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Three-dimensional carbon nano-material field effect flexible force sensing element and preparation method

A carbon nanomaterial and sensing element technology, applied in the field of electronic information, can solve the problems of environmental noise suppression, low signal-to-noise ratio, uncertainty of quantitative load measurement, etc., and achieve the effect of high sensitivity

Active Publication Date: 2017-06-13
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the practical flexible force-sensitive sensing element is basically a piezoelectric polymer material polyvinylidene fluoride (PVDF) film. Due to the weak signal of this type of force-sensitive element, the signal needs to be pre-amplified, so the signal-to-noise ratio is small. There are certain requirements for environmental noise suppression, and due to the large relaxation of the piezoelectric effect, there is a large uncertainty in the quantitative measurement of the load

Method used

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  • Three-dimensional carbon nano-material field effect flexible force sensing element and preparation method
  • Three-dimensional carbon nano-material field effect flexible force sensing element and preparation method
  • Three-dimensional carbon nano-material field effect flexible force sensing element and preparation method

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preparation example Construction

[0055] The preparation method of the three-dimensional structure of the copper surface first prepares the three-dimensional structure of thermoplastic polyurethane with the template method, and the steps are:

[0056] (1) First, single or multiple strip-shaped windows are etched on the surface of the silicon wafer with an oxide layer, and then the oxide layer is removed by HF etching, and then the pyramid is etched out with tetramethylammonium hydroxide aqueous solution and isopropanol Negative type of strip corrosion pit;

[0057] (2) Fill the above-mentioned pyramid-shaped silicon negative type of heating with molten thermoplastic polyurethane, and mechanically peel off after curing under vacuum to form a positive type polyurethane film;

[0058] (3) Coating one deck of polymethyl methacrylate with the glue-spinning method on the above-mentioned polyurethane positive surface, the thickness is less than 1 micron, after fully drying, evaporate one deck of pure copper on its su...

Embodiment 1

[0067] 1. Prepare single or multiple parallel photoresists with a width of 20 microns to 150 microns and a length of 150 microns to 500 microns on a single crystal silicon wafer with an oxide layer thickness of 500 nanometers and a crystal orientation of by photolithography For the window, use hydrofluoric acid to dissolve the oxide layer at the window, then place it in a 1:1 mixed solution of 25% by weight tetramethylammonium hydroxide solution and isopropanol, and corrode it at 95°C until the tapered tip is fully Take it out when it is formed, and get the silicon pyramid negative type after cleaning and drying;

[0068] 2. Cover a thermoplastic polyurethane sheet with a thickness of 2 mm on the negative surface of the silicon pyramid, heat it to 165°C in a vacuum, keep it under pressure for 5 minutes, take it out, peel off the polyurethane adhesive layer after cooling and solidification, and obtain a positive polyurethane elastomer film ;

[0069] 3. Soak the film positive...

Embodiment 2

[0079] 1, with embodiment one, 1;

[0080] 2, with embodiment one, 2;

[0081] 3. Coating a layer of semiconducting carbon nanotubes on the polyurethane elastomer film with the glue-spinning method, the carbon nanotubes are dispersed in the toluene solution, the concentration is 0.02mg / ml, and the thickness of the carbon nanotube film dispersed on the surface of the pyramid No more than 10 nanometers, dry at 140°C for 1 hour;

[0082] 4, with embodiment one, 8;

[0083] 5, with embodiment one, 9;

[0084] 6, with embodiment one, 10;

[0085] 7, with embodiment one, 11.

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Abstract

The invention relates to a design and preparation method for a flexible force sensing element based on a continuous three-dimensional graphene or carbon nanotube field effect structure. Field effect conductivity changes under constant grid voltage of graphene or carbon nanotubes covering the surface of an elastomer pyramid strip are used by the sensing element, a grid electrode is design to be a plane flexible electrode covering the graphene or the carbon nanotube pyramid strip or the top end of an array, the area of a source leakage channel is increased under the compressive deformation for a pyramid by the grid electrode, the field effect conductivity is increased, and the element is high in deformation or loading flexibility. By the designation of the width of the strip, the density of the array and the elasticity modulus of base elastomer materials, force sensing elements with different flexibilities in the loading measurement range of 0-3 MPa can be obtained, and a force sensing film of which the transparency is higher than 80% and the bending curvature is less than 3 mm can be designed and prepared.

Description

technical field [0001] The invention belongs to the field of electronic information, and in particular relates to a class of carbon nanomaterial flexible force-sensitive sensing elements and a preparation method. Background technique [0002] Flexible force-sensitive sensing elements are widely used in many fields, such as tactile sensors for complex curved surface contact load sensing in the robotics field, body surface tension or blood vessel tension sensors in the biomedical field, and force-sensitive touch screens in the information display field, etc., through Using the polymer material as the matrix, the corresponding relationship between the load and the sensing physical quantity is obtained by different sensing principles. At present, the practical flexible force-sensitive sensing element is basically a piezoelectric polymer material polyvinylidene fluoride (PVDF) film. Due to the weak signal of this type of force-sensitive element, the signal needs to be pre-amplifi...

Claims

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Application Information

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IPC IPC(8): G01L1/16G01L9/08C01B32/186C01B32/16B82Y15/00B82Y40/00
CPCB82Y15/00B82Y40/00G01L1/16G01L9/08
Inventor 巴龙刘杰陈超宋航胡松涛吴云
Owner SOUTHEAST UNIV
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