Three-dimensional carbon nano-material field effect flexible force sensing element and preparation method

A carbon nanomaterial and sensing element technology, applied in the field of electronic information, can solve the problems of environmental noise suppression, low signal-to-noise ratio, uncertainty of quantitative load measurement, etc., and achieve the effect of high sensitivity

Active Publication Date: 2017-06-13
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the practical flexible force-sensitive sensing element is basically a piezoelectric polymer material polyvinylidene fluoride (PVDF) film. Due to the weak signal of this type of force-sensitive element, the signal needs to be pre-ampli

Method used

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  • Three-dimensional carbon nano-material field effect flexible force sensing element and preparation method
  • Three-dimensional carbon nano-material field effect flexible force sensing element and preparation method
  • Three-dimensional carbon nano-material field effect flexible force sensing element and preparation method

Examples

Experimental program
Comparison scheme
Effect test

Example Embodiment

[0055] The method for preparing the three-dimensional structure of the copper surface firstly uses the template method to prepare the three-dimensional structure of the thermoplastic polyurethane, and the steps are:

[0056] (1) Firstly, single or multiple strip-shaped windows are etched on the surface of the silicon wafer with oxide layer, then the oxide layer is removed by HF etching, and then the tetramethylammonium hydroxide aqueous solution is added with isopropanol to etch the pyramid Strip corrosion pit negative type;

[0057] (2) Fill the heated pyramid-shaped silicon negative type with molten thermoplastic polyurethane, and mechanically peel it off after curing under vacuum to form a positive type polyurethane film;

[0058] (3) Coat a layer of polymethyl methacrylate on the positive surface of the above-mentioned polyurethane by the glue spin method with a thickness of less than 1 micron. After it is fully dried, a layer of pure copper is evaporated on the surface by the va...

Example Embodiment

[0066] Example one

[0067] 1. Using photolithography, the oxide layer thickness is 500 nm, and the crystal orientation is Single or multiple parallel photoresist windows with a width of 20 microns to 150 microns and a length of 150 microns to 500 microns are prepared on the monocrystalline silicon wafer. Hydrofluoric acid is used to dissolve the oxide layer at the window, and then placed in a 1:1 25 In a mixed solution of tetramethylammonium hydroxide aqueous solution and isopropanol with a weight ratio of 5%, etch at 95°C, take it out when the cone-shaped tip is fully formed, wash and dry to obtain a negative silicon pyramid;

[0068] 2. Cover the negative surface of the silicon pyramid with a thermoplastic polyurethane sheet with a thickness of 2 mm, heat it to 165°C in a vacuum, hold it under pressure for 5 minutes, take it out, and peel off the polyurethane adhesive layer after cooling and solidification to obtain a positive polyurethane elastomer film ;

[0069] 3. First, the...

Example Embodiment

[0078] Example two

[0079] 1. Same as Example 1, 1;

[0080] 2. Same as Example 1, 2;

[0081] 3. A layer of semiconducting carbon nanotubes is positively coated on the polyurethane elastomer film by the spinning method. The carbon nanotubes are dispersed in toluene solution at a concentration of 0.02mg / ml. The thickness of the carbon nanotube film dispersed on the surface of the pyramid Not more than 10 nanometers, dry at 140°C for 1 hour;

[0082] 4. Same as Example 1, 8;

[0083] 5. Same as Example 1, 9;

[0084] 6. Same as Example 1, 10;

[0085] 7. Same as Example 1, 11.

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Abstract

The invention relates to a design and preparation method for a flexible force sensing element based on a continuous three-dimensional graphene or carbon nanotube field effect structure. Field effect conductivity changes under constant grid voltage of graphene or carbon nanotubes covering the surface of an elastomer pyramid strip are used by the sensing element, a grid electrode is design to be a plane flexible electrode covering the graphene or the carbon nanotube pyramid strip or the top end of an array, the area of a source leakage channel is increased under the compressive deformation for a pyramid by the grid electrode, the field effect conductivity is increased, and the element is high in deformation or loading flexibility. By the designation of the width of the strip, the density of the array and the elasticity modulus of base elastomer materials, force sensing elements with different flexibilities in the loading measurement range of 0-3 MPa can be obtained, and a force sensing film of which the transparency is higher than 80% and the bending curvature is less than 3 mm can be designed and prepared.

Description

technical field [0001] The invention belongs to the field of electronic information, and in particular relates to a class of carbon nanomaterial flexible force-sensitive sensing elements and a preparation method. Background technique [0002] Flexible force-sensitive sensing elements are widely used in many fields, such as tactile sensors for complex curved surface contact load sensing in the robotics field, body surface tension or blood vessel tension sensors in the biomedical field, and force-sensitive touch screens in the information display field, etc., through Using the polymer material as the matrix, the corresponding relationship between the load and the sensing physical quantity is obtained by different sensing principles. At present, the practical flexible force-sensitive sensing element is basically a piezoelectric polymer material polyvinylidene fluoride (PVDF) film. Due to the weak signal of this type of force-sensitive element, the signal needs to be pre-amplifi...

Claims

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Application Information

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IPC IPC(8): G01L1/16G01L9/08C01B32/186C01B32/16B82Y15/00B82Y40/00
CPCB82Y15/00B82Y40/00G01L1/16G01L9/08
Inventor 巴龙刘杰陈超宋航胡松涛吴云
Owner SOUTHEAST UNIV
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