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Ti-Ag-N nano-composite coating and preparation method thereof

A nanocomposite coating, ti-ag-n technology, applied in coating, metal material coating process, ion implantation plating, etc., can solve high brittleness and friction coefficient, large internal stress of coating, adhesion and wear coating layer and other problems, to improve the hardness and fracture toughness, reduce the internal stress of the coating, and reduce the coefficient of friction

Inactive Publication Date: 2017-05-31
南京煜弧真空镀膜科技有限公司
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Problems solved by technology

CNC tool surface coating technology, especially coated tools represented by TiN prepared by CVD and PVD, has been widely used in the process of improving the processing efficiency of various alloys, and subsequently developed TiC, TiCN, TiAlN, AlTiN , CrAlN and other coatings have been developed and applied in practice, but because of the oxidation of the coating by the high temperature during the cutting process, the adhesion and wear of the chip to the coating, and the brittleness of the coating itself, the processing problems of the above alloys have not been thoroughly solved. solve
For example, TiAlN coating has high hardness and good high-temperature oxidation resistance, which significantly improves the processing efficiency and tool life, but its high brittleness and friction coefficient limit the application of TiAlN and other coatings in high-speed, dry cutting and difficult cutting. The application of alloys and other materials also limits its practical application in high-precision molds and other wear-resistant and anti-friction workpiece coatings
[0005] How to further reduce the brittleness of coatings such as TiAlN, break through the current problems of large internal stress of the coating and poor adhesion of the film base, and prevent the coating from falling off due to poor toughness before abrasion. The above-mentioned coating needs to be continuously improved.
[0006] In order to solve the above problems, the concept of nanocomposite coatings was proposed at the end of the 20th century, that is, a composite structure of two phases or more than two phases formed by nanocrystal-nanocrystal or nanocrystal-amorphous, and the composite coating has been developed to a certain extent. and applications, such as Blazers, Platit and other international coating companies have developed nc-TiN / a-Si prepared by arc ion plating 3 N 4 Nanocomposite coatings have improved high temperature oxidation resistance and toughness, but in practical applications, nc-TiN / a-Si 3 N 4 The high friction coefficient of the nanocomposite coating leads to a large amount of heat generated during the cutting process, and built-up edge still occurs on the rake face of the coated tool, and its toughness still needs to be further improved

Method used

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Examples

Experimental program
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Effect test

Embodiment 1

[0027] Plating transition layer: the substrate is made of high-speed steel (grade W18Cr4V), the size of the sample is 25mm×10mm×2mm, and the size of the coating surface is 25mm×10mm. The surface before coating is ground, polished, ultrasonically cleaned and dried, and then placed on the sample stage of the vacuum chamber until the vacuum degree in the vacuum chamber reaches 6×10 -3 At Pa, heat the vacuum chamber to 400°C, feed argon gas into the vacuum chamber, set the gas flow rate to 100 sccm, control the air pressure at 2.0 Pa, apply pulse negative bias voltage -800V to the substrate, and perform glow cleaning on the sample for 20 minutes; then , adjust the argon gas flow rate, adjust the vacuum chamber pressure to 0.2Pa, and turn on the titanium target arc source at the same time, the arc current is stable at 70A, bombard the sample with Ti ions for 5min; adjust the pulse negative bias to -300V, and deposit Ti film for 3min ; Then, using a pure titanium target, stop argon ...

Embodiment 2

[0030] The base material is cemented carbide (grade YG6), the size of the sample is 20mm×20mm×4mm, and the size of the coated surface is 20mm×20mm. The surface before coating is ground, polished, ultrasonically cleaned and dried, and then placed on the sample stage of the vacuum chamber until the vacuum degree in the vacuum chamber reaches 4×10 -3 At Pa, turn on the gas mass flow controller, pass argon to 1.0Pa, apply a pulsed negative bias to -600V on the substrate, and perform glow cleaning on the sample for 15 minutes; then, adjust the flow of argon to adjust the pressure of the vacuum chamber to 0.6 Pa, turn on the titanium target arc source at the same time, the arc current is stable at 80A, and bombard the sample with Ti ions for 5 minutes; adjust the pulse negative bias to -300V, and deposit the Ti metal layer for 3 minutes; then, use a pure titanium target and stop the argon gas flow Nitrogen, adjust the air pressure to 1.0Pa; adjust the substrate pulse negative bias t...

Embodiment 3

[0033] The substrate is made of high-speed steel (grade W6Mo5Cr4V2), the size of the sample is 20mm×10mm×2mm, and the size of the coated surface is 20mm×10mm. The surface before coating is ground, polished, ultrasonically cleaned and dried, and then placed on the sample stage of the vacuum chamber until the vacuum degree in the vacuum chamber reaches 4×10 -3At Pa, pass argon gas to 2.0Pa, apply pulse negative bias to -700V on the substrate, and perform glow cleaning on the sample for 30 minutes; then, adjust the Ar gas flow rate to adjust the vacuum chamber pressure to 0.3Pa, and turn on the titanium target arc source at the same time , the arc current was stabilized at 80A, and the sample was bombarded with Ti ions for 8 minutes; the pure titanium target was used, the argon gas was stopped and nitrogen gas was introduced, and the air pressure was adjusted to 1.0Pa; the substrate pulse negative bias was adjusted to -300V, and the target current was adjusted to 90A. TiN film fo...

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Abstract

The invention belongs to the technical field of ultra-hard nano-composite coatings deposited on surfaces of metal materials, and particularly relates to a Ti-Ag-N nano-composite coating and a preparation method thereof. By adoption of the Ti-Ag-N nano-composite coating and the preparation method thereof, the technical problems that a large amount of heat is generated due to a high friction coefficient of a nc-TiN / a-Si3N4 nano-composite coating, and built-up edges are still generated on the front tool face of a coated cutting tool are solved. According to the distance away from a matrix, the nano-composite coating sequentially comprises a transition layer, an intermediate layer and a Ti-Ag-N layer from inside to outside, wherein the transition layer is formed by a Ti film on the surface of the matrix, and the intermediate layer is formed by a TiN film. According to the preparation method, the arc ion plating technique is used for completing preparation of the Ti-Ag-N nano-composite coating. The nano-composite coating prepared through the method has high hardness and also has the advantages that the tenacity is high, the film-matrix bonding force is high, and the friction coefficient is small.

Description

[0001] Technical field: [0002] The invention belongs to the technical field of nanocomposite coating deposited on the surface of metal materials, in particular to a titanium silver nitride (hereinafter referred to as Ti-Ag-N) nanocomposite coating and a preparation method thereof. [0003] Background technique: [0004] At present, with the development of national advanced manufacturing technology, higher and higher requirements are put forward for traditional carbide or high-speed steel cutting tools. Machining technology represented by CNC machine tools is developing in the direction of high speed, high precision and high reliability. CNC tool surface coating technology, especially coated tools represented by TiN prepared by CVD and PVD, has been widely used in the process of improving the processing efficiency of various alloys, and subsequently developed TiC, TiCN, TiAlN, AlTiN , CrAlN and other coatings have been developed and applied in practice, but because of the oxi...

Claims

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Application Information

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IPC IPC(8): C23C14/32C23C14/16C23C14/06
CPCC23C14/325C23C14/0021C23C14/0641C23C14/16
Inventor 刘开岩朱婷婷
Owner 南京煜弧真空镀膜科技有限公司
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