Fabrication method of metastable high magnesium mgzno solid solution alloy film by laser ablation

Abstract

The invention provides an ablation manufacturing method of a metastable-state high-magnesium MgZnO solid solution alloy film, and belongs to the technical field of optical functional materials. In the prior art, the doping amount of Mg is generally smaller than 0.33. The ablation manufacturing method of the metastable-state high-magnesium MgZnO solid solution alloy film belongs to a Sol-Gel method, and is characterized by comprising the following steps: determining the value of x in MgxZn1-xO as follows: 0.25<=x<=0.75, determining the mole ratio of zinc acetate to magnesium acetate according to the value of x, dissolving the zinc acetate and the magnesium acetate in an organic solvent, adding ethanol amine of which the amount is equal to the amount of zinc ions and the amount of magnesium ions, and stirring to obtain a sol solution; spin-coating a substrate with the sol solution, and carrying out low-temperature heat treatment to obtain a gel film; and ablating the gel film by using laser to obtain the metastable-state high-magnesium MgZnO solid solution alloy film, wherein laser power is 5-30 W, the ablation time is 1-1,000 seconds, and the distance between a light outlet of a laser light source and the gel film is 1-50 cm.

Description

technical field [0001] The invention relates to a laser ablation manufacturing method of a metastable high-magnesium MgZnO solid-solution alloy film, belonging to the technical field of optical functional materials. Background technique [0002] Mg x Zn 1-x O ternary material is a new photoelectric functional information material based on ZnO and MgO materials. Compared with ZnO and MgO, it has new physical properties and application prospects. The crystal structure of ZnO is hexagonal wurtzite with a band gap of 3.3eV, and the crystal structure of MgO is a cubic structure with a band gap of 7.7eV. Due to Mg 2+ and Zn 2+ The ionic radii are very similar, therefore, within a certain proportion range Mg 2+ Replace Zn 2+ MgZnO alloy is formed. With the increase of Mg content, the structure of the alloy material changes from hexagonal phase to cubic phase, and the band gap width of the alloy material also increases from 3.3eV to 7.8eV. At the same time, the alloy material ...

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Problems solved by technology

However, in this method, the preparation of the ceramic target itself is quite difficult, and the preparation process is carried out under the harsh conditions of high vacuum. At the same time, due to the poor conductivity of MgO, it is difficult to initiate discharge and difficult to form a film.

In addition, limited by the amount of solid solution of MgO in ZnO, MgZnO solid solution alloy films are prepared by existing preparation methods including pulsed laser deposition, and the doping amount of Mg is generally less than 0.33. If the doping amount of Mg When it exceeds 0.33, it is difficult to establish a thermodynamic phase equilibrium, and the MgZnO solid solution alloy thin film becomes a mixed phase of ZnO and MgO, which makes it impossible to realize the continuous regulation of the band gap width, and it is impossible to obtain the ideal solar blind zone response of the MgZnO solid solution alloy thin film.

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