A kind of tizn alloy film and its preparation method and application

A technology of alloy film and dielectric film is applied in the field of functional film preparation, which can solve the problems of waste pollution, high cost, and complicated methods.
CN108396290BActive Publication Date: 2020-04-24THE NAT CENT FOR NANOSCI & TECH NCNST OF CHINA
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Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Patents(China)
Current Assignee / Owner
THE NAT CENT FOR NANOSCI & TECH NCNST OF CHINA
Publication Date
2020-04-24

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Abstract

The invention provides a TiZn alloy film and a preparation method and application thereof. The TiZn alloy film comprises a nano-rod structure. The preparation method of the TiZn alloy film includes the step that the TiZn alloy film is prepared on a dielectric film, namely the TiZn alloy film is prepared with an induction method. The lattice constant, in a certain direction, of the dielectric filmis approximate to the lattice constant in a certain direction of one material in an alloy material. The invention further provides a titanium-doped zinc oxide film prepared with the TiZn alloy film asthe raw material. A preparation method of the titanium-doped zinc oxide film includes the step of heating and annealing the TiZn alloy film in the oxidizing atmosphere to obtain the titanium-doped zinc oxide film. The titanium-doped zinc oxide film is applied to the optics. The TiZn alloy film is prepared with the pure physical method, so that pollution is avoided completely, the cost is low, repeatability is achieved, and the atom ratio of Ti to Zn in the TiZn alloy film and the size and height of the nano-rod structure can be flexibly adjusted.
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Description

technical field

[0001] The invention belongs to the technical field of preparation of functional thin films, and in particular relates to a TiZn alloy film, a preparation method and application thereof. Background technique

[0002] Materials with ultrafine-pitch nanopillar arrays have attracted much attention due to their unique properties / performance for a wide range of applications. The study found that metal nanoarrays have nanometer-scale spacing and strong coupling of local electric fields, which can be used to prepare nano-lasers and surface-enhanced Raman substrates to improve the sensitivity of biochemical molecular detection. At present, the preparation of nanopillars mainly focuses on template method, etching method, self-assembly and hydrothermal method (seed layer).

[0003] As a wide-band semiconductor material, zinc oxide has a bandgap width of 3.37ev at room temperature. It has the advantages of wide bandgap, high exciton binding energy, non-toxicity, easy a...

Claims

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