the problem of low nitrogen ionization rate, small residual application, high residual stress film adhesion Weak problems, to achieve the effect of improving mechanical properties, changing ionization rate, and improving bonding properties

Inactive Publication Date: 2016-11-16
NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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Problems solved by technology

[0005] The purpose of the present invention is to solve the problems of high residual stress and weak film adhesion due to the low ionization rate of nitrogen gas when depositing cubic boron nitride by radio frequency magnetron sputtering, and to invent a method with small residual application, Preparation method of anodic membrane linear ion source assisted cubic boron nitride coating tool with strong adhesion

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  • Preparation method of anode film linear ion source assisted cBN (cubic boron nitride) coated cutting tool

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preparation example Construction

[0029] A method for preparing an anode film linear ion source assisted cubic boron nitride coated tool, the steps are as follows:

[0030] (1) Substrate pretreatment: Use YG6 cemented carbide blades as the substrate material, firstly grind the surface of the YG6 cemented carbide blades, and use W7, W14, W20 type diamond sandpaper to grind for a total of 30 minutes from coarse to fine. After that, put the blade in hydrofluoric acid solution for ultrasonic cleaning for 10 minutes, and then place the substrate in an acetone suspension composed of diamond microcrystalline powder with a particle size of 0.5-1 μm for ultrasonic cleaning for 20 minutes. Ultrasonic cleaning with deionized water for 10 minutes, after taking it out, filter the surface with deionized water immediately, put it in absolute ethanol solution and ultrasonically clean it for 10 minutes, and finally clean it with N 2 Dry and set aside to obtain the treated substrate. Use chemical vapor deposition to deposit na...

Embodiment 2

[0034] A method for preparing an anode film linear ion source assisted cubic boron nitride coated tool, the steps are as follows:

[0035] (1) Substrate pretreatment: Use high-speed steel blades as the substrate material, firstly grind the surface of the high-speed steel blades, and use W7, W14, and W20 diamond sandpaper to grind for a total of 25 minutes in sequence from coarse to fine. After that, put the blade in hydrofluoric acid solution for ultrasonic cleaning for 15 minutes, and then place the substrate in an acetone suspension composed of diamond microcrystalline powder with a particle size of 0.5-1 μm for ultrasonic cleaning for 15 minutes. Ultrasonic cleaning with deionized water for 10 minutes, after taking it out, filter the surface with deionized water immediately, put it in absolute ethanol solution and ultrasonically clean it for 10 minutes, and finally clean it with N 2 Dry and set aside to obtain the treated substrate. Nano-aluminum nitride is deposited on th...

Embodiment 3

[0039] The difference between this embodiment and Embodiments 1 and 2 is that the nano-transition layer is not deposited after the tool substrate is polished and cleaned, but is directly placed in the magnetron sputtering device to open the linear ion source of the anode film and adopt the cleaning mode (high voltage , low current, low duty ratio) pre-sputtering treatment is performed on the tool base material, and after the pre-sputtering treatment, the same vertical boron nitride deposition as in Embodiments 1 and 2 is carried out. This embodiment omits the deposition process of the nano-transition layer, which is beneficial to improve the deposition cycle of some tool substrates with better bonding force with cubic boron nitride, and reduce the production cost.

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Abstract

The invention provides a preparation method of an anode film linear ion source assisted cBN (cubic boron nitride) coated cutting tool. The preparation method is characterized by mainly comprising steps as follows: a substrate of the cutting tool is pretreated; the substrate is placed in an anode film linear ion source assisted radio frequency magnetron sputtering deposition system for deposition of a cBN coating, specific parameters of the deposition are as follows: flow of N2 is 5-10 sccm, flow of Ar is 25-40 sccm, the substrate is arranged above a target material about 90 mm, back bias voltage of the substrate is 100-220 V, substrate temperature is 600-900 DEG C, radio-frequency power is 300 W, anode film linear ion source power is 100-300 W, base pressure is 5*10<-4>Pa, deposition pressure is 0.5 Pa, and deposition time is 4-5 h. The preparation method has the advantages that the process is simple, the operation is easier, bonding performance of the coating and the substrate is improved remarkably, and toughness of the cutting tool is improved greatly.

Description

technical field [0001] The invention relates to a preparation technology of a superhard material film, in particular to a preparation method of a cubic boron nitride coating tool assisted by a linear ion source of an anode film, specifically a method of using a linear ion source of an anode film to assist a radio frequency magnetron A preparation method for depositing cubic boron nitride tool coatings on various tool substrates by sputtering vapor deposition. Background technique [0002] The anode membrane linear ion source is a cold cathode ion source with closed electron migration and emission channels, and its main components include magnetic circuit, cathode, anode, gas distribution mechanism and driving power supply. Wherein the ion emission channel and the anode are surrounded by the magnetic circuit. There is a strong magnetic field in the discharge channel, which confines electrons in it. Under the action of orthogonal electric and magnetic fields, electrons perfor...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35C23C14/46C23C14/06C23C14/02C23C16/27C23C16/34C23C28/04
CPCC23C14/022C23C14/024C23C14/0647C23C14/35C23C14/46C23C16/27C23C16/303C23C28/04
Inventor 徐锋叶鹏吴金鑫田帅左敦稳
Owner NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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